A power relay circuit for switching a load current includes a micro-electro-mechanical system (MEMS) switch and a semiconductor power switch. The MEMS switch and the semiconductor power switch are connected in series with the load current.

Unwanted or parasitic capacitances may occur in MEMS switches. To reduce or eliminate the impact of the unwanted or parasitic capacitance, an extra device, such as a second MEMS switch, may be coupled to a first MEMS switch to divert the unwanted or parasitic capacitance to ground.

A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.

A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes patterning a wiring layer to form at least one fixed plate and forming a sacrificial material on the wiring layer. The method further includes forming an insulator layer of one or more films over the at least one fixed plate and exposed portions of an underlying substrate to prevent formation of a reaction product between the wiring layer and a sacrificial material. The method further includes forming at least one MEMS beam that is moveable over the at least one fixed plate. The method further includes venting or stripping of the sacrificial material to form at least a first cavity.

A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.

A relay state prediction device according to the present invention includes: a voltage value acquisition unit that measures every moment a detected voltage detected from two ends of a shunt resistor; a voltage value difference calculation unit that calculates a voltage value difference between a first voltage value of when the detected voltage becomes minimum by an armature starting displacement after a primary-side switch is turned off and a second voltage value of when secondary-side contacts are opened; a slope calculation unit that calculates a slope at which the voltage value difference decreases as the secondary-side contacts are repeatedly opened and closed in response to the primary-side switch repeatedly turning on and off; and a state prediction unit that predicts the number of openable and closable times from the present time until the voltage value difference reaches a predetermined threshold value based on the voltage value difference at the present time and the decreasing slope.

An electromagnetic relay includes a fixed spring, a fixed contact configured to be swaged so as to be attached to the fixed spring, a movable spring, and a movable contact provided on the movable spring so as to be capable of making contact with the fixed contact, wherein a swaged portion of the fixed contact is formed so as not to protrude from a surface of the fixed spring.

An integrated switch is provided in the present application, comprising: a housing; a first circuit board, arranged in the housing; a movable stand, movably connected in the housing; a contact component; a second circuit board, arranged in the housing and connected with an inner wall thereof, and electrically connected with the first circuit board; an electric brush, arranged between the movable stand and the second circuit board, having one end connected with the movable stand and the other end slidably connected with the second circuit board, driven by the movable stand, the electric brush has a connection state after sliding to a first position of the second circuit board, and a disconnection state after sliding to a second position of the second circuit board, and the moving contact shifts from a power-on state to a power-off state after the electric brush slides to the disconnection state.

Devices, systems, methods, computer-implemented methods, apparatus, and/or computer program products that can facilitate a switch device that shifts frequency of a resonator in a quantum device are provided. According to an embodiment, a device can comprise a readout resonator coupled to a qubit. The device can further comprise a switch device formed across the readout resonator that shifts frequency of the readout resonator based on position of the switch device. According to another embodiment, a device can comprise a bus resonator coupled to a plurality of qubits. The device can further comprise a switch device formed across the bus resonator that shifts frequency of the bus resonator based on position of the switch device.

A power contact EoL predictor includes a pair of terminals adapted to be connected to a set of switchable contact electrodes of a power contact; a power switching circuit configured to trigger activation of the contact electrodes based on a first logic state signal or deactivation based on a second logic state signal; a contact separation detector determining a time of separation of the switchable contact electrodes of the power contact during the deactivation, and a controller configured to generate the second logic state signal to trigger the deactivation, and determine a stick duration associated with the set of switchable contact electrodes. The stick duration is based on a difference between a time the second logic state signal is generated and the time of separation during the contact cycle. The controller generates an EoL prediction for the contact electrodes based on the determined stick duration for multiple contact cycles.