There is provided a method of calibrating multiple chamber pressure sensors of a substrate processing system. The substrate processing system includes: multiple chambers; multiple chamber pressure sensors; multiple gas suppliers configured to supply a gas to an internal space of the multiple chambers; multiple exhausters connected to the internal spaces of the multiple chambers via multiple exhaust flow paths; and multiple first gas flow paths. The method includes: acquiring a third volume, which is a sum of a first volume and a second volume; acquiring a first pressure change rate of the internal space of a selected chamber; calculating a second pressure change rate of the internal space of the selected chamber; and calibrating the selected chamber pressure sensor such that a difference between the first pressure change rate and the second pressure change rate is within a preset range.

A sensor includes a port body which defines an axial passage for receiving fluid. An electrical connector extends through an opening in the port body near a crimp portion opposite the axial passage and forms an upper seal with the port body. Within the interior of the port body, a support ring and base cover form a cavity which retains a sensing element. The sensing element is exposed to the fluid within the axial passage and determines the pressure. An annular seal is retained by the base cover. The crimp portion of the port body is crimped to provide an upper seal and apply a force on the components within the interior, pinching the annular seal between the sensing element and the base of the port body to create a lower seal.

A pressure sensor apparatus is disclosed. The pressure sensor apparatus includes a bulk acoustic wave (BAW) die having a die interface side and a pressure contact side, a sensor BAW resonator and a reference BAW resonator disposed on the die interface side of the BAW die, a control circuit die coupled to the die interface side of the BAW die via an attachment layer, and an extended opening on the pressure contact side that extends into a depth of the BAW die and is generally aligned with the sensor BAW resonator, the extended opening being configured to translate an external pressure on the pressure contact side onto the sensor BAW resonator.

A system for controlling the position of a diaphragm in a diaphragm-containing pressure pod, is provided. The system can include a peristaltic pump, a pressure pod having a flow-through fluid side and a gas side that are separated by a diaphragm, and a pressure sensor operatively connected to the gas side. The pressure sensor is configured to sense pulses of pressure resulting from movement of the diaphragm and caused by the action of the peristaltic pump. A gas source and a valve can be in fluid communication with the gas side of the pressure pod and can be configured to provide gas to, or vent gas from, the gas side. A controller receives pressure signals from the pressure sensor and controls the valve in response, and in so doing, controls the position of the diaphragm. Methods for positioning the diaphragm are also included.

Methods and systems are described for operating an intra-oral imaging sensor that includes a housing, an image sensing component configured to capture image data while the intra-oral imaging sensor housing is positioned in a mouth of a patient, and a multi-dimensional sensor positioned within the housing of the intra-oral imaging sensor. An electronic controller is configured to receive data from the multi-dimensional sensor and to control an action of the intra-oral imaging sensor based on the data received from the multi-dimensional sensor.

Methods and systems are described for operating an intra-oral imaging sensor that includes a housing, an image sensing component configured to capture image data while the intra-oral imaging sensor housing is positioned in a mouth of a patient, and a multi-dimensional sensor positioned within the housing of the intra-oral imaging sensor. An electronic controller is configured to receive data from the multi-dimensional sensor and to control an action of the intra-oral imaging sensor based on the data received from the multi-dimensional sensor.

A reconfigurable pressure transducer assembly having an input tube filter assembly is provided. The resonant frequency and dampening characteristics associate with the pressure transducer assembly may be configured by the input tube filter assembly. The input tube filter assembly includes one or more inserts disposed in an input tube channel, the one or more inserts including one or more bores of selectable dimensions and extending therethrough from a first end to a second end. The one or more inserts define an effective input tube bore, and the input tube filter assembly is tunable by selection of the selectable dimensions of the one or more inserts.

A reconfigurable pressure transducer assembly having an input tube filter assembly is provided. The resonant frequency and dampening characteristics associate with the pressure transducer assembly may be configured by the input tube filter assembly. The input tube filter assembly includes one or more inserts disposed in an input tube channel, the one or more inserts including one or more bores of selectable dimensions and extending therethrough from a first end to a second end. The one or more inserts define an effective input tube bore, and the input tube filter assembly is tunable by selection of the selectable dimensions of the one or more inserts.

A measurement device has a sensor and includes a cylindrical housing, an optical fiber that is disposed along the long-side direction of the housing and that has one end disposed in the housing and the other end disposed outside the housing, a first substrate including a light receiving unit disposed on an extension of the one end in the housing, and a second substrate that is electrically connected to the first substrate via a flexible part having flexibility and is disposed at an acute angle or a right angle with respect to the first substrate.

A removable pressure sensor assembly senses a pressure in an elastically deformable tube conveying blood in an extracorporeal circulator. The assembly includes a main body portion 31 and a pressure measurement element 40 disposed in main body portion 31. Main body portion 31 has a base portion 32 with a tube mounting recessed portion 34 such that an intermediate part of a tube 11 is removably fitted such that tube 11 is elastically deformed. Pressure measurement element 40 is exposed to tube 11 so that it measures a pressure of blood inside tube 11. A lid portion 33 holds tube 11 inside tube mounting recessed portion 34 by selectably closing recessed portion 34 of the base portion. Tube mounting recessed portion 34 has a rectangular cross section, and a width L of the rectangular cross section is set to be smaller than an external dimension D of tube 11.