Patent classifications
G01F15/00
Directional probe for high temperature flows
A flow measurement apparatus comprising an elongated mounting stem having an inner stem cavity, the mounting stem configured to be mounted in an area of flow to be measured. A probe housing is mounted to an outer surface of the mounting stem and positioned on an upstream side of the mounting stem. The probe housing has a first hole near a center point of the housing and a second, third and fourth hole positioned near the perimeter of the housing. A fifth hole is located on a downstream side of the mounting stem. At least five pressure sensors and a plurality of pressure tapping tubes connecting the holes to the corresponding pressure sensors are included.
Three-Port Proportional Flow Control Valve with an Integrated Turbine for Flow Rate Sensing
An example valve includes: a plurality of ports comprising: a first port, a second port, and a third port; a spool configured to block fluid flow from the first port to the third port while allowing fluid flow from the third port to the second port when the valve is in an unactuated state; a spring applying a biasing force on the spool in a proximal direction, wherein when the valve is actuated, the spool moves in a distal direction against the spring, thereby allowing fluid flow from the first port to the third port while blocking fluid flow from the third port to the second port; and a turbine configured to rotate as fluid flows from the first port to the third port when the valve is in an actuated state.
Ultrasonic fluid flow measuring system with ultrasonic transducers provided in chambers formed through the pipe wall into the flow passage
An ultrasonic measuring device for the measurement of a flow of a fluid, includes a measuring tube, a first chamber and a second chamber. The measuring tube has a central axis, which defines a flow direction for the fluid; The first chamber has a first ultrasonic transducer arranged therein. The second chamber has a second ultrasonic transducer arranged therein. The measuring tube includes an inlet and an outlet for the fluid. The first ultrasonic transducer and the second ultrasonic transducer bound a rectilinear measuring section for the fluid, the first chamber and the second chamber being configured and arranged such that the fluid is capable of flowing around each of them. The first ultrasonic transducer and the second ultrasonic transducer are arranged such that the measuring section extends in the flow direction.
DISTURBANCE ESTIMATION DEVICE, DISTURBANCE ESTIMATION METHOD, AND PROGRAM
A disturbance estimation device includes: an acquisition unit configured to acquire a measurement value measured by a sensor provided in a controlled object; and an estimating unit configured to calculate a variance-covariance matrix of a measurement vector including the measurement value as an element, perform singular value decomposition on the variance-covariance matrix to calculate a singular vector of a maximum singular value, and estimate a disturbance that occurs in the controlled object based on the singular vector.
DISTURBANCE ESTIMATION DEVICE, DISTURBANCE ESTIMATION METHOD, AND PROGRAM
A disturbance estimation device includes: an acquisition unit configured to acquire a measurement value measured by a sensor provided in a controlled object; and an estimating unit configured to calculate a variance-covariance matrix of a measurement vector including the measurement value as an element, perform singular value decomposition on the variance-covariance matrix to calculate a singular vector of a maximum singular value, and estimate a disturbance that occurs in the controlled object based on the singular vector.
Fluid usage monitoring and control system
In a method of monitoring fluid usage in a fluid system, a proportional control valve is provided, including a valve element operable to control fluid flow from a fluid source to the fluid system. A first pressure upstream of the valve element and a second pressure downstream of the valve element are measured to identify a pressure differential across the valve element. In response to the identified pressure differential, the valve element is adjusted to one of a plurality of flow positions to adjust the pressure differential across the valve element to substantially match a predetermined pressure differential. A flow rate through the proportional control valve is determined based on the first pressure, the second pressure, and the adjusted flow position of the valve element. Based on the determined flow rate over time, an amount of fluid usage in the fluid system is determined.
Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method
A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.
Method and apparatus for pulse gas delivery using an external pressure trigger
A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
Method and apparatus for pulse gas delivery with concentration measurement
A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
LITHIUM PRIMARY BATTERY PACK AND GAS METER
A lithium primary battery pack 100 includes: a primary battery body 1 including a cathode, an anode, and a separator; a voltage converter 22 that boosts the voltage from the primary battery body 1 to 3.4-3.8 V and outputs the boosted voltage; a detector 23 that detects a decrease in the voltage of the primary battery body 1; a cathode terminal T1 and an anode terminal T2 coupled to the voltage converter 22; and a signal terminal T3 coupled to the detector 23.