First voltage an output unit generates a cyclic voltage that changes cyclically, and applies the cyclic voltage to the other end of a coupling capacitor via a first resistance. A second resistance and a third resistance are connected in series between a node and a second voltage output unit, the node being between the coupling capacitor and the first resistance. A voltage measurement unit measures a voltage at a voltage dividing point between the second resistance and the third resistance. In a period in which two types of fixed voltages are applied to the voltage dividing point in order, a diagnosing unit determines whether a leakage detecting device is in a normal state, based on the voltage measured by the voltage measurement unit.

Systems and methods for measurement and management are disclosed that provide complex measurements cost-effectively at very high accuracy. These methods and systems in some cases achieve measurement accuracy exceeding the accuracy of the reference standards they rely on, and eliminate expensive and disadvantageous recalibration procedures. The accurate measurements are integrated with management functions, applying the measurement data to meet objectives of the integrated system and workflow goals of its user. The disclosed systems and methods comprise an explicit or expressly represented model both of themselves and of candidate external systems to be measured and managed. The models may be configured and reconfigured by the owner-user through either local or remote means. The system intelligently reconfigures itself to adapt dynamically to the conditions of measurement and the user's and system's goals at each moment. In an embodiment, the system includes high-accuracy and reconfigurable components including a meter or control head adapted for user precision assembly and maintenance that computes and displays or communicates the measurements, displaying measurements in desired units, grouping functions according to ergonomic and cognitive principles based on the activity and workflow of a user in relation to the internal model. The use of models permits the system to compute and provide complex and inferred measurements of ultimate interest to the user, including quantities that cannot be directed measured and only can be determined through reasoning or computation by applying models to raw measurement data. The precision-assembly modular electromechanical design further permits an owner-user to precisely assemble, maintain, modify the apparatus and calibrate the equipment for accuracy.

A current transformer (CT) for the purpose of, for example, current measurement, that uses a power line as a first coil and a second coil for measurement purposes, is further equipped with a third coil. Circuitry connected to the third coil is adapted to inject a known reference signal to the third coil of the CT. The injected reference signal, i.e., current, generates signals in the first and second coils of the CT. The signal generated in the second coil is compared using circuitry attached thereto to the reference signal. Based on the results, and the difference between the expected results and the actual results, updated calibration parameters are determined. These provide improved accuracy when using the CT, for example for measurement of the like of current or phase of the primary coil when measurements are adjusted using the newly determined calibration parameters.

A calibration apparatus calibrates cross-frequency phases of large-signal network analyzer measurements and includes: a signal generator; a vector network analyzer that includes couplers and receivers that receive the calibration signal and the reference multitone signal from the signal generator; a calibration receiver that receives a calibration signal from the vector network analyzer and produces a digitized calibration temporal signal from the calibration signal; and a signal processor in communication with the signal generator and the vector network analyzer and that: receives the reference digitized signal from the reference receiver; receives the forward digitized signal from the forward coupled receiver; receives the reverse digitized signal from the reverse coupled receiver; receives the digitized calibration temporal signal from the calibration receiver; and produces a calibration factor from the reference digitized signal, the forward digitized signal, the reverse digitized signal, and the digitized calibration temporal signal.

There is provided a system and a method of testing an optical device in a scanner for scanning a semiconductor specimen, the method comprising controlling, by a processor and memory circuitry (PMC) operatively connected to the scanner, an optical element optically connected to the optical device to deviate an optical path of light transmitted by the optical device so to transmit towards an imaging sensor, thereby enabling acquiring, by the imaging sensor, image data informative of the optical device, wherein in a scanning mode the optical element enables light transmitting from the optical device towards another optical device comprised in the scanner, and processing the acquired image data to obtain results informative of operability of the optical device.

There is provided a system and a method of testing an optical device in a scanner for scanning a semiconductor specimen, the method comprising controlling, by a processor and memory circuitry (PMC) operatively connected to the scanner, an optical element optically connected to the optical device to deviate an optical path of light transmitted by the optical device so to transmit towards an imaging sensor, thereby enabling acquiring, by the imaging sensor, image data informative of the optical device, wherein in a scanning mode the optical element enables light transmitting from the optical device towards another optical device comprised in the scanner, and processing the acquired image data to obtain results informative of operability of the optical device.

The current sensor includes a battery terminal part that has electrical conductivity and is fastened to a battery post constituting a negative electrode of a battery, and a shunt resistor that is conductively connected to the battery terminal part via a joint part, the shunt resistor including a first detection terminal and a second detection terminal for detecting an electric current. The battery terminal part includes a third detection terminal for detecting a voltage of the battery between the joint part and the battery post. As a result, the current sensor can properly detect a voltage of the battery together with an electric current.

A burn-in board management system includes a production burn-in apparatus and a burn-in board status computer. The production burn-in apparatus is configured to test a plurality of integrated circuit devices mounted in slots of a burn-in board and comprising a first controller configured to generate a first burn-in board status map, wherein the first controller is further configured to suspend the burn-in board when the first burn-in board status map of the burn-in board demonstrates that more than a threshold percentage of the slots of the burn-in board are determined to be malfunctioned. The burn-in board status computer is communicably connected with the first controller of the production burn-in apparatus and configured to receive the first burn-in board status map.

A method, system and apparatus for compensating for non-ideal isotropic behavior of a field probe are disclosed. A method includes, during a calibration procedure, for each of a plurality of positions of the field probe relative to a source, each position denoted by a set of angles (θ, ϕ), performing the following steps: measuring a field by the sensors of the probe, storing the measurements and the set of angles (θ, ϕ) for each measurement, computing a correction factor for the set of angles (θ, ϕ) based on the measurement, and storing the correction factors. During a measurement procedure, each sensor measures a component of the field. A set of angles is determined based on the sensor measurements, and a correction factor is determined based on the set of angles. The correction factor may then be multiplied by the sensor measurements to obtain the corrected field measurements.

A method and apparatus for calibrating an impedance measurement device are provided. The impedance measurement device outputs a first AC signal to a phase-locked current generator. The phase-locked current generator generates a second AC signal having a phase that is locked to a phase of the first AC signal and having an amplitude that is representative of a presented impedance having a known impedance value. The phase-locked current generator outputs the second AC signal to the impedance measurement device. The impedance measurement device performs an impedance measurement based on the second AC signal to produce a measured impedance value associated with the presented impedance. The impedance measurement device is calibrated based on the measured impedance value and the known impedance value of the presented impedance.