A table apparatus includes a first driver applying force in a first axis direction to a table, and a second driver applying force in a second axis direction to the table. The first driver includes a first actuator generating power for moving the table in the first axis direction, and a first movable member moving along a first drive axis parallel to the first axis by actuation of the first actuator. The first movable member includes: a first linear bearing moving along the first drive axis; a first rotary bearing disposed around a first rod member fixed to the first linear bearing and rotatable relative to the first rod member; and a second linear bearing connected to the first rotary bearing and guided in the second axis direction by a second guide member fixed to an edge of the table in the first axis direction.

A rotary disk rotatable around a vertical rotation axis; a bearing supporting the rotary disk so as to be freely rotatable; a slide disk slidable on a top surface of the rotary disk; a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk; a placement disk that is supported by the slide disk; a plurality of air nozzles that are arranged on a top surface of the stator in an annular shape centered on the rotation axis, and form a static pressure air film between the top surface of the stator and a bottom surface of the rotary disk; an aerostatic pocket formed between the top surface of the rotary disk and a bottom surface of the slide disk; and a communication aperture is formed on the rotary disk and introduces pressure of the static pressure air film into the aerostatic pocket.

A rotary disk rotatable around a vertical rotation axis; a bearing supporting the rotary disk so as to be freely rotatable; a slide disk slidable on a top surface of the rotary disk; a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk; a placement disk that is supported by the slide disk; a plurality of air nozzles that are arranged on a top surface of the stator in an annular shape centered on the rotation axis, and form a static pressure air film between the top surface of the stator and a bottom surface of the rotary disk; an aerostatic pocket formed between the top surface of the rotary disk and a bottom surface of the slide disk; and a communication aperture is formed on the rotary disk and introduces pressure of the static pressure air film into the aerostatic pocket.

A stacking apparatus includes a stacking stage, a correction mechanism, a driving mechanism, and a linear-motion mechanism. The stacking stage has a stacking surface, on which objects are to be stacked in layers. The correction mechanism moves the stacking stage in a direction parallel to the stacking surface. The driving mechanism moves the stacking stage in a direction perpendicular to the stacking surface. The linear-motion mechanism connects the stacking stage and the correction mechanism, gives freedom of movement in the direction perpendicular to the stacking surface and constrains movement in the direction parallel to the stacking surface. The driving mechanism includes a main body part that does not overlap the stacking stage when viewed in the direction perpendicular to the stacking surface, and an arm part that extends from the main body part and between the stacking stage and the correction mechanism and supports the stacking stage.

The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.

Rotation mechanisms for rotating a payload in two, first and second degrees of freedom (DOF), comprising a static base, a first rotation arm coupled mechanically to the static base through a first rotation joint and used for rotating the payload relative to the static base around a first rotation axis that passes through the first rotation joint, a second rotation arm coupled mechanically to the static base through a second rotation joint and used for rotating the payload relative to the static base around a second rotation axis that passes through the second rotation joint, and a follower member rigidly coupled to the payload and arranged to keep a constant distance from the second rotation arm, wherein the rotation of the first arm rotates the payload around the first DOF and the rotation of the second arm rotate the payload around the second DOF.

A kit of portable modular components for use in demountably configuring a variety of structural assemblies. The kit comprises three types of elongate structural support components wherein the first type has a pair of opposed male ends, the second type has a male end and an opposed female end, and the third type has a pair of opposed female ends, wherein the male ends are configured for demountable engagement with the female ends. Each of the male ends comprises a cylindrical body with at least one linear set of two spaced-apart prongs around the circumferential surface of the cylindrical body. Each of the female ends has a cylindrical receptacle with one or more linear channels for receiving therein the cylindrical body and the at least one linear set of prongs. The female ends are provided with locking assemblies for releasable engagement the male ends.

A household appliance foot comprises a hydraulic plate; a sheath, fixedly connected with the hydraulic plate; a regulating foot, arranged in the sheath and being axially movable relative to the sheath; an accommodation chamber, formed by the hydraulic plate, the sheath and the regulating foot; a hydraulic medium, in the accommodation chamber and being compressed or expanding with pressure changes to drive the regulating foot to axially move in the sheath for leveling; a communicating device, communicating between at least two household appliance feet for allowing the hydraulic medium to flow between the household appliance feet; and a throttling structure, arranged in the communicating device for slowing down a flow velocity of the hydraulic medium. The throttling structures are arranged in the communicating devices, so that the rapid flowing of the hydraulic medium among the household appliance feet is prevented, and a regulating process can be more stable.

Pivot mechanism for guiding in rotation, comprising a mobile element connected to a fixed element through flexible connections; with the flexible elements being configured to guide the mobile element according to a rotational movement in a plane, around a pivoting axis perpendicular to the plane; with each of the flexible connections comprising an intermediary junction provided with an expansion slot, the expansion slot being configured to expand during the rotation of the mobile element, so that the mobile element can pivot according to a second angular amplitude that is greater than a first angular amplitude achieved without said expansion slot; with the intermediary junctions being connected to one another by a coupling member; each of the coupling members being configured so as to prevent a movement out of the plane and a lateral movement in the plane of the mobile element. The pivot mechanism has a very high rotational amplitude.

A slide rack carousel is provided that includes a base that is configured to support a plurality of slide rack spacers that extend upward from an upper surface of the base. Adjacent slide rack spacers define a slide rack slot of a predetermined size. The plurality of slide rack spacers may include slide rack spacers of varying sizes and therefore a plurality slide rack slot sizes can be selectively configured on the carousel in accordance with the positioning and size of the plurality of slide rack spacers that are attached to the base of the carousel. Accordingly, a desired number of 13 slide rack slots and a desired number of 23 slide rack slots can be configured on the base of the slide rack carousel.