Introduced herein are a dimensionless relationship between a volumetric flow rate, a head and a kinematic viscosity in a pump operation and a method that uses the dimensionless relationship to predict a viscous performance of a pump from water performance characteristics. Using the introduced dimensionless relationship, which is called Ketan's viscous head number, the introduced method determines a viscous head correlation that allows the prediction of the pump performance to be made accurately at any given speed, flow rate and viscosity. The introduced Ketan's viscous head number and method thus allow a prediction of a pump performance in a viscous application to be made from water performance characteristics without physically testing the pump in the viscous application.

Techniques for operating a static fluid meter are described herein. In an example, a sampling interval is identified. The sampling interval is a period of time within which an electromagnetic or acoustic device measures or samples a rate of the fluid flow. The sampling interval may be approximately 1 second long; however, the interval may be longer or shorter depending on the design requirements of a particular system. A random number is generated and/or received. A sampling time within the sampling interval may be determined based at least in part on the random number. By sampling at a different and randomly determined location within each of a series of sampling intervals a more accurate fluid measurement may be obtained.

Techniques for operating a static fluid meter are described herein. In an example, a sampling interval is identified. The sampling interval is a period of time within which an electromagnetic or acoustic device measures or samples a rate of the fluid flow. The sampling interval may be approximately 1 second long; however, the interval may be longer or shorter depending on the design requirements of a particular system. A random number is generated and/or received. A sampling time within the sampling interval may be determined based at least in part on the random number. By sampling at a different and randomly determined location within each of a series of sampling intervals a more accurate fluid measurement may be obtained.

A highly accurate and efficient syringe with a valve in a housing has a hollow syringe with a barrel and a hollow tip, a port on the side of the barrel near the hollow tip, and a valve connected to the barrel by the housing, which has a mouth connected to the barrel and a bottle cap suitable for securing to a bottle. The valve is in fluid communication with the barrel through the port and in fluid communication with a bottle of chemicals through the bottle cap end of the housing. The syringe with a valve in a housing is adapted to precisely draw and measure chemicals from a bottle and to precisely dispense the chemicals without spills or drips.

Provided are systems and methods for line volume calibration, and measurement of fluid samples delivered to an interrogation point. In various embodiments, a known fluid volume comprising a sample line fluid and a secondary fluid is delivered to a fluid boundary sensor. The fluid boundary sensor assists in determining the position of the boundaries between the various fluids, and the positions of these boundaries are used to determine the sample line fluid volume.

A flow meter system and method are provided for monitoring gas flow in a conduit. The flow meter system includes a plurality of components including: a sensor for sensing a flow rate of the gas flow; a communication device for transmitting information corresponding to the sensed flow rate to a remote device; an energy harvesting device for producing electrical energy from the gas flow to power operation of the communication device or other component of the flow meter system; and an energy storage device for storing electrical energy generated by the energy harvesting device.

A flow meter assembly for a dispensing line includes a differential pressure transmitter, a pressure transmitter, a temperature transmitter and a controller in communication with each transmitter. The controller is configured to use data collected from the transmitters to determine if there is subcooling or two-phase flow of a fluid flowing through the dispensing line and to meter fluid flowing through the dispensing line if there is subcooling or no two-phase flow.

Mass flow controllers that can provide for improved bleeding time and can be manufactured with less complexity and cost are provided. A mass flow controller includes a body having a valve outlet bore defining a flow path and an adjustable valve configured to control flow of a gas through the flow path. A valve element includes an outlet orifice of the adjustable valve and is disposed within the bore. The mass flow controller further includes a pressure drop element disposed coaxially with the valve element within the bore. An upstream pressure sensor is configured to detect a pressure at a location in the flow path between the adjustable valve and the pressure drop element, and a controller is configured to determine a flow rate through the flow path based on pressure as detected by the upstream pressure sensor.

Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.

An ageing and dust detection system, comprising: a data collection unit configured to collect a plurality of parameters of a gas meter; and a processing unit, configured to: receive the plurality of the parameters of the gas meter; calculate a numerical value of the plurality of the parameters; compare the calculated numerical value of the plurality of the parameters with a corresponding predefined higher range of values and a predefined lower range of values for the plurality of parameters; determine a reason of a fault in the gas meter based on the compared values, wherein the reason of the fault in the gas meter is at least one of, a presence of a dust, an ageing of the gas meter, or a combination thereof.