There is provided a method for producing a liquid transport apparatus includes: a pressure chamber plate partially defining a pressure chamber that communicates with a nozzle for ejecting liquid; an insulating ceramics layer located on a surface of the pressure chamber plate to cover the pressure chamber; a piezoelectric layer located on the insulating ceramics layer; and a first electrode located on the piezoelectric layer. The method includes: forming the insulating ceramics layer on the pressure chamber plate by heating an insulating ceramic material; forming the piezoelectric layer and the first electrode on the insulating ceramics layer; forming the piezoelectric layer including annealing the piezoelectric layer at the annealing temperature; and forming the pressure chamber by removing a part of the pressure chamber plate so that a part of the insulating ceramics layer is exposed on the pressure chamber.

A BAW component, a lamination for a BAW component, and a method for manufacturing a BAW component are provided. A lamination for a BAW component includes a first layer with a first piezoelectric material and a second layer with a second piezoelectric material that is different than the first piezoelectric material. The first and the second piezoelectric material can be Sc doped AlN and AlN, respectively.

Embodiments of the invention include a tunable radio frequency (RF) communication module that includes a transmitting component having at least one tunable component and a receiving component having at least one tunable component. The tunable RF communication module includes at least one piezoelectric switching device coupled to at least one of the transmitting and receiving components. The at least one piezoelectric switching device is formed within an organic substrate having organic material and is designed to tune at least one tunable component of the tunable RF communication module.

Embodiments of the invention include a tunable radio frequency (RF) communication module that includes a transmitting component having at least one tunable component and a receiving component having at least one tunable component. The tunable RF communication module includes at least one piezoelectric switching device coupled to at least one of the transmitting and receiving components. The at least one piezoelectric switching device is formed within an organic substrate having organic material and is designed to tune at least one tunable component of the tunable RF communication module.

Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.

A piezoelectric multiplexer includes an actuator and multiple piezo-morph beams. The actuator includes an actuator conducting head and an actuator stem, and each piezo-morph beam includes a conducting beam contact head and a beam stem manufactured out of piezo-morph material. A control voltage is selectively applied to electrical contacts coupled to the beam stems to create a piezoelectric effect that bends the selected piezo-morph beam and creates an electrical connection between its contact head and the conducting head of the actuator. A control circuit with a controller signals which piezo-morph beam to connect to the actuator. This multi-piezo-morph-beam piezoelectric multiplexer can be affixed to the electrical terminals of different electrical components (e.g., a transistor) to create an electrical cell that can be manufactured on a semiconductor chip or in a microelectromechanical system (MEMS) device.

A piezoelectric multiplexer includes an actuator and multiple piezo-morph beams. The actuator includes an actuator conducting head and an actuator stem, and each piezo-morph beam includes a conducting beam contact head and a beam stem manufactured out of piezo-morph material. A control voltage is selectively applied to electrical contacts coupled to the beam stems to create a piezoelectric effect that bends the selected piezo-morph beam and creates an electrical connection between its contact head and the conducting head of the actuator. A control circuit with a controller signals which piezo-morph beam to connect to the actuator. This multi-piezo-morph-beam piezoelectric multiplexer can be affixed to the electrical terminals of different electrical components (e.g., a transistor) to create an electrical cell that can be manufactured on a semiconductor chip or in a microelectromechanical system (MEMS) device.

A vacuum circuit breaker comprises a vacuum interrupter operable between a closed state and an open state, and an actuator. The actuator comprises a piezoelectric driving element that is expandable and contractable along an expansion axis in response to an electrical input signal. The actuator further comprises a mechanical amplifying structure extendable along an actuation axis and being mechanically coupled to the piezoelectric driver such that expansion or contraction of said piezoelectric driving element causes the amplifying structure to extend or retract along the actuation axis. The mechanical amplifying structure is coupled to the vacuum interrupter for operating the vacuum interrupter between said closed and open states.

A vacuum circuit breaker comprises a vacuum interrupter operable between a closed state and an open state, and an actuator. The actuator comprises a piezoelectric driving element that is expandable and contractable along an expansion axis in response to an electrical input signal. The actuator further comprises a mechanical amplifying structure extendable along an actuation axis and being mechanically coupled to the piezoelectric driver such that expansion or contraction of said piezoelectric driving element causes the amplifying structure to extend or retract along the actuation axis. The mechanical amplifying structure is coupled to the vacuum interrupter for operating the vacuum interrupter between said closed and open states.

Embodiments of switches (10) include electrically-conductive housings (30, 60), and electrical conductors (34, 64) suspended within and electrically isolated from the housings (30, 60). Another electrical conductor (52) is configured to move between a first position at which the electrical conductor (52) is electrically isolated from the electrical conductors (34, 64) within the housings (30, 60), and a second position at which the electrical conductor (52) is in electrical contact with the electrical conductors (34, 64) within the housings (30, 60). The switches (10) further include an actuator (70, 72, 74, 76) comprising an electrically-conductive base (80) and an electrically-conductive arm (82a, 82b) having a first end restrained by the base (80). The electrical conductor (52) is supported by the arm (82a, 82b), and the arm (82a, 82b) is operative to deflect and thereby move the electrical conductor (52) between its first and second positions.