An imaging device includes an image processor configured to: i) determine that a detection intensity distribution indicating detection intensity with respect to position coordinates of a stage is a convolution of an image intensity distribution on an extension line of a linear pixel and a window function; (ii) calculate an image intensity distribution for each linear pixel by deconvolution from the detection intensity distribution; and (iii) generate an image of the subject by disposing the image intensity distribution calculated in all the linear pixels in an arrangement direction of the linear pixels.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

The present invention relates to an optical system with a variable focal distance in a predetermined focal distance range, comprising two mirrors and a KB mechanical assembly having two supports adapted to support the mirrors one after the other along their main axis so as to form a propagation path. The system is characterized in that each mirror has a useful portion whose width and/or thickness is/are variable and selected according to said predetermined distance range, and in that, for each mirror, it further comprises a deformation mechanism adapted to generate a curvature of the corresponding mirror along its length to adjust the focal distance within said predetermined distance range.

Devices, systems and methods for performing X-ray scans with a single line of sight using a lens array for capturing the light field of the X-rays are described. In one example aspect, an X-ray optical system includes a primary optics subsection positioned to receive incoming X-rays after traversal through an object and to redirect the received incoming X-rays onto an intermediate image plane. The system also includes a microlens array positioned at or close to the intermediate image plane to receive at least some of the received incoming X-rays after redirection by the primary optics subsection to diffract the X-rays that are incident thereupon.

Devices, systems and methods for performing X-ray scans with a single line of sight using a lens array for capturing the light field of the X-rays are described. In one example aspect, an X-ray optical system includes a primary optics subsection positioned to receive incoming X-rays after traversal through an object and to redirect the received incoming X-rays onto an intermediate image plane. The system also includes a microlens array positioned at or close to the intermediate image plane to receive at least some of the received incoming X-rays after redirection by the primary optics subsection to diffract the X-rays that are incident thereupon.

Disclosed herein is an apparatus suitable for detecting X-ray, comprising: an X-ray absorption layer comprising an electrode; an electronics layer, the electronics layer comprising: a substrate having a first surface and a second surface, an electronics system in or on the substrate, an electric contact on the first surface, a via, and a transmission line on the second surface; wherein the via extends from the first surface to the second surface; wherein the electrode is electrically connected to the electric contact; wherein the electronics system is electrically connected to the electric contact and the transmission line through the via.

An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to an inspection target surface of the inspection target object, an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X ray generation portion and totally reflected by the inspection target surface, and an adjustment mechanism configured to adjust a relative position between the inspection target surface and the X-ray detector.