G01J3/00

Microlithographic projection exposure apparatus
09767068 · 2017-09-19 · ·

A microlithographic projection exposure apparatus has a measuring device, by which a sequence of measurement values can be generated, and a processing unit for processing the measurement values. The processing unit has a processing chain which includes a plurality of digital signal processors. The first digital signal processor in the processing chain is connected to the measuring device to receive the sequence of measurement values. Each subsequent digital signal processor in the processing chain is connected to a respectively preceding digital signal processor in the processing chain. The digital signal processors are programmed so that each digital signal processor processes only a fraction of the measurement values and generates processing results therefrom, and forwards the remaining fraction of the measurement values to the respective next digital signal processor in the processing chain for processing.

Microlithographic projection exposure apparatus
09767068 · 2017-09-19 · ·

A microlithographic projection exposure apparatus has a measuring device, by which a sequence of measurement values can be generated, and a processing unit for processing the measurement values. The processing unit has a processing chain which includes a plurality of digital signal processors. The first digital signal processor in the processing chain is connected to the measuring device to receive the sequence of measurement values. Each subsequent digital signal processor in the processing chain is connected to a respectively preceding digital signal processor in the processing chain. The digital signal processors are programmed so that each digital signal processor processes only a fraction of the measurement values and generates processing results therefrom, and forwards the remaining fraction of the measurement values to the respective next digital signal processor in the processing chain for processing.

Chemical concentration measurement apparatus
11249015 · 2022-02-15 · ·

A chemical measurement device for determining the concentration of given chemical in a given fluid has at least one LED light source and at least one light detector. The given chemical has a light absorption curve with a peak, and the at least one LED light source and at least one light detector are configured to collaborate to produce two light signals having peak wavelengths between about 5 nm and 35 nm apart. The two light signal peak wavelengths are in the ultraviolet region with wavelengths beyond the light absorption curve peak. The light signal peak wavelengths, however, also are before the light absorption curve is negligible. The device also has a concentration calculator operatively coupled with the at least one light detector. The concentration calculator is configured to compare the two light signals to produce a concentration signal representing the concentration of the given chemical in the given fluid.

LIQUID CRYSTAL FOURIER TRANSFORM IMAGING SPECTROMETER
20170264835 · 2017-09-14 ·

A method of operating a hyperspectral imaging device includes receiving a light beam at a liquid crystal retarding device, and driving the liquid crystal retarding device with a pre-computed voltage waveform, wherein the voltage waveform is selected to reach a target optical retardance over time for the liquid crystal retarding device.

LIQUID CRYSTAL FOURIER TRANSFORM IMAGING SPECTROMETER
20170264835 · 2017-09-14 ·

A method of operating a hyperspectral imaging device includes receiving a light beam at a liquid crystal retarding device, and driving the liquid crystal retarding device with a pre-computed voltage waveform, wherein the voltage waveform is selected to reach a target optical retardance over time for the liquid crystal retarding device.

Multiple spectrum channel, multiple sensor fiber optic monitoring system

A multiple sensor fiber optic sensing system includes an optical fiber having at least first fiber optic sensors and second fiber optic sensors deployed along its length. In response to an interrogating pulse, the first fiber optic sensors generate responses in a first optical spectrum window, and the second fiber optic sensors generate responses in a second, different optical spectrum window. The responses in the first optical spectrum window are measured in a first optical spectrum channel, and the responses in the second optical spectrum window are measure in a second, different optical spectrum channel and provide simultaneous indications of one or more parameters, such as temperature and pressure, in the environment in which the sensors are deployed.

System and method for performing tear film structure measurement and evaporation rate measurements

A system and method are described for performing tear film structure measurement. A broadband light source illuminates the tear film. A spectrometer measures respective spectra of reflected light from at least one point of the tear film. A color camera performs large field of view imaging of the tear film, so as to obtain color information for all points of the tear film imaged by the color camera. A processing unit calibrates the camera at the point measured by the spectrometer so that the color obtained by the camera at the point matches the color of the spectrometer at the same point. The processing unit determines, from the color of respective points of the calibrated camera, thicknesses of one or more layers of the tear film at the respective points. Other applications are also described.

Estimation of spatial profile of environment

Disclosed herein is a system and method for facilitating estimation of a spatial profile of an environment based on a light detection and ranging (LiDAR) based technique. In one arrangement, the present disclosure facilitates spatial profile estimation based on directing light over one dimension, such as along the vertical direction. In another arrangement, by further directing the one-dimensionally directed light in another dimension, such as along the horizontal direction, the present disclosure facilitates spatial profile estimation based on directing light in two dimensions.

Estimation of spatial profile of environment

Disclosed herein is a system and method for facilitating estimation of a spatial profile of an environment based on a light detection and ranging (LiDAR) based technique. In one arrangement, the present disclosure facilitates spatial profile estimation based on directing light over one dimension, such as along the vertical direction. In another arrangement, by further directing the one-dimensionally directed light in another dimension, such as along the horizontal direction, the present disclosure facilitates spatial profile estimation based on directing light in two dimensions.

ESTIMATION OF SPATIAL PROFILE OF ENVIRONMENT

Disclosed herein is a system and method for facilitating estimation of a spatial profile of an environment based on a light detection and ranging (LiDAR) based technique. In one arrangement, the present disclosure facilitates spatial profile estimation based on directing light over one dimension, such as along the vertical direction. In another arrangement, by further directing the one-dimensionally directed light in another dimension, such as along the horizontal direction, the present disclosure facilitates spatial profile estimation based on directing light in two dimensions.