In order to provide a vacuum monitor that, even if a sensing mechanism is exposed to an atmosphere into which various types of material gases are introduced, enables the deposition of matter on the sensing mechanism to be prevented, and enables the lifespan of the sensing mechanism to be extended, there are provided a sensing mechanism that is in contact with an atmosphere inside a measurement space, and outputs an output signal that corresponds to a pressure inside this measurement space, and a heater that adjusts a temperature of the sensing mechanism, wherein a set temperature of the heater is adjustable.

An ultra-low pressure, vapor analyte, and vapor pathway parameter monitoring system can include an embedded server comprising a base radio and memory. In some embodiments, the embedded server is communicatively coupled to a third-party database. The system can include a first monitoring device comprising a first ultra-low pressure sensor and a first radio communicatively coupled to the base radio. The embedded server can be remotely located with respect to the first monitoring device whereby the embedded server receives first pressure data from the first monitoring device.

A vacuum gauge includes an introduction tube, a diaphragm displaced by a gas to be measured that is introduced from the introduction tube, a piezoelectric element that has one end coupled to the diaphragm and is displaced along with the diaphragm, an inner structure to which a circumferential edge of the diaphragm and the other end of the piezoelectric element are secured and that is coupled to the introduction tube, and an airtight container to airtightly enclose the introduction tube and the inner structure. The inner structure, the introduction tube, and the diaphragm airtightly partition a space in the airtight container into a pressure introduction chamber to which the gas to be measured is introduced on one surface side of the diaphragm, and a reference pressure chamber on the other surface side of the diaphragm. the reference pressure chamber being set at a high vacuum that is lower than the pressure lower limit of the measurement gas.

A measuring arrangement for determining at least one measured variable with a sensor device (2), a signal outlet for outputting of an output signal and a current-adjusting device for adjusting the current of the output signal provides a measuring arrangement whose power consumption is at a maximum for preferably all states of operation. The object is obtained the measuring arrangement that a load current device and a regulating device are provided. Here, the regulating device controls the load current device based on a voltage drop via the current-adjusting device (4).

A measuring arrangement for determining at least one measured variable with a sensor device (2), a signal outlet for outputting of an output signal and a current-adjusting device for adjusting the current of the output signal provides a measuring arrangement whose power consumption is at a maximum for preferably all states of operation. The object is obtained the measuring arrangement that a load current device and a regulating device are provided. Here, the regulating device controls the load current device based on a voltage drop via the current-adjusting device (4).

The present invention relates to a vacuum multi-sensing unit (10) used for adhesion and transfer of an object (P) together with a vacuum pump (23) in a vacuum transfer system. The multi-sensing unit (10) of the present invention includes a plurality of sensors (13) to perform multi-sensing, wherein individual and collective control of the built-in sensors (13) is possible. Therefore, in particular, when a plurality of vacuum pumps (23) are required for transfer of objects (P), the plurality of vacuum pumps (23) are allowed to correspond to a single unit (10), and thus, compared to a conventional sensing unit individually attached to each vacuum pump, there is superior effect in terms of the efficiency of manufacture, installation, management, operation, and control of the unit (10).

The present invention relates to a vacuum multi-sensing unit (10) used for adhesion and transfer of an object (P) together with a vacuum pump (23) in a vacuum transfer system. The multi-sensing unit (10) of the present invention includes a plurality of sensors (13) to perform multi-sensing, wherein individual and collective control of the built-in sensors (13) is possible. Therefore, in particular, when a plurality of vacuum pumps (23) are required for transfer of objects (P), the plurality of vacuum pumps (23) are allowed to correspond to a single unit (10), and thus, compared to a conventional sensing unit individually attached to each vacuum pump, there is superior effect in terms of the efficiency of manufacture, installation, management, operation, and control of the unit (10).

A door assembly includes a structural wrapper defining an insulating cavity. The structural wrapper defines a sensor port. A sensor assembly is coupled to an outer surface of the structural wrapper proximate to the sensor port. The sensor assembly includes a connector having a base coupled to a housing. The base is coupled to the structural wrapper. The connector defines an interior in fluid communication with the insulating cavity. A pressure sensor is disposed within the housing. The pressure sensor is configured to sense a pressure within the insulating cavity. At least one plate is disposed at an open end of the housing. The pressure sensor includes sensor pins that extend through the at least one plate.

A door assembly includes a structural wrapper defining an insulating cavity. The structural wrapper defines a sensor port. A sensor assembly is coupled to an outer surface of the structural wrapper proximate to the sensor port. The sensor assembly includes a connector having a base coupled to a housing. The base is coupled to the structural wrapper. The connector defines an interior in fluid communication with the insulating cavity. A pressure sensor is disposed within the housing. The pressure sensor is configured to sense a pressure within the insulating cavity. At least one plate is disposed at an open end of the housing. The pressure sensor includes sensor pins that extend through the at least one plate.

A portable vacuum pressure graphing gauge device enabling users of vacuum systems the ability to see trends of vacuum systems through real time plotting of a pressure vs. time curve on a hand held instrument, enabling them to understand what is going on in their system, or the like. A device may include several graphical modes designed to even more easily interpret vacuum data, and packaging that is rugged and versatile including a magnet, kickstand, wireless connectivity, visual and audible set points, automatic sensor fault detection, and several vacuum pressure measurement units to choose from, or the like.