There is provided a pressure measuring device including: a first pressure gauge connected to a processing chamber configured to process a process target and configured to measure an internal pressure of the processing chamber when the process target is being processed; a second pressure gauge connected to the processing chamber; and a first switching valve configured to disconnect the second pressure gauge from the processing chamber when the process target is being processed inside the processing chamber.

Provided is a pressure sensor for detecting the pressure of liquid flowing in a main flow path, including: an introduction flow path to which liquid is introduced from the main flow path; a pressure detection element having a pressure receiving surface and for detecting the pressure of liquid received by the pressure receiving surface in the introduction flow path; a diaphragm provided in a downstream-side end part of the introduction flow path and for transferring the pressure of the liquid to the pressure receiving surface while isolating a contact between the liquid in the introduction flow path and the pressure receiving surface; and a leak sensor for detecting a leakage of liquid into an internal space in communication with the pressure receiving surface.

Disclosed is a pressure gauge comprising a pressure sensor, a pressure transmitter connected upstream of the pressure sensor and having an isolation diaphragm, the outer side of which can be supplied with pressure and under which a pressure receiving chamber is enclosed, and comprising a hydraulic pressure transmission path connected to the pressure receiving chamber and filled with a pressure transmitting fluid. The diaphragm seal comprises a deflection device actuated by a controller connected to the pressure sensor and/or to a temperature sensor, and which is designed to exert a force on the isolation diaphragm, or on an element connected to the isolation diaphragm, said force deflecting the isolation diaphragm in the direction of its diaphragm bed, at times that are determined by the controller and that are based on a pressure measured continuously by the pressure sensor and/or a temperature measured continuously by the temperature sensor.

Pressure transmitters mounted on a panel are arranged so as to ease and facilitate their calibration. More particularly, curved tubing portions are interposed between the drain/vent valves and transmitter bases of the pressure transmitters so as to cause the drain/vent valves to face outwardly from the panel in the same direction that pressure valves on the transmitter base face. Common fluid lines together with a pressurization valve are provided to simultaneously pressurize multiple pressure transmitters to further ease the calibration process.

Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.

Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.

A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.

A method for determining sensor parameters of an actively-driven sensor system may include performing an initialization operation to establish a baseline estimate of the sensor parameters, obtaining as few as three samples of a measured physical quantity versus frequency for the actively-driven sensor system, performing a refinement operation to provide a refined version of the sensor parameters based on the as few as three samples, iteratively repeating the refinement operation until the difference between successive refined versions of the sensor parameters is below a defined threshold, and outputting the refined sensor parameters as updated sensor parameters for the actively-driven sensor system.

A method for determining sensor parameters of an actively-driven sensor system may include performing an initialization operation to establish a baseline estimate of the sensor parameters, obtaining as few as three samples of a measured physical quantity versus frequency for the actively-driven sensor system, performing a refinement operation to provide a refined version of the sensor parameters based on the as few as three samples, iteratively repeating the refinement operation until the difference between successive refined versions of the sensor parameters is below a defined threshold, and outputting the refined sensor parameters as updated sensor parameters for the actively-driven sensor system.

A pressure calibration apparatus and a pressure instrument calibration information processing method, belonging to the field of pressure instrument measurement and calibration. The pressure calibration apparatus comprises: a pressure calibration unit (1) externally connected to the calibrated pressure instrument (100); a main control unit (2), which is electrically connected to the pressure calibration unit (1); a communication module (3) that is electrically connected to the main control unit (2), and carries out data interaction with a remote database (300) through a network (200). The pressure calibration apparatus can be in a real-time communication connection with the remote database (300), and implements on-field real-time downloading of historical calibration data and calibration schemes of the calibrated pressure instrument (100) and real-time uploading of current calibration data.