Methods and systems include a universal, device-agnostic calibration process in which measured indications output by a device under test (DUT) (or corrected or converted indications derived therefrom) may be compared with calibration thresholds for any type of DUT to be calibrated. A complete, universal, and extensible calibration process is thus achieved that is capable of accommodating routine and complex calibration scenarios alike. A common set of statistics may be generated for all devices to be calibrated, without regard to the particular device under test, and statistics of the common set of statistics may be evaluated to determine the calibration state of the DUT. Additionally, the methods and systems disclosed herein provide for generating a comprehensive set of measurement records that may include some or all original observations, calculations, corrections, conversions, environmental factors, and measurement results, e.g., according to a standard, which allows for step-by-step auditing of every measurement performed.

A fluid supply monitoring system includes a fluid sensor configured to identify a flow rate of a fluid through a supply line. The system comprises a valve configured to control the flow rate through the supply line and a pressure sensor configured to detect a fluid pressure. A controller is configured to receive the flow rate data and identify fluid consumption from the supply line based on the flow rate. The controller is further configured to compare the fluid consumption of a usage event to one of a time limit and a volume limit. In response to the fluid consumption exceeding the time limit or the volume limit, the controller controls the valve to a closed position and identifies a potential fluid leak. With the valve in the closed position, the controller processes a verification procedure that identifies whether the potential fluid leak is an actual fluid leak.

To enable early detection of abnormal states including accumulation on a pressure sensor, a characteristic measuring portion obtains a change in an output of a pressure sensor in a state in which the temperature of a sensor chip is changed by operation of a temperature controlling portion and thereby obtains a sensor characteristic indicating the change in the output. A state determination portion determines an abnormal state of a diaphragm by comparing the sensor characteristic obtained by the characteristic measuring portion with a reference characteristic, used as a reference, stored in a reference value storing portion.

A diagnostic apparatus for a fluidic actuator, in particular a fluidic valve drive, which has an actuator element displaceable into different positions (x1, x2, xp1, xp2), wherein the diagnostic apparatus is configured to provide a first break-away pressure measured value (pi1) for a first position of the actuator element. The diagnostic apparatus is further configured to determine, based on the first break-away pressure measured value (pi1) and break-away pressure reference information (pri) stored in the diagnostic apparatus, a first break-away pressure prediction value (pp1) for a first prediction position (xp1) of the actuator element, the first prediction position being different from the first position (x1).

The invention relates to an ultrasonic flowmeter for measuring the flow speed and/or the volumetric flow rate of a fluid. In order in particular to allow a simple and inexpensive calibration of a pressure sensor in the device, the device comprising a measurement sensor, at least two ultrasonic transducers, a pressure sensor, and a calibration connector.

An industrial process differential pressure sensing device includes a housing having first and second isolation cavities that are respectively sealed by first and second diaphragms, a differential pressure sensor, a static pressure sensor, an eddy current displacement sensor, and a controller. The static pressure sensor is configured to output a static pressure signal that is based on a pressure of fill fluid in the first isolation cavity. The differential pressure sensor is configured to output a differential pressure signal that is indicative a pressure difference between the first and second isolation cavities. The eddy current displacement sensor is configured to output a position signal that is indicative of a position of the first isolation diaphragm relative to the housing. The controller is configured to detect a loss of a seal of the isolation cavity based on the position signal, the static pressure signal and the differential pressure signal.

To provide a plasma processing apparatus or an operating method of a plasma processing apparatus with improved yield. The plasma processing apparatus includes: a sample stage disposed in the processing chamber in a vacuum container; a plasma forming space in which plasma for processing a wafer is formed above the sample stage and a lower space communicated with the plasma forming space below; an exhaust port disposed at a bottom portion of the lower space; a heater for heating a lower portion of the vacuum container surrounding the lower space; a first vacuum gauge that detects a pressure in the processing chamber during the processing of the wafer; a second vacuum gauge for calibration communicated with an opening disposed in an inner wall of the processing chamber surrounding an outer periphery of the lower space below the first vacuum gauge; and a correction unit that is configured to correct an output of the first vacuum gauge by using outputs of the first and second vacuum gauges when a pressure in the processing chamber is at a pressure value regarded as 0 and at a plurality of pressure values higher than the pressure value.

A pressure detecting device is mounted in a measurement target and instrument includes a strain inducer to which pressure of a pressure medium is applied and which generates strain in accordance with the pressure and a strain detecting element that is bonded onto a surface opposite to a pressure receiving surface of the strain inducer, in which the strain detecting element includes one or multiple central strain resistant bridges which are arranged at a central portion of the strain detecting element in a bonded surface direction, and one or multiple outer peripheral strain resistant bridges which are arranged at an outer periphery, and in which, for example, deformation of the strain detecting element caused by an external force when being screw-fixed to the measurement target instrument is obtained through the multiple strain resistant bridges. An error of detection pressure caused by the deformation in a pressure value detected through the central strain resistant bridge is corrected.

A method for correcting calibration of a closure member on a valve assembly. The method can include comparing a calculated value to an expected value, each relating to a position of a closure member of the valve assembly relative to a seat of the valve assembly, the calculated value being calculated using a calibration variable and an input value corresponding to a measured position of the closure member. The method can also include identifying a deviation between the calculated value and the expected value. The method can further include changing the calibration variable from a first value to a second value in response to the deviation, the second value equating the calculated value at the input value with the expected value for the position.

The invention relates to a method for determining a pressure measurement signal in a capacitive pressure measurement cell which comprises a main body and a measurement membrane that is arranged on the front of said main body. Electrodes are arranged on said main body and measurement membrane and form a measurement capacitance in a region of the measurement membrane which has a high degree of pressure sensitivity, and form a reference capacitance in a region of the measurement membrane which has a lower degree of pressure sensitivity, said measurement capacitance and reference capacitance being determined independently of one another, the pressure measurement signal being determined in a first measurement range from the measurement capacitance and the reference capacitance, in accordance with the first evaluation, and said pressure measurement signal being determined in a second measurement range from the reference capacitance in accordance with a second evaluation.