A physical quantity measurement device includes a housing forming a measurement flow path including a measurement inlet and a measurement outlet. The measurement flow path includes a sensor path in which a physical quantity sensor is disposed, an upstream curved path curved to extend from the sensor path toward the measurement inlet, and a downstream curved path curved to extend from the sensor path toward the measurement outlet. An inner surface of the housing includes an upstream outer curved surface that defines an outer outline of a curved part of the upstream curved path, and a downstream outer curved surface that defines an outer outline of a curve part of the downstream curved path. A degree of recess of the downstream outer curved surface is larger than a degree of recess of the upstream outer curved surface.

Provided is a physical quantity detection device capable of electrically connecting with a neutralization region arranged at a place through which a measurement target gas passes in a simple process. A physical quantity detection device 300 of the invention includes a housing 301 having a terminal 303 and a passage portion 100 through which a measurement target gas passes, and a support body 600 that supports a flow rate detection element 601. A neutralization region 500 is formed on the bottom surface of the passage portion of the housing, and the support body is supported by the housing such that the detection unit of the flow rate detection element faces the neutralization region.

A compact physical quantity detecting device is provided since it is possible to lower the mounting height of a chip package by accommodating the chip package in a notched board. In the physical quantity detecting device of the present invention, a part in a thickness direction of a support body on which a flow rate detection unit and a processing unit are mounted is accommodated in a notch provided in a printed board.

The physical quantity measurement device for measuring the physical quantity of the fluid has a measurement flow passage through which the fluid flows; a detection element for detecting the physical quantity of the fluid; a plate-shape physical quantity detector that detects the physical quantity of the fluid by the detection element in the measurement flow passage; a protection body that protects the physical quantity detector; a body recess arranged on the outer surface of the protection body at a position separated from the physical quantity detector in the orthogonal direction, which is orthogonal to a thickness direction of the physical quantity detector.

A gas leak sensing device includes a constant flow rate control valve, a pressurization control valve, a supply-side gas circuit, a master-side gas circuit, a workpiece-side gas circuit, an equal pressure valve, an exhaust valve, a test pressure sensor, and a differential pressure sensor. The supply-side gas circuit is connected with the constant flow rate control valve and the pressurization control valve. The equal pressure valve performs opening and closing between the supply-side gas circuit and the master-side gas circuit and opening and closing between the supply-side gas circuit and the workpiece-side gas circuit. The exhaust valve performs opening and closing between the workpiece-side gas circuit and outside. The test pressure sensor detects pressure in the supply-side gas circuit. The differential pressure sensor detects a differential pressure between the master-side gas circuit and the workpiece-side gas circuit.

A flow sensor configured to detect a fluid flow of a liquid inside a pipe portion is disclosed. A thin film thermal mass flow sensor has a substrate defining a thickness from an upper side opposite a bottom side. The upper side of the substrate supports a resistive heating circuit, a first temperature sensor circuit and a second temperature sensor circuit. The resistive heating circuit is disposed between the first and second temperature sensor circuits. The circuits are electrically connected respectively to a plurality of leadwires configured to be attachable to electronic equipment. A thermally conductive membrane is configured to separate the fluid flow of the liquid inside the pipe portion from the thin film thermal mass flow sensor. A thermally conductive bond connects the bottom side of the substrate of the thin film thermal mass flow sensor to the thermally conductive membrane.

The subject matter of this specification can be embodied in, among other things, a fluid flow measurement apparatus includes an inlet configured to flow a dynamic fluid flow, an outlet configured to flow the dynamic fluid flow, a first fluid conduit fluidically connected between the inlet and the outlet, configured with a first predetermined geometry, and configured to flow a first portion of the dynamic fluid flow, a second fluid conduit fluidically connected between the inlet and the outlet, configured with a second predetermined geometry, and configured to flow a second portion of the dynamic fluid flow, and a first flow meter configured to measure the second portion of the dynamic fluid flow.

A physical quantity measurement device includes a passage flow channel having an inflow port and an outflow port, a branch flow channel branched from the passage flow channel and having a branch inlet into which the fluid flows from the passage flow channel. The branch flow channel has an inclined branch path inclined with respect to the passage flow channel, and the inclined branch path extends from the branch inlet toward the outflow por. An inclination angle of the branch flow channel at the branch inlet with respect to a virtual straight line connecting the inflow port and the outflow port is smaller than or equal to a predetermined value.

A physical quantity measurement device includes a passage flow channel having an inflow port and an outflow port, a branch flow channel branched from the passage flow channel and having a branch inlet into which the fluid flows from the passage flow channel. The branch flow channel has an inclined branch path inclined with respect to the passage flow channel, and the inclined branch path extends from the branch inlet toward the outflow por. An inclination angle of the branch flow channel at the branch inlet with respect to a virtual straight line connecting the inflow port and the outflow port is smaller than or equal to a predetermined value.

A turbofan gas turbine engine having a bypass duct, and a bypass airflow measurement system. The bypass airflow measurement system comprises: at least one acoustic transmitter configured to transmit an acoustic waveform across the bypass duct of the gas turbine engine though which a bypass airflow passes to at least one acoustic receiver; where the at least one acoustic transmitter and the at least one acoustic receiver are located on an axial plane that is substantially perpendicular to the bypass flow. A method of measuring bypass airflow properties of a turbofan gas turbine engine is also described.