An oscillator-based sensor interface circuit includes first and second input nodes arranged to receive first and second electrical signals representative of an electrical quantity, respectively; an analog filter; a first oscillator arranged to receive a first oscillator input signal and a second oscillator different from the first oscillator and arranged to receive a second oscillator input signal; a comparator arranged to compare signals coming from the first and second oscillators; a first feedback element arranged to receive a representation of the digital comparator output signal and to convert the representation into a first feedback signal to be applied to the oscillation means; a digital filter arranged to yield an output signal, being an filtered version of the digital comparator output signal; a second feedback element arranged to receive the output signal and to convert the output signal into a second feedback signal.

An oscillator-based sensor interface circuit includes first and second input nodes arranged to receive first and second electrical signals representative of an electrical quantity, respectively; an analog filter; a first oscillator arranged to receive a first oscillator input signal and a second oscillator different from the first oscillator and arranged to receive a second oscillator input signal; a comparator arranged to compare signals coming from the first and second oscillators; a first feedback element arranged to receive a representation of the digital comparator output signal and to convert the representation into a first feedback signal to be applied to the oscillation means; a digital filter arranged to yield an output signal, being an filtered version of the digital comparator output signal; a second feedback element arranged to receive the output signal and to convert the output signal into a second feedback signal.

Provided is a calibration apparatus comprising: a driving control unit to drive an object provided with a lens in a movable range for moving the object in an optical axis-direction by sequentially controlling a plurality of drive units configured to drive the object within each of a plurality of sections into which the movable range is divided, in calibration of a drive apparatus including: the plurality of drive units; and a magnetic field detection unit configured to detect a magnetic field corresponding to a position of the object; a position acquisition unit to acquire position data of the object; a magnetic field acquisition unit to acquire magnetic field data corresponding to a position of the object; and a generating unit to generate, based on the position data and the magnetic field data, end point information to determine a driving range in each of the plurality of sections.

A system and method for generating an angular calibration factor (ACF) for a metrology tool useful in a fabrication process, the method including providing the metrology tool, the metrology tool including a stage and a housing, measuring a rotational orientation of the stage relative to the housing and generating the ACF for the stage based at least partially on the rotational orientation.

A system and method for generating an angular calibration factor (ACF) for a metrology tool useful in a fabrication process, the method including providing the metrology tool, the metrology tool including a stage and a housing, measuring a rotational orientation of the stage relative to the housing and generating the ACF for the stage based at least partially on the rotational orientation.

A method, system, server and computer program product for the calibration of a sensor of a building. In particular, the method may include: receiving, at the computer system, sensor identification data, the identification data provided by communication of an identifier associated with the sensor and an identification device configured to communicate with the system; receiving, at the computer system, measured data representing a calibration sensor device measured physical phenomenon provided by communication of a portable calibration sensor device with an environment proximate to the sensor, the portable calibration sensor device being configured to communicate with the system; and receiving, at the computer system, sensor data associated with the identification data of the sensor, the sensor data representing a sensor measured physical phenomenon provided by the sensor; calculating, in the computer system, a difference value between the measured data and the sensor data so as to provide calibration data.

A method, system, server and computer program product for the calibration of a sensor of a building. In particular, the method may include: receiving, at the computer system, sensor identification data, the identification data provided by communication of an identifier associated with the sensor and an identification device configured to communicate with the system; receiving, at the computer system, measured data representing a calibration sensor device measured physical phenomenon provided by communication of a portable calibration sensor device with an environment proximate to the sensor, the portable calibration sensor device being configured to communicate with the system; and receiving, at the computer system, sensor data associated with the identification data of the sensor, the sensor data representing a sensor measured physical phenomenon provided by the sensor; calculating, in the computer system, a difference value between the measured data and the sensor data so as to provide calibration data.

A calibration apparatus for a rotational angle measuring system includes a measuring system shaft and a measuring system housing. The calibration apparatus includes a shaft holding device which, in a calibration position, rotates about an axis of rotation and is co-rotatably connected to the measuring system shaft, and, in a load position, is decoupled from the measuring system shaft, a rotationally static housing holding device which, in the calibration position, is co-rotatably connected to the measuring system housing, and, in the load position, is decoupled from the measuring system housing, and a drive motor which drives the shaft holding device. In the calibration position, the shaft holding device has clamping jaws which are pressable onto the radial outer side of the measuring system shaft, and/or, the rotationally static housing holding apparatus has movable pistons which are pressable onto the radial outer side of the measuring system housing.

A magnetic sensor that includes a Hall element; a switch circuit configured to switch a direction of a drive current supplied to the Hall element between a first direction and a second direction; a magnetic field detection circuit configured to execute a detection operation for detecting a target magnetic field acting on the Hall element, based on a first difference between a Hall voltage generated in the Hall element when the drive current is supplied to the Hall element in the first direction and a Hall voltage generated in the Hall element when the drive current is supplied to the Hall element in the second direction; and a test magnetic field generation circuit configured to generate a test magnetic field different from the target magnetic field in a test operation.

A sensing system and a method for sensing position include a first magnetic track comprising a first number of multipoles for generating a magnetic field solidarily fixed to a second magnetic track for generating a magnetic field and a second sensor for sensing magnetic field, forming a magnetic structure. At least two sensors are included. The first sensor is positioned proximal to the first magnetic track, closer to the first magnetic track than to the second magnetic track. The second sensor is positioned proximal to the second magnetic track. The distance between the first sensor and the second magnetic track is larger than the distance between the second sensor and the second magnetic track. The magnetic flux density generated by the first and second magnetic tracks follow a ratio of two or more.