An electron beam irradiation device includes a stage, a main body unit, and a first mechanism. The main body unit includes a substrate, first members, and a first layer. The first members are arranged to be separated in a second direction intersecting a first direction and is provided at a first surface of the substrate opposing the stage. The first layer is provided between the stage and the first members and between the stage and the substrate. The first layer converts a light ray into an electron beam. The first mechanism is provided in the stage and moves the stage in the second direction. A distance of the movement is not less than a spacing between a center in the second direction of the first member and a center in the second direction of one other first member adjacent to the first member.

The present invention relates to an irradiation device for irradiating objects with electron beams. The irradiation device comprises at least one electron beam emitter having an electron exit window and at least one sensor device for detecting a first dose control parameter of the electron beam. The electron beam emitter is adapted to move past the sensor device such that the electron beam emitted from the electron exit window passes within a sensing area of the sensor device. The sensor device comprises more than one conductor each having a conductor surface in the sensing area of the sensor device, and the conductor surface is adapted to be exposed to electrons of the electron beam. The invention also relates to a method.

The present invention relates to an irradiation device for irradiating objects with electron beams. The irradiation device comprises at least one electron beam emitter having an electron exit window and at least one sensor device for detecting a first dose control parameter of the electron beam. The electron beam emitter is adapted to move past the sensor device such that the electron beam emitted from the electron exit window passes within a sensing area of the sensor device. The sensor device comprises more than one conductor each having a conductor surface in the sensing area of the sensor device, and the conductor surface is adapted to be exposed to electrons of the electron beam. The invention also relates to a method.

An electron beam irradiation device includes a stage, a main body unit, and a first mechanism. The main body unit includes a substrate, first members, and a first layer. The first members are arranged to be separated in a second direction intersecting a first direction and is provided at a first surface of the substrate opposing the stage. The first layer is provided between the stage and the first members and between the stage and the substrate. The first layer converts a light ray into an electron beam. The first mechanism is provided in the stage and moves the stage in the second direction. A distance of the movement is not less than a spacing between a center in the second direction of the first member and a center in the second direction of one other first member adjacent to the first member.

An electron beam emitter comprises an electron emission source capable of emitting electrons; a vacuum chamber containing the electron emission source; and a transmission window that keeps airtightness of the vacuum chamber and is capable of transmitting the electrons from the electron emission source. The transmission window includes a foil that transmits the electrons and a grid that does not transmit the electrons. The electron emission source includes an emission portion that emits the electrons and a non-emission portion that does not emit the electrons. The emission portion has a lower work function than the non-emission portion. The non-emission portion is prepared so as to prevent the electrons from reaching the grid.

An electron beam emitter comprises an electron emission source capable of emitting electrons; a vacuum chamber containing the electron emission source; and a transmission window that keeps airtightness of the vacuum chamber and is capable of transmitting the electrons from the electron emission source. The transmission window includes a foil that transmits the electrons and a grid that does not transmit the electrons. The electron emission source includes an emission portion that emits the electrons and a non-emission portion that does not emit the electrons. The emission portion has a lower work function than the non-emission portion. The non-emission portion is prepared so as to prevent the electrons from reaching the grid.