G01D5/00

Kingpin assembly with rotation sensor arrangement

A kingpin assembly includes a housing having a recess located therein, a kingpin having at least a portion located within the recess of the housing, wherein the kingpin is secured within the recess of the housing, and wherein the kingpin includes an axis extending along a length of the kingpin, and a sensor arrangement configured to sense a force exerted on the kingpin in a first direction that is substantially perpendicular to the longitudinal axis.

METHOD FOR DETERMINING, MEASURING AND/OR MONITORING PROPERTIES OF A SENSOR SYSTEM

A method for determining, measuring and/or monitoring properties of a sensor system. In the method, a controlled change of at least one system parameter of the sensor system takes place in such a way that prior to the controlled change, the system parameter includes a first value and assumes at least one further value as a result of the controlled change. At least one characteristic variable of the sensor system and/or a change of the at least one characteristic variable of the sensor system is/are determined for the at least one further value of the system parameter. The determination, measuring and/or monitoring of properties of the sensor system take place based the at least one further value of the system parameter and the at least one characteristic variable determined in the second step and/or the change of the at least one characteristic variable.

Metrology method in wafer transportation

A method for fault detection in a fabrication facility is provided. The method includes moving a wafer carrier along a predetermined path multiple times using a transportation apparatus. The method also includes collecting data associated with an environmental condition within the wafer carrier or around the wafer carrier using a metrology tool on the predetermined path in a previous movement of the transportation apparatus. The method further includes measuring the environmental condition within the wafer carrier or around the wafer carrier using the metrology tool during the movement of the wafer carrier. In addition, the method includes issuing a warning when the measured environmental condition is outside a range of acceptable values. The range of acceptable values is derived from the data collected in the previous movement of the transportation apparatus.

Metrology method in wafer transportation

A method for fault detection in a fabrication facility is provided. The method includes moving a wafer carrier along a predetermined path multiple times using a transportation apparatus. The method also includes collecting data associated with an environmental condition within the wafer carrier or around the wafer carrier using a metrology tool on the predetermined path in a previous movement of the transportation apparatus. The method further includes measuring the environmental condition within the wafer carrier or around the wafer carrier using the metrology tool during the movement of the wafer carrier. In addition, the method includes issuing a warning when the measured environmental condition is outside a range of acceptable values. The range of acceptable values is derived from the data collected in the previous movement of the transportation apparatus.

SUPPORT FOR A TRIPOD

A head for supporting an imaging device and being supported by a tripod.

Calibration device, calibration method, and control device

Disclosed is a calibration device including: a position information acquiring unit (101) for acquiring position information showing the position and the posture of control target equipment; a force information acquiring unit (102) for acquiring information about a force applied to the control target equipment from a detection result of a force sensor (5) disposed in the control target equipment; a first estimating unit (104) for estimating the force applied to the control target equipment from the acquired position information by using a physical model, to acquire estimated force information; and a second estimating unit (105) for estimating a linear or nonlinear model on the basis of the acquired position information, the acquired force information, and the acquired estimated force information.

Adaptively calibrated spatio-temporal compressive sensing for sensor networks

In one embodiment, a management entity monitors for a change in a convergence rate of spatio-temporal compressive sensing measurements from a plurality of sensors in a sensor network operating according to a measurement matrix up to a halting criterion, and if the change is below a given threshold, determines whether the change is due to impulse noise or due to continued sensed measurements. If continued sensed measurements, the management entity initiates a single-dimensional compressive sensing in a spatial domain at regular time intervals, and identifies and tracks gradient clusters. In response to a change in joint spatio-temporal sparsity of tracked nodes of the gradient clusters, the management entity can then determine an updated measurement matrix based on the joint spatio-temporal sparsity of tracked nodes while satisfying one or more operating parameters, and directs at least certain sensors of the plurality of sensors to operate according to the updated measurement matrix.

Adaptively calibrated spatio-temporal compressive sensing for sensor networks

In one embodiment, a management entity monitors for a change in a convergence rate of spatio-temporal compressive sensing measurements from a plurality of sensors in a sensor network operating according to a measurement matrix up to a halting criterion, and if the change is below a given threshold, determines whether the change is due to impulse noise or due to continued sensed measurements. If continued sensed measurements, the management entity initiates a single-dimensional compressive sensing in a spatial domain at regular time intervals, and identifies and tracks gradient clusters. In response to a change in joint spatio-temporal sparsity of tracked nodes of the gradient clusters, the management entity can then determine an updated measurement matrix based on the joint spatio-temporal sparsity of tracked nodes while satisfying one or more operating parameters, and directs at least certain sensors of the plurality of sensors to operate according to the updated measurement matrix.

Encoder and encoder control system
11293781 · 2022-04-05 · ·

An encoder according to an example of the present disclosure includes a first reception unit configured to receive a position information request signal for requesting position information on an object to be detected, a position information generation unit configured to generate the position information at a position information generation timing after a predetermined delay time elapses from when the position information request signal is received, and a first transmission unit configured to transmit the position information to the outside via serial communication. The first transmission unit is configured to transmit, at least once, position information generation timing information representing the predetermined delay time to the outside via serial communication.

Encoder and encoder control system
11293781 · 2022-04-05 · ·

An encoder according to an example of the present disclosure includes a first reception unit configured to receive a position information request signal for requesting position information on an object to be detected, a position information generation unit configured to generate the position information at a position information generation timing after a predetermined delay time elapses from when the position information request signal is received, and a first transmission unit configured to transmit the position information to the outside via serial communication. The first transmission unit is configured to transmit, at least once, position information generation timing information representing the predetermined delay time to the outside via serial communication.