Patent classifications
G01J4/00
Ellipsometry device and ellipsometry method
The present invention provides an ellipsometry device and an ellipsometry method whereby measurement efficiency can be enhanced. In this method, an object is illuminated by spherical-wave-like illumination light Q linearly polarized at 45 (S1), and an object light O, being a reflected light, is acquired in a hologram I.sub.OR using a spherical-wave-like reference light R having a condensing point near the condensing point of the illumination light Q, and a hologram I.sub.LR of the reference light R is furthermore acquired using a spherical-wave reference light L having the same condensing point as that of the illumination light Q (S2). The holograms are separated into p- and s-polarized light holograms I.sup.K.sub.OR, I.sup.K.sub.LR, =p, s and processed to extract object light waves, and object light spatial frequency spectra G.sup.K(u, v), =p, s are generated (S3) (S4). Ellipsometric angles (), () are obtained for each incident angle from the amplitude reflection coefficient ratio =G.sup.p/G.sup.s=tan .Math.exp(i). Through use of numerous lights having different incident angles included in the illumination light Q, data of numerous reflection lights can be acquired collectively in a hologram and can be processed.
Ellipsometry device and ellipsometry method
The present invention provides an ellipsometry device and an ellipsometry method whereby measurement efficiency can be enhanced. In this method, an object is illuminated by spherical-wave-like illumination light Q linearly polarized at 45 (S1), and an object light O, being a reflected light, is acquired in a hologram I.sub.OR using a spherical-wave-like reference light R having a condensing point near the condensing point of the illumination light Q, and a hologram I.sub.LR of the reference light R is furthermore acquired using a spherical-wave reference light L having the same condensing point as that of the illumination light Q (S2). The holograms are separated into p- and s-polarized light holograms I.sup.K.sub.OR, I.sup.K.sub.LR, =p, s and processed to extract object light waves, and object light spatial frequency spectra G.sup.K(u, v), =p, s are generated (S3) (S4). Ellipsometric angles (), () are obtained for each incident angle from the amplitude reflection coefficient ratio =G.sup.p/G.sup.s=tan .Math.exp(i). Through use of numerous lights having different incident angles included in the illumination light Q, data of numerous reflection lights can be acquired collectively in a hologram and can be processed.
Polarization property image measurement device, and polarization property image measurement method
A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion units.
Polarization property image measurement device, and polarization property image measurement method
A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion units.
Retardation Profile for Stress Characterization of Tubing
Provided herein are systems and methods for monitoring radial stresses in glass tubing. In some embodiments, a measurement system includes a light source delivering a light to a tube, and a polarizer receiving the light after the light is refracted through a wall of the tube. The measurement system may further include a detector receiving the light from the polarizer, the detector operable to capture a first image of the light at a first polarization state and a second image of the light at a second polarization state. The system may further include a controller operable to determine a retardation profile related to the stress profile of the wall of the tube by determining a retardation magnitude of the light refracted through the wall of the tube based on a difference between the first image of the light and the second image of the light.
Retardation Profile for Stress Characterization of Tubing
Provided herein are systems and methods for monitoring radial stresses in glass tubing. In some embodiments, a measurement system includes a light source delivering a light to a tube, and a polarizer receiving the light after the light is refracted through a wall of the tube. The measurement system may further include a detector receiving the light from the polarizer, the detector operable to capture a first image of the light at a first polarization state and a second image of the light at a second polarization state. The system may further include a controller operable to determine a retardation profile related to the stress profile of the wall of the tube by determining a retardation magnitude of the light refracted through the wall of the tube based on a difference between the first image of the light and the second image of the light.
Gas concentration detecting device and detecting method thereof
A gas concentration detecting device and a detecting method thereof are provided. The gas concentration detecting device includes: a first polarizer; a second polarizer arranged opposite to the first polarizer in such a way that a gap is formed between the first polarizer and the second polarizer; a light source on a side of the second polarizer away from the first polarizer or on a side of the first polarizer away from the second polarizer; and a photoluminescent layer between the first polarizer and the second polarizer. The light transmission axis of the first polarizer is perpendicular to a light transmission axis of the second polarizer.
LIGHT SOURCE SYSTEM AND POLARIZATION ANGLE ADJUSTING METHOD
A light source system is provided. The light source system is capable of measuring a polarization angle and includes a light source configured to emit an original light beam, and the original light beam has an original polarization angle. The light source system further includes an amplifying module configured to amplify the original light beam and generate a forward beam for hitting a target, and the forward beam has a forward polarization angle that is equal to the original polarization angle. The light source system further includes a polarization measurement unit, and the polarization measurement unit includes a first polarization measurement module configured to receive a first return beam and measure a first polarization angle of the first return beam. The first return beam is reflected from the target.
Polarization tracking device, optical receiving device, and polarization tracking method
A polarization tracking device that tracks polarization fluctuation of light using a Stokes vector, includes: an updating unit configured to express a fluctuation amount of the Stokes vector on a Poincare sphere in an xy plane perpendicular to a travelling direction of a light wave using a first and a second angles, the first angle being an angle between a direction of an electric field of the light wave and y axis, and the second angle being a phase difference between a component of the optical electric field in a direction of the y axis and a component of the optical electric field in a direction of an x axis; and an application unit configured to rotate the Stokes vector using an inverse polarization rotation matrix expressed with the first and the second angles.
Polarimeter with multiple independent tunable channels and method for material and object classification and recognition
Embodiments of an active or laser polarimeter are disclosed that transmit multiple independent and tunable temporally-multiplexed polarization states and record or image, at video rates if necessary, the polarized intensity or irradiance reflected or transmitted by objects illuminated by those states, and apply the recorded data to material and/or object classification and recognition using classification algorithms that exploit features of polarization signatures dependent on material type, texture, and/or object shape. The polarimeter also generally records and utilizes one or more passive polarization measurements in order to realize a hybrid active-passive polarimeter. The polarimeter channels are configured and tuned to access multi-dimensional signature spaces specified by existing signature models and/or measurements, with polarization-modulator settings derived by a newly-disclosed subspace-projection algorithm that maximizes a target contrast parameter. Multiple independent polarization channels allow the new polarimeter to outperform conventional two-channel polarimeters, while the subspace-projection algorithm allows the number of channels to be minimized in order to minimize sensor size, weight, and power (SWaP) and maximize speed. Multiple channels are realized by multiplexing among independent transmitter polarization states with one or more high-speed multiplexers, in one embodiment a set of fold-mirror assemblies in the transmitter among which the laser beam is switched by one or more galvanometer scanners fitted in one embodiment with a newly-disclosed composite mirror. The method for material and object classification and recognition includes the maximally-biased classifier derived by the subspace-projection algorithm applied to a single target Mueller matrix, and methods to generalize the classifier.