Systems for x-ray microscopy using an array of micro-beams having a micro- or nano-scale beam intensity profile to provide selective illumination of micro- or nano-scale regions of an object. An array detector is positioned such that each pixel of the detector only detects x-rays corresponding to a single micro-or nano-beam. This allows the signal arising from each x-ray detector pixel to be identified with the specific, limited micro- or nano-scale region illuminated, allowing sampled transmission image of the object at a micro- or nano-scale to be generated while using a detector with pixels having a larger size and scale. Detectors with higher quantum efficiency may therefore be used, since the lateral resolution is provided solely by the dimensions of the micro- or nano-beams. The micro- or nano-scale beams may be generated using a arrayed x-ray source and a set of Talbot interference fringes.

The invention utilizes one exposure without moving parts to provide multiple x-ray views of an object. It relies on a 3D detector, which can be a stack of film plates, and a specified focusing x-ray optic. The x-ray optic, discussed below, allows collection of x-rays from a localized volume, just like an ordinary optical lens, and the stacked film plate, or other 3D detector design, allows collection of the multiple focal plane information from one line of sight.

The invention utilizes one exposure without moving parts to provide multiple x-ray views of an object. It relies on a 3D detector, which can be a stack of film plates, and a specified focusing x-ray optic. The x-ray optic, discussed below, allows collection of x-rays from a localized volume, just like an ordinary optical lens, and the stacked film plate, or other 3D detector design, allows collection of the multiple focal plane information from one line of sight.

An energy converter unit and X-ray source system are presented. The energy converter unit comprises a multilayered crystal structure having a selected layers' arrangement comprising at least first and second of layers of at least first and second material compositions. The layers-arrangement is formed of a pattern of n1 layers of said first layer type and n2 layers of said second layer type generating a selected lattice periodicity of said layers. The lattice periodicity is selected such that said multilayered crystal structure responds to the charged particle beam of predetermined parameters by coherent emission of X-ray radiation having selected spectral content and emission direction.

An imaging optical arrangement serves to image an object illuminated by X-rays. An imaging optics serves to image a transfer field in a field plane into a detection field in a detection plane. A layer of scintillator material is arranged at the transfer field. A stop is arranged in a pupil plane of the imaging optics. The imaging optics has an optical axis. A center of a stop opening of the stop is arranged at a decentering distance with respect to the optical axis. Such imaging optical arrangement ensures a high quality imaging of the object irrespective of a tilt of X-rays entering the transfer field. The imaging optical arrangement is part of a detection assembly further comprising a detection array and an object mount. Such detection assembly is part of a detection system further comprising a X-ray source.

An imaging optical arrangement serves to image an object illuminated by X-rays. An imaging optics serves to image a transfer field in a field plane into a detection field in a detection plane. A layer of scintillator material is arranged at the transfer field. A stop is arranged in a pupil plane of the imaging optics. The imaging optics has an optical axis. A center of a stop opening of the stop is arranged at a decentering distance with respect to the optical axis. Such imaging optical arrangement ensures a high quality imaging of the object irrespective of a tilt of X-rays entering the transfer field. The imaging optical arrangement is part of a detection assembly further comprising a detection array and an object mount. Such detection assembly is part of a detection system further comprising a X-ray source.

An optical system (OS) for focusing a beam of radiation (B) on a region of interest in a metrology apparatus is described. The beam of radiation (B) comprises radiation in a soft X-ray or Extreme Ultraviolet spectral range. The optical system (OS) comprises a first stage (S1) for focusing the beam of radiation at an intermediate focus region. The optical system (OS) comprises a second stage (S2) for focusing the beam of radiation from the intermediate focus region onto the region of interest. The first and second stages each comprise a Kirkpatrick-Baez reflector combination. At least one reflector comprises an aberration-correcting reflector.

A method and system are disclosed for producing an x-ray image of a sample using a lamella-shaped target to improve the usual tradeoff between imaging resolution and image acquisition time. A beam of electrons impacts the lamella-shaped target normal to the narrower dimension of the lamella which then determines the virtual source size along that axis. For low-energy x-ray generation, the small electron penetration depth parallel to the wider dimension of the lamella determines the virtual source size along that axis. Conductive cooling of the target is improved over post targets with the same imaging resolution. The lamella-shaped target is long enough to ensure that the electron beam does not impact the support structure which would degrade the imaging resolution. Target materials may be selected from the same metals used for bulk or post targets, including tungsten, molybdenum, titanium, scandium, vanadium, silver, or a refractory metal.

An x-ray imaging system data acquisition and image reconstruction system and method are disclosed which enable optimizing the image parameters based on multiple tomographic volumes of the sample that have been captured using an x-ray microscopy system. This enables the operator to control the image contrast, for example, of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in two or more tomographic volume data sets. This creates a combined volume with optimized image contrast throughout. Also, the system enables navigation within the volumes through functional annotation, improvements in volume registration and improvements in noise suppression both within the volumes and within slice histograms of the sample.

An x-ray imaging system data acquisition and image reconstruction system and method are disclosed which enable optimizing the image parameters based on multiple tomographic volumes of the sample that have been captured using an x-ray microscopy system. This enables the operator to control the image contrast, for example, of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in two or more tomographic volume data sets. This creates a combined volume with optimized image contrast throughout. Also, the system enables navigation within the volumes through functional annotation, improvements in volume registration and improvements in noise suppression both within the volumes and within slice histograms of the sample.