Temperature sensors, pressure sensors, methods of making the same, and methods of detecting pressures and temperatures using the same are provided. In an embodiment, the temperature sensor includes a ceramic coil inductor having a first end plate and a second end plate, wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes or, carbon nanofibers, or a combination of carbon nanotubes and carbon nanofibers thereof dispersed in a ceramic matrix; and a thin film polymer-derived ceramic (PDC) nanocomposite disposed between the first and the second end plates, wherein the thin film PDC nanocomposite has a dielectric constant that increases monotonically with temperature.

A temperature sensor comprising a light emitter, an electrical circuit for applying a reverse bias voltage across the light emitter and for measuring a reverse current, and means for calculating a temperature from the measured reverse current.

A wearable device includes a MEMS resonator. The MEMS resonator is configured to generate an output signal that is indicative of a temperature of a portion of the wearable device that contacts a user's skin when the wearable device is worn by the user. The wearable device includes control circuitry communicatively coupled to the MEMS resonator. The control circuitry is configured to demodulate the output signal and a local oscillator signal indicative of a setpoint temperature for the portion of the wearable device. The control circuitry is configured to determine a phase difference between a phase of the demodulated output signal and a phase of the demodulated local oscillator signal. The control circuitry is further configured to determine a temperature of the user's has changed based on the phase difference.

An apparatus includes a switched-capacitor resistor that provides an equivalent resistance that can be used as a reference resistor. The switched-capacitor resistor includes a capacitor and a pair of switches that alternately switch (e.g., open and close) in order to charge and discharge the capacitor. The switching frequency of the switches can be controlled by a clock phase generator that generates non-overlapping pulses. To further control the frequency, a frequency locked loop circuit can also be used.

An apparatus includes a temperature sensing circuit that includes both on-chip and off-chip components. The apparatus includes components that use the same source as a reference voltage, thus allowing variations in the reference voltage to be compensated for. Additionally, the apparatus can provide error averaging to compensate for deterministic error sources.

Carbon nanotube-based multi-sensors for packaging applications and methods to form the carbon nanotube-based multi-sensors are capable of simultaneously measuring at least two measurands including temperature, strain, and humidity via changes in its electrical properties.

Carbon nanotube-based multi-sensors for packaging applications and methods to form the carbon nanotube-based multi-sensors are capable of simultaneously measuring at least two measurands including temperature, strain, and humidity via changes in its electrical properties.

A thin substrate has a layered structure on one surface, and can also have a layered structure on the other. Each layered structure can include a part of at least one patterned layer that, if patterned by photolithography, would frequently result in damage to the substrate due to fragility. For example, the substrate could be a 3 mil (76.2 m) or thinner polyimide film and one patterned layer could be a semiconductor material such as vanadium oxide, while another could be metal in electrical contact with semiconductor material. The layer part, however, can be patterned by a printing operation or can include a printed patterned artifact such as an uneven boundary or an alignment. The printing operation can be direct printing or printing of a mask for etching or liftoff or both. The layered structure can include an array of cells, each with layer parts on each substrate surface.

Temperature sensors, pressure sensors, methods of making the same, and methods of detecting pressures and temperatures using the same are provided. In an embodiment, the temperature sensor includes a ceramic coil inductor having a first end plate and a second end plate, wherein the ceramic coil inductor is formed of a ceramic composite that comprises carbon nanotubes or, carbon nanofibers, or a combination of carbon nanotubes and carbon nanofibers thereof dispersed in a ceramic matrix; and a thin film polymer-derived ceramic (PDC) nanocomposite disposed between the first and the second end plates, wherein the thin film PDC nanocomposite has a dielectric constant that increases monotonically with temperature.

Systems and methods for controlling the temperature of small volumes such as yoctoliter volumes, are described. The systems include one or more plasmonic nanostructures attached at or near a nanopore. Upon excitation of the plasmonic nanostructures, such as for example by exposure to laser light, the nanoparticles are rapidly heated thereby causing a change in the ionic conductance along the nanopore. The temperature change is determined from the ionic conductance. These temperature changes can be used to control rapid thermodynamic changes in molecular analytes as they interact with the nanopore.