Patent classifications
H01J61/00
Multifunctional radio frequency systems and methods for UV sterilization, air purification, and defrost operations
Example systems have a defrost system that can receive a first RF signal at a first frequency to defrost a load. An air treatment device can receive a second RF signal at a second frequency and perform an air treatment process. An RF signal source has a power output, and a switching arrangement selectively electrically connects the defrost system and the first air treatment device to the power output of the RF signal source. A controller can electrically connect one of the defrost system and the first air treatment device to the power output of the RF signal source. When the defrost system is electrically connected, the RF signal source outputs the first RF signal at the first frequency, and when the first air treatment device is electrically connected, the RF signal source outputs the second RF signal at the second frequency.
Laser driven lamp
A laser driven lamp includes a metallic main body having a columnar shape. The lamp also includes an ellipsoidal reflecting surface formed in the main body such that the ellipsoidal reflecting surface has a focal point at which the laser beam converges. The lamp also includes a light exit window in front of the ellipsoidal reflecting surface. The light exit window transmits ultraviolet light. The lamp also includes a laser beam passing hole formed at a predetermined position of the main body such that this hole penetrates the main body in an optical axial direction of the lamp. The lamp also includes a light entrance window behind the laser light passing hole such that the laser beam is incident to the light entrance window. The main body, the light exit window and the light entrance window form a closed space to contain a light emitting gas.
Laser driven lamp
A laser driven lamp includes a metallic main body having a columnar shape. The lamp also includes an ellipsoidal reflecting surface formed in the main body such that the ellipsoidal reflecting surface has a focal point at which the laser beam converges. The lamp also includes a light exit window in front of the ellipsoidal reflecting surface. The light exit window transmits ultraviolet light. The lamp also includes a laser beam passing hole formed at a predetermined position of the main body such that this hole penetrates the main body in an optical axial direction of the lamp. The lamp also includes a light entrance window behind the laser light passing hole such that the laser beam is incident to the light entrance window. The main body, the light exit window and the light entrance window form a closed space to contain a light emitting gas.
Spectrometer Having a Discharge Lamp with a Plurality of Beam Paths
The present invention relates a spectrometer (1) having a lamp (2) that extends in substantially tubular fashion for the purposes of forming a light emission zone (3) that extends in the direction of the tubular extent and between two points to the end of emitting a first light beam (L1) and a second light beam (L2) that have the same origin on the light emission zone (3), a sample container (6) that is arranged in the beam path of the first light beam (L1) for receiving a sample to be measured, a first detection apparatus (D1) that is arranged in the direction of the first light beam (L1) for quantitative and/or qualitative determination of the sample to be measured in the sample container (6) on the basis of an interaction between the sample to be measured and the first light beam (L1), and a second detection apparatus (D2) that is arranged in the direction of the second light beam (L2) for the purposes of referencing the quantitative and/are qualitative determination, on the basis of the second light beam (L2), of the sample to be measured. The invention further relates to a spectrometer (1) having a lamp (2) that extends in substantially tubular fashion for the purposes of emitting at least two light beams (L1, L3), respectively one sample container (6, 16) arranged in the beam path of each light beam (L1, L3) for the purposes of receiving a sample to be measured, and a detection apparatus (D1, D3) that is arranged in the direction of each light beam (L1, L3) for the purposes of quantitative and/or qualitative determination of the sample to be measured in the respective sample container (6, 16) on the basis of an interaction between the sample to be measured and the respective light beam (L1, L3).
Ultraviolet lamp apparatuses having automated mobility while emitting light
Apparatuses are disclosed which include one or more lamps configured to emit germicidal light, wherein the apparatuses are configured such that germicidal light emitted from the one or more lamps is projected exterior to the apparatus. The apparatuses further include wheels arranged along a bottom of the apparatus and a motor to provide automated mobility of the apparatus across at least a part of a room or area in which the apparatus is arranged. Moreover, the apparatuses include a processor and a storage medium having program instructions which are executable by the processor for activating the motor such that the apparatus is moved within the room or area while the one or more lamps are emitting germicidal light.
Ultraviolet lamp apparatuses having automated mobility while emitting light
Apparatuses are disclosed which include one or more lamps configured to emit germicidal light, wherein the apparatuses are configured such that germicidal light emitted from the one or more lamps is projected exterior to the apparatus. The apparatuses further include wheels arranged along a bottom of the apparatus and a motor to provide automated mobility of the apparatus across at least a part of a room or area in which the apparatus is arranged. Moreover, the apparatuses include a processor and a storage medium having program instructions which are executable by the processor for activating the motor such that the apparatus is moved within the room or area while the one or more lamps are emitting germicidal light.
Reflector and/or method for ultraviolet curing of semiconductor
An ultraviolet (UV) lamp assembly of a UV curing tool is provided for curing a low dielectric constant (low-k) material layer of a semiconductor wafer. The UV lamp assembly includes: a UV lamp which emits UV light; a first reflector arranged proximate to a first side of the UV lamp, the first reflector including a first surface facing the UV lamp from which UV light emitted by the UV lamp is at least partially reflected; and a UV reflective coating partially coating the first surface of the reflector. Suitably, a plurality of areas of the first surface of the reflector remain uncoated with the UV reflective coating and the plurality of uncoated areas are arranged to promote a uniform exposure of the semiconductor wafer to UV irradiation.
REFLECTOR AND/OR METHOD FOR ULTRAVIOLET CURING OF SEMICONDUCTOR
An ultraviolet (UV) lamp assembly of a UV curing tool is provided for curing a low dielectric constant (low-k) material layer of a semiconductor wafer. The UV lamp assembly includes: a UV lamp which emits UV light; a first reflector arranged proximate to a first side of the UV lamp, the first reflector including a first surface facing the UV lamp from which UV light emitted by the UV lamp is at least partially reflected; and a UV reflective coating partially coating the first surface of the reflector. Suitably, a plurality of areas of the first surface of the reflector remain uncoated with the UV reflective coating and the plurality of uncoated areas are arranged to promote a uniform exposure of the semiconductor wafer to UV irradiation.
Germicidal Lamp Apparatuses Having Automated Mobility While Emitting Light
Apparatuses are disclosed which include one or more lamps configured to emit germicidal light, wherein the apparatuses are configured such that germicidal light emitted from the one or more lamps is projected exterior to the apparatus. The apparatuses further include wheels arranged along a bottom of the apparatus and a motor to provide automated mobility of the apparatus across at least a part of a room or area in which the apparatus is arranged. Moreover, the apparatuses include a processor and a storage medium having program instructions which are executable by the processor for activating the motor such that the apparatus is moved within the room or area while the one or more lamps are emitting germicidal light.
Germicidal Lamp Apparatuses Having Automated Mobility While Emitting Light
Apparatuses are disclosed which include one or more lamps configured to emit germicidal light, wherein the apparatuses are configured such that germicidal light emitted from the one or more lamps is projected exterior to the apparatus. The apparatuses further include wheels arranged along a bottom of the apparatus and a motor to provide automated mobility of the apparatus across at least a part of a room or area in which the apparatus is arranged. Moreover, the apparatuses include a processor and a storage medium having program instructions which are executable by the processor for activating the motor such that the apparatus is moved within the room or area while the one or more lamps are emitting germicidal light.