The invention describes a scanning probe imaging system with the probe held at a small distance from a sample (7) surface of the part during raster-scanning image acquisition. The interaction between the sample (7) and the probe's cantilever arm (17) is achieved due to microwave near fields formed at the sharp probe tip (18). Due to the near fields, the electrical impedance of the probe depends on the distance between the probe and the sample (7) and on the sample electrical properties, both in the immediate vicinity of the probe tip (18). The microwave detection system senses the electrical impedance of the probe at a set microwave frequency. The probe-sample distance is set and controlled with the use of an optical chromatic confocal displacement sensor as well as with the signals of the microwave detection system.