G01M1/00

Fluid monitoring system and method for semiconductor fabrication tools
10438826 · 2019-10-08 · ·

A system and method provide for monitoring and controlling fluid flow in semiconductor manufacturing apparatuses. The method and system include a vortex flow meter coupled to a digital readout that displays the measured flow rate and trip point. The flow meter display includes input devices used to adjust the trip point. The system and method provide for sending signals via a custom relay to the semiconductor manufacturing apparatus which is adapted to terminate a processing operation or change the fluid flow if the trip point is tripped. The system and method also provide for sending an electrical signal to a computer by way of a data acquisition unit and a converter. The converter converts the signal to a communication protocol consistent with the computer network and provides fluid flow information and trip point data as a function of time to the computer which then displays such data graphically.

Device for detecting concave-convex of flange face of wheel
10436565 · 2019-10-08 · ·

A device for detecting concave-convex of a flange face of a wheel is composed of a frame, a jacking cylinder, lower guide posts, a lifting table, a support column, a first inner ring adjusting cylinder, an inner ring guide rail, an second inner ring adjusting cylinder, a first inner ring sliding block, a second inner ring sliding block, a first electric cylinder, a second electric cylinder, a first detection bar, a second detection bar, piezoelectric sensors, a first outer ring adjusting cylinder, a second outer ring adjusting cylinder, a first outer ring guide rail, a second outer ring guide rail, a first outer ring sliding block, a second outer ring sliding block, a third electric cylinder, a fourth electric cylinder, a third detection bar, a fourth detection bar and the like.

Device for detecting concave-convex of flange face of wheel
10436565 · 2019-10-08 · ·

A device for detecting concave-convex of a flange face of a wheel is composed of a frame, a jacking cylinder, lower guide posts, a lifting table, a support column, a first inner ring adjusting cylinder, an inner ring guide rail, an second inner ring adjusting cylinder, a first inner ring sliding block, a second inner ring sliding block, a first electric cylinder, a second electric cylinder, a first detection bar, a second detection bar, piezoelectric sensors, a first outer ring adjusting cylinder, a second outer ring adjusting cylinder, a first outer ring guide rail, a second outer ring guide rail, a first outer ring sliding block, a second outer ring sliding block, a third electric cylinder, a fourth electric cylinder, a third detection bar, a fourth detection bar and the like.

Parameter standardization

Included are embodiments for parameter standardization. At least one embodiment of a system includes a first determining component configured to determine at least one business rule associated with at least one environment and a second determining component configured to determine settings for a plurality of assets associated with the at least one environment to enforce the determined at least one business rule. Some embodiments include a sending component configured to send a signal to the plurality of assets to implement the business rule.

Method for determining filler types for press bending of pipes
10423734 · 2019-09-24 ·

A method for determining elastomer types as pipe filler for pressure bending of a pipe, comprising: selecting a set of elastomer types; obtaining sample pieces from the elastomer types; applying strain test on the sample pieces; determining properties of the sample pieces; calculating strain energy and error function for each sample piece based on an energy model; calculating elastic modulus for each sample piece; selecting elastomer types from the set of elastomer types; analyzing results from the calculation of strain energy, error function and the elastic modulus for the selected elastomer types; simulating the pressure bending process of the pipe, using pipe filler made from the selected elastomer types; and when simulation results indicate an acceptable pressure bent pipe due to the simulated pressure bending, selecting the one or more elastomer types associated with the acceptable pressure bent pipe for the pipe filler.

Method for determining filler types for press bending of pipes
10423734 · 2019-09-24 ·

A method for determining elastomer types as pipe filler for pressure bending of a pipe, comprising: selecting a set of elastomer types; obtaining sample pieces from the elastomer types; applying strain test on the sample pieces; determining properties of the sample pieces; calculating strain energy and error function for each sample piece based on an energy model; calculating elastic modulus for each sample piece; selecting elastomer types from the set of elastomer types; analyzing results from the calculation of strain energy, error function and the elastic modulus for the selected elastomer types; simulating the pressure bending process of the pipe, using pipe filler made from the selected elastomer types; and when simulation results indicate an acceptable pressure bent pipe due to the simulated pressure bending, selecting the one or more elastomer types associated with the acceptable pressure bent pipe for the pipe filler.

Method of measuring an adhesive force of interlayer adhesive layer in tensile mode for stacked semiconductor device and apparatus for measuring the same

A method includes providing a device under test, which includes a lower test layer and an upper test layer that is stacked on the lower test layer and includes an overhang protruding past an edge of the lower test layer by a predetermined length, fixing the lower test layer onto a mounting stage, and measuring adhesive force of an interlayer adhesive layer in a tensile mode by applying a load to a bottom surface of the overhang of the upper test layer in a first direction. An apparatus includes a mounting stage fixing the device under test, a load applying tip applying the load to the bottom surface of the overhang, a location adjuster adjusting a distance between the device under test and the load carrying tip, a load cell detecting a magnitude of the applied load, and a controller controlling the location adjuster and the load cell.

Method of measuring an adhesive force of interlayer adhesive layer in tensile mode for stacked semiconductor device and apparatus for measuring the same

A method includes providing a device under test, which includes a lower test layer and an upper test layer that is stacked on the lower test layer and includes an overhang protruding past an edge of the lower test layer by a predetermined length, fixing the lower test layer onto a mounting stage, and measuring adhesive force of an interlayer adhesive layer in a tensile mode by applying a load to a bottom surface of the overhang of the upper test layer in a first direction. An apparatus includes a mounting stage fixing the device under test, a load applying tip applying the load to the bottom surface of the overhang, a location adjuster adjusting a distance between the device under test and the load carrying tip, a load cell detecting a magnitude of the applied load, and a controller controlling the location adjuster and the load cell.

Techniques for optimizing performance of cyclones

Apparatus is provided including a signal processor or signal processing module configured at least to: respond to signaling containing information about particle sizes of solids forming part of a slurry stream being fed with a common feed flow into a battery of cyclones; and determine which combinations of cyclones in the battery produce overflow that has undesirable particle size characteristics using a statistical algorithm or technique, based upon the signaling received. The signal processor or signal processing module provides corresponding signaling containing about which combinations of cyclones in the battery produce overflow that has undesirable particle size characteristics, including control signaling to control the operation of the battery, including information about certain combinations of cyclones to avoid, or preferentially to use, to minimize the total amount of coarse material having the undesirable particle size characteristics produced by the battery.

Techniques for optimizing performance of cyclones

Apparatus is provided including a signal processor or signal processing module configured at least to: respond to signaling containing information about particle sizes of solids forming part of a slurry stream being fed with a common feed flow into a battery of cyclones; and determine which combinations of cyclones in the battery produce overflow that has undesirable particle size characteristics using a statistical algorithm or technique, based upon the signaling received. The signal processor or signal processing module provides corresponding signaling containing about which combinations of cyclones in the battery produce overflow that has undesirable particle size characteristics, including control signaling to control the operation of the battery, including information about certain combinations of cyclones to avoid, or preferentially to use, to minimize the total amount of coarse material having the undesirable particle size characteristics produced by the battery.