G01F25/00

Automated monitoring system for a forced air handling system and method of operation

A forced air handling system includes an automated monitoring system. A method of operating the automated monitoring system includes initiating a calibration mode of operation via a controller. A plurality of dampers may then close via the controller. Once closed, a duct in communication with the plurality of dampers may be pressurized. A first air flow measuring exiting each one of the plurality of dampers may be obtained by a flow sensor. The duct is then depressurized and a second airflow measurement is taken, via the controller, exiting each one of the plurality of dampers. The controller calculates a statistical difference between the first and second airflow measurements.

SYSTEMS AND METHODS FOR GAS PYCNOMETER AND GAS ADSORPTION ANALYZER CALIBRATION
20220349743 · 2022-11-03 ·

Systems and methods for calibrating a gas pycnometer utilizing a custom volume reference standard are disclosed. The custom volume reference standard may include a material. The material may include a low CTE and high-accuracy dimensions. The material may have a high-aspect ratio reference shape corresponding to an inner area of a custom made sample cup. The custom volume reference standard may include a specified number of inclusions of the material, a high purity, and/or an accurately known density. The custom volume reference standard may include a known volume.

OPTICAL LEVEL CONTROL SYSTEM

A perfusion system includes a fluid reservoir configured to hold a portion of fluid, the portion of fluid having a volume, the fluid reservoir having a total capacity that is greater than the volume; an imaging device, the imaging device configured to obtain image data corresponding to the fluid reservoir; and a controller. The controller is configured to receive the image data from the imaging device; determine the volume based on the image data; and facilitate control, in response to at least one of a user input and the determined volume of the portion of fluid, of an operating parameter corresponding to the fluid reservoir to facilitate changing or maintaining the volume of the portion of the fluid.

OPTICAL LEVEL CONTROL SYSTEM

A perfusion system includes a fluid reservoir configured to hold a portion of fluid, the portion of fluid having a volume, the fluid reservoir having a total capacity that is greater than the volume; an imaging device, the imaging device configured to obtain image data corresponding to the fluid reservoir; and a controller. The controller is configured to receive the image data from the imaging device; determine the volume based on the image data; and facilitate control, in response to at least one of a user input and the determined volume of the portion of fluid, of an operating parameter corresponding to the fluid reservoir to facilitate changing or maintaining the volume of the portion of the fluid.

WATER ANALYSIS UNIT OF A SYSTEM FOR SEPARATING AND ANALYZING A MULTIPHASE IMMISCIBLE FLUID MIXTURE AND CORRESPONDING METHOD
20230090864 · 2023-03-23 · ·

A system for separating and analyzing a discrete sample of multiphase fluid includes a separation vessel having a first inner chamber containing a discrete sample of multiphase fluid, and an analytical cell in fluid communication with the separation vessel. The analytical cell has a second inner chamber containing a diluted aqueous liquid phase sample for analysis. The system further includes probes disposed in the second inner chamber, each probe having a sensing area at a distal end, and being oriented in the second inner chamber such that the sensing area is immersed in the diluted aqueous liquid phase sample contained in the second inner chamber. The plurality of probes include a first probe whose sensing area surface is coated with a first ion-exchange membrane; and a second probe whose sensing area surface is coated with a second ion-exchange membrane, the second ion-exchange membrane being different from the first ion-exchange membrane.

Mass flow verification based on rate of pressure decay

An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERATION FOR A PLURALITY OF MASS FLOW CONTROLLERS (MFCS) OF A SUBSTRATE PROCESSING SYSTEM

Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.

METHOD FOR CALIBRATING A RADIOMETRIC DENSITY MEASURING DEVICE

A method for calibrating a radiometric device for determining and/or monitoring the density of a medium located in a container includes: determining the count rate of the radioactive radiation after it has passed through the empty container on the basis of the activity of the transmitting unit; determining the measured count rate of the radioactive radiation after it has passed through the container when a calibration medium of known density is located in the container; determining the mass attenuation coefficient according to the formula μ=−(ln(N/N.sub.0))/(ρ.sub.1D), where D is a beam path of the radioactive radiation or inner diameter of the container, and ρ.sub.1 is density of the calibration medium; and calculating a calibration curve representing the dependence of the density of the medium on the count rate of the measured radiation intensity after the radiation has passed through the container.

Delivery of chemicals
11644019 · 2023-05-09 ·

A chemical delivery system connects to a chemical tank and includes a union connected to the tank outlet and providing an antirotation feature, in addition to threads, to prevent rotation of the assembly in response to asymmetric loads. A measuring tube alternately receives liquid from the tank and is isolated from the tank. While isolated from the tank, liquid is withdrawn from the tube by a pump under conditions allowing the pump to be calibrated. The assembly is cantilevered from the tank outlet and is of reduced length and weight producing a device which is not prone to overstress the tank outlet.

FLUID-LEVEL MEASURING SENSOR
20170370758 · 2017-12-28 ·

A pressure sensor system for determining fluid level in a tank, includes a pressure sensor constructed to exhibit a force value corresponding to a sensed force, and a computer operatively coupled to the pressure sensor. A tank containing fluid is also includes and there is a communication link between the pressure sensor and the tank, thereby allowing determination of the level of fluid in the tank by calibration and interpretation of the force value exhibited by the pressure sensor.