Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly.

A method for operating a flowmeter is disclosed. The flowmeter has a sensor for capturing a measured variable indicating the flow, and for converting the measured variable into a signal. The flowmeter also has a control and evaluation unit that determines a flow measurement value for the flow from the signal and outputs an output value representing the flow measurement value. The method includes: determining flow measurement values; forming smoothed flow measurement values over a plurality of flow measurement values, respectively; and activating a low flow cut-off. When the low flow cut-off is activated, the output value is set to zero if: the current smoothed flow measurement value is below a first predetermined limit value; and a predetermined number of flow measurement values has been determined with deactivated low flow cut-off or a predetermined number of smoothed flow measurement values has been formed with deactivated low flow cut-off.

The present disclosure provides a method and a system therefore for processing wafer. The method includes: monitoring a distribution of particles in a chamber while processing the wafer; determining at least one parameter according to the distribution of the particles for configuring at least one device of the chamber; configuring the at least one device of the chamber according to the at least one parameter; and processing another wafer based on a recipe after configuring the at least one device of the chamber.

An indicator generating method for generating an indicator which is suitable for maintenance prediction of a water heating system is proposed. A power state indication device generates a high power consumption signal if a heating device of the water heating system is activated. The time duration of the activation is such an indicator, if no water flow is present. Furthermore, the time interval between subsequent activations is such an indicator. A predictive maintenance method processes these condition-based indicators and determines a remaining useful lifetime according to a predictive maintenance model. The predictive maintenance device outputs a maintenance signal indicating required maintenance, if the remaining useful lifetime drops below a predetermined threshold. The methods may be performed by water heating systems or beverage makers.

The present disclosure provides methods and systems for introducing an activator to a polymerization reactor. The methods may include introducing liquid activator to a mixing vessel or an inline mixer and mixing aliphatic hydrocarbon solvent to form an activator solution which is introduced to a polymerization reactor. The systems may include a storage vessel, a mixing vessel or inline mixer configured to mix a liquid activator with a hydrocarbon solvent, and a polymerization reactor. The present disclosure also provides a process for producing a polyolefin. The process may include introducing liquid activator to an inline mixer and mixing an aliphatic hydrocarbon solvent with the liquid activator to form an activator solution. The process may include introducing the activator solution, a catalyst, and an olefin feed to a polymerization reactor.

The present disclosure provides methods and systems for introducing an activator to a polymerization reactor. The methods may include introducing liquid activator to a mixing vessel or an inline mixer and mixing aliphatic hydrocarbon solvent to form an activator solution which is introduced to a polymerization reactor. The systems may include a storage vessel, a mixing vessel or inline mixer configured to mix a liquid activator with a hydrocarbon solvent, and a polymerization reactor. The present disclosure also provides a process for producing a polyolefin. The process may include introducing liquid activator to an inline mixer and mixing an aliphatic hydrocarbon solvent with the liquid activator to form an activator solution. The process may include introducing the activator solution, a catalyst, and an olefin feed to a polymerization reactor.

Maximum flow setting. A method of limiting flow through a valve (1) comprising: reading a time series of signals from a flow sensor (5a, 5b); producing a time series of flow rates from the time series of signals; producing an averaged series of values; producing a first bounded series of values by replacing values that are below a lower threshold (13) with the lower threshold (13); producing a second bounded series of values by replacing values that exceed an upper threshold (15) with values that equal the upper threshold (15); producing a maximum flow rate by applying a moving maximum filter (17) to the second bounded series; reading a set point signal (9); limiting the set point signal (9) to the maximum flow rate; producing an actuation signal from the limited set point signal; transmitting the actuation signal to an actuator (7).

This fluid measuring device is provided with: an irradiation unit that irradiates a fluid with light; a light receiving unit that receives light scattered by the fluid; a detecting unit that detects a backflow of the fluid on the basis of a light reception signal from the light receiving unit; and a calculating unit that calculates, on the basis of the detection result by the detection unit and the light reception signal from the light receiving unit, estimated fluid information indicating the flow rate or flow speed of the fluid. Accordingly, even when a backflow of the fluid temporarily occurs, the flow speed of the fluid can be precisely measured.

This fluid measuring device is provided with: an irradiation unit that irradiates a fluid with light; a light receiving unit that receives light scattered by the fluid; a detecting unit that detects a backflow of the fluid on the basis of a light reception signal from the light receiving unit; and a calculating unit that calculates, on the basis of the detection result by the detection unit and the light reception signal from the light receiving unit, estimated fluid information indicating the flow rate or flow speed of the fluid. Accordingly, even when a backflow of the fluid temporarily occurs, the flow speed of the fluid can be precisely measured.

An actuator of an environmental control system of a building including a motor and a drive device driven by the motor and configured to drive a valve within a range of positions. The actuator includes one or more printed circuit boards including one or more processing circuits configured to obtain a raw measurement data set from transducers and generate a flow signal based on the raw measurement data set. The flow signal indicates a flow rate of a fluid through a conduit. The one or more processing circuits are configured to determine an actuator position setpoint based on a flow rate setpoint and the flow signal and operate the motor to drive the drive device to the actuator position setpoint. The motor, the drive device, and the one or more printed circuit boards are located within a common device chassis.