A workpiece evaluating method evaluates the gettering property of a device wafer having a plurality of devices formed on the front side of the wafer and having a gettering layer formed inside the wafer. The method includes the steps of applying excitation light for exciting a carrier to the wafer, applying microwaves to a light applied area where the excitation light is applied and also to an area other than the light applied area, measuring the intensity of the microwaves reflected from the light applied area and from the area other than the light applied area, subtracting the intensity of the microwaves reflected from the area other than the light applied area from the intensity of the microwaves reflected from the light applied area to thereby obtain a differential signal, and determining the gettering property of the gettering layer according to the intensity of the differential signal obtained above.

An abnormality detection device includes: a coupling-capacitor having a first-end and a second-end coupled with a high-voltage circuit; a signal output unit; a signal extraction unit; and a signal input unit. The signal output unit is coupled with the first-end of the coupling-capacitor via a detection-resistor, and outputs an alternating-current inspection-signal. The signal extraction unit extracts the inspection-signal, as an extraction-signal, output between the detection-resistor and the coupling-capacitor. The signal input unit detects abnormality of insulation resistance of the high-voltage circuit based on a level of the inputted extraction-signal. The signal extraction unit includes a signal removing filter and a subtraction circuit. The filter removes a signal equal in frequency to the inspection-signal and passes low-frequency noises lower in frequency than the inspection-signal. The subtraction circuit outputs a differential signal, as the extraction-signal, between a signal having passed through the filter and a signal not having passed through the filter.

A probe unit according to the present invention is suitable for allowing a large current to flow. In the probe unit that accommodates a plurality of contact probes for electrically connecting an inspection target object and a signal processing device used to output an inspection signal, both ends of a large current probe (3) are electrically connected to electrodes of a contact target object, and a large current is made to flow via a metal block (50) that comes into contact with both end portions of the large current probe (3).

A method and apparatus for extracting the contents of voids and/or pores present in a semiconductor device to obtain information indicative of the nature of the voids and/or pores, e.g. to assist with metrology measurements. The method includes heating the semiconductor wafer to expel the contents of the voids and/or pores, collecting the expelled material in a collector, and measuring a consequential change in mass of the semiconductor wafer and/or the collector, to extract information indicative of the nature of the voids. This information may include information relating to the distribution of the voids and/or pores, and/or the sizes of the voids and/or pores, and/or the chemical contents of the voids and/or pores. The collector may include a condenser having a temperature-controlled surface (e.g. in thermal communication with a refrigeration unit) for condensing the expelled material.

A method for determining at least one electrical property of an earth formation includes emitting an electromagnetic signal into the earth formation from an antenna and measuring an electromagnetic signal from the earth formation. The antenna is a broadband log antenna mounted on a substrate having at least a high dielectric permittivity, defined as a dielectric permittivity of about =100 to =1000 or a gigantic dielectric permittivity, defined as a dielectric permittivity of about =1000 or greater. The antenna has a radius between about 2.5 millimeters (mm) and 10 centimeters (cm). The method further includes determining at least one electrical property of one or more of a borehole, a borehole fluid, and the earth formation based on measuring the electromagnetic signal.

A probe having a sliding rail is provided and includes a probe head, a probe tail, an elastic element made of an elastic material and connected between the probe head and the probe tail, and a sliding rail assembly. The sliding rail assembly includes a slide rail and a position limit protrusion. The slide rail has a fixed end and a free end. The fixed end is fixedly connected to the probe tail, and the free end extends to the probe head. The position limit protrusion is fixedly connected to the probe head, and has a sliding slot formed thereon through which the slide rail can pass. The sliding rail assembly is made of a conductive material, and a cross-section area of the slide rail is greater than a cross-section area of the elastic material of the elastic element.

A probe having a sliding rail is provided and includes a probe head, a probe tail, an elastic element made of an elastic material and connected between the probe head and the probe tail, and a sliding rail assembly. The sliding rail assembly includes a slide rail and a position limit protrusion. The slide rail has a fixed end and a free end. The fixed end is fixedly connected to the probe tail, and the free end extends to the probe head. The position limit protrusion is fixedly connected to the probe head, and has a sliding slot formed thereon through which the slide rail can pass. The sliding rail assembly is made of a conductive material, and a cross-section area of the slide rail is greater than a cross-section area of the elastic material of the elastic element.

A coin-shaped detection object discriminating device may be used with a detection object in a coin shape, and the coin-shaped detection object discriminating device may include a passage through which the detection object is passed; a permanent magnet; and a magnetic sensor disposed opposite to the permanent magnet across the passage.

A partial discharge measurement method includes: a moving step of moving an insulated wire including an insulating layer on a surface of the insulated wire; a voltage applying step of bringing an electrode which is connected to a power supply into contact with the insulating layer of the insulated wire which is moving, and applying a predetermined test voltage to the insulating layer while moving the insulated wire; a detection step of detecting, as a partial discharge signal, a signal which is more than or equal to a threshold value among signals involved in partial discharge events occurring from the insulating layer due to application of the predetermined test voltage; and a determination step of determining, based on a result in the detection step, frequency of occurrence of partial discharge events at the predetermined test voltage.

Eddy current detection probes and related methods are disclosed. In some embodiments, the eddy current detection probes are hybrid probes, including a solid state sensor and a detection loop. In some embodiments, the eddy current detection probes include a drive coil and a detection loop, with the detection loop having a sensitive axis that is not parallel to principal axis of the drive coil. In some such embodiments, the sensitive axis of the detection loop is perpendicular to the principal axis of the drive coil.