Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.

A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.

A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.

Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.

Aspects of the present invention include systems, devices, and methods of surface chemical analysis of solid samples, and particularly it relates to methods of chemical analysis of molecular compounds located either on or within thin surface layer of solid samples. Even more particularly, aspects of the present invention relate to systems, devices, and non-destructive methods combining both high sensitivity and high spatial resolution of analysis of chemical compounds located or distributed on the surface of solid samples with obtaining most important information regarding vibration spectra of atoms and molecular groups contained in thin surface layer of solid samples. These objectives are realized by implementation of computer-assisted systems that carefully regulate the motion of, and force applied to probes of atomic force microscopes.

With example embodiments described herein, a probe tip of a scanning probe microscope (such as an atomic force microscope (AFM)) is directly detected as it moves in a tapping mode to determine the tip positions over time, and a force for the tip is computed from these determined tip positions.

With example embodiments described herein, a probe tip of a scanning probe microscope (such as an atomic force microscope (AFM)) is directly detected as it moves in a tapping mode to determine the tip positions over time, and a force for the tip is computed from these determined tip positions.

Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response.