A system includes a compound flexure having a frame, a flexure, and a post flexure. The frame has an axis, and the flexure is located within the frame. The flexure is movable relative to the frame, and the frame and the flexure form at least part of a monolithic structure. The post flexure extends along the axis and engages the flexure. The system also includes a device coupled to the flexure and configured to move with the flexure relative to the frame. The system further includes an actuator coupled to the flexure and configured to move the flexure and the device relative to the frame.

A system includes a compound flexure having a frame, a flexure, and a post flexure. The frame has an axis, and the flexure is located within the frame. The flexure is movable relative to the frame, and the frame and the flexure form at least part of a monolithic structure. The post flexure extends along the axis and engages the flexure. The system also includes a device coupled to the flexure and configured to move with the flexure relative to the frame. The system further includes an actuator coupled to the flexure and configured to move the flexure and the device relative to the frame.

Afforded is a linear stage including first, second, and third supporting parts disposed on a supporting flat surface, a first shaft supported by the first and second supporting parts and extending in a first direction, a second shaft supported by the third supporting part and provided extending in the first direction, and a translating carriage translated in the first direction, guided by the first shaft and the second shaft. At least one supporting part among the first, second, and third supporting parts supports the shaft supported by that supporting part in a way such as to be displaceable in a second direction orthogonal to the first direction and parallel to the supporting flat surface.

A water jets cutting machine includes a first rotating seat driven by a first motor to rotate about a first rotation axis, a second rotating seat driven by a second motor to rotate about a second axis, a water jets cutting head, an inertial measurement unit (IMU) for detecting an inclination angle of the water jets cutting head, and a controller connecting the first and second motors and the IMU. The controller is able to control the first and second motors to instantaneously conduct compensation for angular deviation of the water jets cutting head according to attitude and position signals which are fed back to the controller by the IMU.

A water jets cutting machine includes a first rotating seat driven by a first motor to rotate about a first rotation axis, a second rotating seat driven by a second motor to rotate about a second axis, a water jets cutting head, an inertial measurement unit (IMU) for detecting an inclination angle of the water jets cutting head, and a controller connecting the first and second motors and the IMU. The controller is able to control the first and second motors to instantaneously conduct compensation for angular deviation of the water jets cutting head according to attitude and position signals which are fed back to the controller by the IMU.

An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.

An adjusting mechanism of a sample holder is provided. The adjusting mechanism includes a base with drives arranged thereon, and a carrier that is adjustable by means of the drives and is designed to receive the sample holder. A coupling element for each drive, which coupling element is designed to connect the base and the carrier. Each coupling element has at least one linear degree of freedom and also a rotary degree of freedom. The carrier is linearly movable, by means of the coupling elements, along a respective movement axis directed from the coupling element to the carrier. Also provided is a microscope that includes such an adjusting mechanism, along with a method for adjusting the orientation of a sample holder.

An adjusting mechanism of a sample holder is provided. The adjusting mechanism includes a base with drives arranged thereon, and a carrier that is adjustable by means of the drives and is designed to receive the sample holder. A coupling element for each drive, which coupling element is designed to connect the base and the carrier. Each coupling element has at least one linear degree of freedom and also a rotary degree of freedom. The carrier is linearly movable, by means of the coupling elements, along a respective movement axis directed from the coupling element to the carrier. Also provided is a microscope that includes such an adjusting mechanism, along with a method for adjusting the orientation of a sample holder.

Rotation mechanisms for rotating a payload in two, first and second degrees of freedom (DOF), comprising a static base, a first rotation arm coupled mechanically to the static base through a first rotation joint and used for rotating the payload relative to the static base around a first rotation axis that passes through the first rotation joint, a second rotation arm coupled mechanically to the static base through a second rotation joint and used for rotating the payload relative to the static base around a second rotation axis that passes through the second rotation joint, and a follower member rigidly coupled to the payload and arranged to keep a constant distance from the second rotation arm, wherein the rotation of the first arm rotates the payload around the first DOF and the rotation of the second arm rotate the payload around the second DOF.

A positioning system includes a body, a flexible band disposed at least partially in the body, and a plurality of rollers in contact with the flexible band, wherein at least one of the rollers is constrained from translation both axially and radially.