Patent classifications
G
G03
G03D
3/00
G03D3/00
Developing method and developing device
10012906
·
2018-07-03
·
·
A developing device includes a spraying assembly and a concentration regulating assembly. A developing method usable in the developing device includes: spraying developing agents by a spraying assembly onto respective developing regions on a substrate to be developed; and spraying a regulating liquid by a concentration regulating assembly onto a target developing region on the substrate to be developed to change concentration of the developing agents.