Various embodiments of the present disclosure provide a method for forming a recessed gate electrode that has high thickness uniformity. A gate dielectric layer is deposited lining a recess, and a multilayer film is deposited lining the recess over the gate dielectric layer. The multilayer film comprises a gate electrode layer, a first sacrificial layer over the gate dielectric layer, and a second sacrificial layer over the first sacrificial dielectric layer. A planarization is performed into the second sacrificial layer and stops on the first sacrificial layer. A first etch is performed into the first and second sacrificial layers to remove the first sacrificial layer at sides of the recess. A second etch is performed into the gate electrode layer using the first sacrificial layer as a mask to form the recessed gate electrode. A third etch is performed to remove the first sacrificial layer after the second etch.

Various embodiments of the present disclosure provide a method for forming a recessed gate electrode that has high thickness uniformity. A gate dielectric layer is deposited lining a recess, and a multilayer film is deposited lining the recess over the gate dielectric layer. The multilayer film comprises a gate electrode layer, a first sacrificial layer over the gate dielectric layer, and a second sacrificial layer over the first sacrificial dielectric layer. A planarization is performed into the second sacrificial layer and stops on the first sacrificial layer. A first etch is performed into the first and second sacrificial layers to remove the first sacrificial layer at sides of the recess. A second etch is performed into the gate electrode layer using the first sacrificial layer as a mask to form the recessed gate electrode. A third etch is performed to remove the first sacrificial layer after the second etch.

Systems and methods for recognizing, tracking, and focusing a moving target are disclosed. In accordance with the disclosed embodiments, the systems and methods may recognize the moving target travelling relative to an imaging device; track the moving target; and determine a distance to the moving target from the imaging device.

Systems and methods for recognizing, tracking, and focusing a moving target are disclosed. In accordance with the disclosed embodiments, the systems and methods may recognize the moving target travelling relative to an imaging device; track the moving target; and determine a distance to the moving target from the imaging device.

An appropriate light emission frequency is set in an electronic device that determines a phase difference between radiation light and reflected light. The electronic device includes a light emission unit, a determination unit, and a setting unit. The light emission unit radiates intermittent light in synchronization with a synchronization signal at a set frequency that is set. The light reception unit generates received light data by receiving reflected light of the intermittent light. The determination unit determines presence or absence of a predetermined object on the basis of the received light data. The setting unit sets, in the light emission unit, as the set frequency, a frequency that is higher, the smaller the distance to the predetermined object, in a case where presence of the predetermined object is determined.

The technology disclosed relates to relates to providing command input to a machine under control. It further relates to gesturally interacting with the machine. The technology disclosed also relates to providing monitoring information about a process under control. The technology disclosed further relates to providing biometric information about an individual. The technology disclosed yet further relates to providing abstract features information (pose, grab strength, pinch strength, confidence, and so forth) about an individual.

The technology disclosed relates to relates to providing command input to a machine under control. It further relates to gesturally interacting with the machine. The technology disclosed also relates to providing monitoring information about a process under control. The technology disclosed further relates to providing biometric information about an individual. The technology disclosed yet further relates to providing abstract features information (pose, grab strength, pinch strength, confidence, and so forth) about an individual.

A VCSEL projector and method for using the same are disclosed. In one embodiment, the apparatus comprises a vertical cavity surface emitting laser (VCSEL) array comprising a plurality of VCSELs; a micro-lens array coupled to the VCSEL array and having a plurality of lenses, and each of the plurality of lenses is positioned over a VCSEL in the VCSEL array; and a projection lens coupled to the micro-lens array (MLA), where light emitted by the VCSEL array is projected as a sequence of patterns onto an object by the projection lens.

A VCSEL projector and method for using the same are disclosed. In one embodiment, the apparatus comprises a vertical cavity surface emitting laser (VCSEL) array comprising a plurality of VCSELs; a micro-lens array coupled to the VCSEL array and having a plurality of lenses, and each of the plurality of lenses is positioned over a VCSEL in the VCSEL array; and a projection lens coupled to the micro-lens array (MLA), where light emitted by the VCSEL array is projected as a sequence of patterns onto an object by the projection lens.

Aspects of the subject disclosure may include a system configured for receiving sensing data from a orientation detector coupled to an antenna, determining, according to the sensing data, that an aperture of the antenna has shifted from a first orientation to a second orientation, and configuring a transmitter to generate an adjusted electromagnetic wave that is supplied to a feed point of the antenna for offsetting the shift in orientation of the antenna. Other embodiments are disclosed.