In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.

In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.

A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.

Sensors incorporating piezoresistive materials are described. One class of sensors includes piezoresistive material that is held or otherwise supported adjacent conductive traces on a substrate. Another class of sensors includes conductive traces formed directly on the piezoresistive material.

Sensors incorporating piezoresistive materials are described. One class of sensors includes piezoresistive material that is held or otherwise supported adjacent conductive traces on a substrate. Another class of sensors includes conductive traces formed directly on the piezoresistive material.

A characteristic impedance of an electric transmission line is measured by way of extraction. In the method, a first probe and a second probe are provided, wherein the first probe and the second probe are separable and independently operable probes. A first characteristic impedance of a first circuit where a first terminal of the first probe and a first terminal of the second probe are directly interconnected to each other is first measured. Then a second characteristic impedance of a second circuit where the first terminal of the first probe and the first terminal of the second probe are connected to opposite terminals of the electric transmission line, respectively, is measured. The characteristic impedance of the electric transmission line can then be obtained according to the first characteristic impedance and the second characteristic impedance.

The present invention reports a novel microfluidic analyzer for the high-throughput, label-free measurement of particles suspended in a fluid. The present invention employs the resistive pulse technique (RPT) which affords very high electrical bandwidth for the device, which surpasses that of currently available systems and devices. Further, devices in accordance with the present invention are fabricated with very simple microfabrication technologies, making the present invention more cost efficient and easier to manufacture than currently available devices.

An antenna checking circuit includes an antenna-connection-input terminal, a check-request-input terminal, a check-result-output terminal, a switching element having a control end connected to the check-request-input terminal, an input end connected to the antenna-connection-input terminal, and an output end connected to the check-result-output terminal, and a first resistance connected between the check-request-input terminal and the check-result-output terminal. A DC impedance of an antenna between a power supplying point and a ground point is 0, and when a high-level check-request signal is applied to the check-request-input terminal, in a case where the antenna is connected to an antenna-connection terminal, the switching element turns on, and in a case where the antenna is not connected to the antenna-connection terminal, the switching element turns off. Check-result signals that are output to the check-result-output terminal in these cases are different from each other.

An antenna checking circuit includes an antenna-connection-input terminal, a check-request-input terminal, a check-result-output terminal, a switching element having a control end connected to the check-request-input terminal, an input end connected to the antenna-connection-input terminal, and an output end connected to the check-result-output terminal, and a first resistance connected between the check-request-input terminal and the check-result-output terminal. A DC impedance of an antenna between a power supplying point and a ground point is 0, and when a high-level check-request signal is applied to the check-request-input terminal, in a case where the antenna is connected to an antenna-connection terminal, the switching element turns on, and in a case where the antenna is not connected to the antenna-connection terminal, the switching element turns off. Check-result signals that are output to the check-result-output terminal in these cases are different from each other.

A transparent electrode capacitance sensor includes a transparent resin substrate; at least one transparent electrode formed on the transparent resin substrate; a pseudo auxiliary electrode formed in at least a portion of an outer periphery of the transparent electrode; and a lead wire connected to the pseudo auxiliary electrode, wherein the pseudo auxiliary electrode is thicker than the transparent electrode, and includes the same material as the transparent electrode.