An aspect of the present invention pertains to a method for determining the volumetric flow rate of a compressible fluid flow flowing through a volume flowmeter having a flow inlet, a wheel downstream of the flow inlet and a constriction downstream of the flow inlet and upstream of the wheel, the compressible fluid flowing through the flow inlet and actuating the wheel. The method comprises measuring the rotational speed of the wheel and determining the permanent pressure loss across the wheel based on the measured rotational speed. The method further comprises measuring the fluid pressure of the compressible fluid flow at the flow inlet and determining whether the compressible fluid flow in the volume flowmeter is in the subsonic or in the supersonic regime based on the determined permanent pressure loss and the measured fluid pressure. The method also comprises measuring the fluid temperature of the compressible fluid flow at the flow inlet and determining the volumetric flow rate of the compressible fluid flow based on the determined permanent pressure loss, the measured fluid pressure, the regime of the compressible fluid flow and the measured fluid temperature. Other aspects of the present invention pertain to volume flowmeter for determining the volumetric flow rate of a compressible fluid flow, a data processing device for controlling a volume flowmeter, a computer program for the controller and a computer-readable medium having stored thereon the computer program.

According to the embodiment, a toilet device includes a nozzle, a flow channel, a heat exchanger, and a flow channel unit. The flow channel unit is located upstream or downstream of the heat exchanger in the flow channel. The flow channel unit includes a flow rate sensor and a vacuum breaker. The flow rate sensor detects a flow rate of water. The vacuum breaker suppresses a backflow of water. The flow rate sensor includes a first case part and a sensor part. The sensor part is housed inside the first case part. The vacuum breaker includes a second case part and a valve part. The valve part is housed inside the second case part. At least a part of the first case part and at least a part of the second case part is formed of a continuous member.

A water utility meter configured for dynamic throttling and arranged to register and manage the amount of water delivered to a consumption site from a distribution network is disclosed. The water utility meter comprises a flow sensor for measuring a flow rate through the water utility meter, a valve for limiting the flow rate from the distribution network to the consumption site, an actuator for changing a valve position so that the valve may be in an open position or a closed position or a variable throttling position and a controller unit arranged to control the actuator. The controller unit is further configured to monitor the flow rate using the flow sensor, to verify if the flow rate exceeds a maximum flow rate limit or does not exceed a minimum flow rate limit and if the limits are exceeded adjust the valve position to change the maximum flowrate.

Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.

An electronic sensing and allocation system is provided for a distributed water infrastructure containing a plurality of differing appliances. The system may receive, from at least one sensor upstream of the plurality of differing appliances, a plurality of signals indicative of water usage within the distributed water infrastructure. The system may output a first indication of a first volume of water together with an indicator attributing the first volume of water to a first rate schedule, and output a second indication of a second volume of water together with an indicator attributing the second volume of water to a second rate schedule. The system may enable billing of the first and second volumes of water to a consumer at differing rates based on differing uses.

A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.

Ultrasonic flowmeter includes fluid flow path through which a measurement target fluid flows and a pair of ultrasonic transducers that can transmit and receive an ultrasonic signal. The ultrasonic flowmeter further includes flow rate calculator that calculates a flow velocity or flow rate of a measurement target fluid. In addition, fluid flow path includes a main flow path including a plurality of divided flow paths obtained by dividing a flow path having a rectangular cross-section by the same width, and a sub flow path including an added flow path having the same width as that of the divided flow path and having a height lower than that of the divided flow path. Furthermore, flow rate calculator calculates the flow rate of the measurement target fluid flowing through the fluid flow path from the flow velocity or flow rate of the measurement target fluid obtained based on the propagation time.

A flow resistance insert of a flow rate measuring or flow rate control has contiguous discs between which at least one central axial flow duct is formed from which radial flow ducts branch off. The discs include alternating first discs and second discs. While the first discs are circumferentially closed ring discs, the second discs are circumferentially slotted one-piece ring discs.

A flow resistance insert of a flow rate measuring or flow rate control has contiguous discs between which at least one central axial flow duct is formed from which radial flow ducts branch off. The discs include alternating first discs and second discs. While the first discs are circumferentially closed ring discs, the second discs are circumferentially slotted one-piece ring discs.

Metering equipment (A) for food products, including metering means (Di) defined by plunger means (Pi) and nozzle dispenser means (Ui) connected to said plunger-cylinder means (Ci, Pi) and suitable for dispensing volumetric quantities of said product; many-ways-valve distributing means (Vi) connected to said plunger-cylinder means (Ci, Pi) and to said nozzle dispenser means (Ui) placed in-between; said valve means (Vi) are being formed by a shaft (K) provided with a series of pass-through holes and suitable for turning around an own central lengthwise axis (X) inside the cylinder (Z) casing and for translating in a horizontal direction parallel to said central axis (X).