Patent classifications
H01J65/00
Triple tube type excimer lamp
A triple tube type excimer lamp according to an embodiment of the present invention includes a discharge unit which includes an outer tube having an external electrode on an outer circumferential surface thereof, an inner tube having the same axis as the outer tube, inserted into the outer tube, and having an internal electrode on an inner surface thereof, and one pair of assembly tubes respectively disposed on both sides of the inner tube, and configured to generate light by discharge, a cover tube having a shape surrounding an outer side of the outer tube; and one pair of bases respectively coupled with the one pair of assembly tubes and respectively sealed with both ends of the cover tube.
Triple tube type excimer lamp
A triple tube type excimer lamp according to an embodiment of the present invention includes a discharge unit which includes an outer tube having an external electrode on an outer circumferential surface thereof, an inner tube having the same axis as the outer tube, inserted into the outer tube, and having an internal electrode on an inner surface thereof, and one pair of assembly tubes respectively disposed on both sides of the inner tube, and configured to generate light by discharge, a cover tube having a shape surrounding an outer side of the outer tube; and one pair of bases respectively coupled with the one pair of assembly tubes and respectively sealed with both ends of the cover tube.
Excimer lamp light source device
Provided is an excimer lamp light source device that achieves low cost and avoids the occurrence of narrowly-defined contracted discharge by adopting a lamp bulb having a simple structure and of the type in which a discharge current is passed in a tube axis direction. The excimer lamp light source device includes: an excimer lamp that has a pair of external electrodes configured to induce an electric discharge in a discharge space of a lamp bulb and to cause a discharge current to flow in a tube axis direction of the lamp bulb, and that generates UV light in the discharge space by the discharge; and an inverter having a transformer equipped with a secondary winding to which the external electrodes are connected in order to apply a high-voltage alternating current to the excimer lamp, the inverter supplying power lower than power that causes a linear discharge.
Excimer lamp light source device
Provided is an excimer lamp light source device that achieves low cost and avoids the occurrence of narrowly-defined contracted discharge by adopting a lamp bulb having a simple structure and of the type in which a discharge current is passed in a tube axis direction. The excimer lamp light source device includes: an excimer lamp that has a pair of external electrodes configured to induce an electric discharge in a discharge space of a lamp bulb and to cause a discharge current to flow in a tube axis direction of the lamp bulb, and that generates UV light in the discharge space by the discharge; and an inverter having a transformer equipped with a secondary winding to which the external electrodes are connected in order to apply a high-voltage alternating current to the excimer lamp, the inverter supplying power lower than power that causes a linear discharge.
DEVICE FOR EMITTING ULTRAVIOLET LIGHT
A device for emitting ultraviolet light includes at least one excimer lamp and a housing for the excimer lamp(s). Each excimer lamp has a discharge vessel filled with light-emitting gases, and a pair of first and second electrodes that are placed in contact with the discharge vessel and produce a dielectric barrier discharge inside the discharge vessel. The housing is made of an insulating and heat-resistant resin material. The housing is configured to house the excimer lamp(s), and has a light-emitting window that allows light with a center wavelength in a range from 200 nm to 230 nm emitted from the excimer lamp(s) to exit from the housing.
DEVICE FOR EMITTING ULTRAVIOLET LIGHT
A device for emitting ultraviolet light includes at least one excimer lamp and a housing for the excimer lamp(s). Each excimer lamp has a discharge vessel filled with light-emitting gases, and a pair of first and second electrodes that are placed in contact with the discharge vessel and produce a dielectric barrier discharge inside the discharge vessel. The housing is made of an insulating and heat-resistant resin material. The housing is configured to house the excimer lamp(s), and has a light-emitting window that allows light with a center wavelength in a range from 200 nm to 230 nm emitted from the excimer lamp(s) to exit from the housing.
TRIPLE TUBE TYPE EXCIMER LAMP
A triple tube type excimer lamp according to an embodiment of the present invention includes a discharge unit which includes an outer tube having an external electrode on an outer circumferential surface thereof, an inner tube having the same axis as the outer tube, inserted into the outer tube, and having an internal electrode on an inner surface thereof, and one pair of assembly tubes respectively disposed on both sides of the inner tube, and configured to generate light by discharge, a cover tube having a shape surrounding an outer side of the outer tube; and one pair of bases respectively coupled with the one pair of assembly tubes and respectively sealed with both ends of the cover tube.
TRIPLE TUBE TYPE EXCIMER LAMP
A triple tube type excimer lamp according to an embodiment of the present invention includes a discharge unit which includes an outer tube having an external electrode on an outer circumferential surface thereof, an inner tube having the same axis as the outer tube, inserted into the outer tube, and having an internal electrode on an inner surface thereof, and one pair of assembly tubes respectively disposed on both sides of the inner tube, and configured to generate light by discharge, a cover tube having a shape surrounding an outer side of the outer tube; and one pair of bases respectively coupled with the one pair of assembly tubes and respectively sealed with both ends of the cover tube.
ULTRAVIOLET IRRADIATION APPARATUS
A ultraviolet irradiation apparatus includes: a first electrode block and a second electrode block located apart from each other in a first direction or located in an electrically-insulated state in the first direction; a recessed groove formed on a side surface of each of both the blocks; a first discharge lamp partially fitted into the recessed grooves formed in both the blocks and located across the both blocks; a power supply part for supplying electrical power to the first discharge lamp; a first current-carrying member electrically connecting the first electrode block and the power supply part; a second current-carrying member capable of electrically connecting the second electrode block and the power supply part at an electrical potential different from that of the first current-carrying member; and a light irradiation window for extracting ultraviolet light emitted from the first discharge lamp to outside.
ULTRAVIOLET IRRADIATION APPARATUS
A ultraviolet irradiation apparatus includes: a first electrode block and a second electrode block located apart from each other in a first direction or located in an electrically-insulated state in the first direction; a recessed groove formed on a side surface of each of both the blocks; a first discharge lamp partially fitted into the recessed grooves formed in both the blocks and located across the both blocks; a power supply part for supplying electrical power to the first discharge lamp; a first current-carrying member electrically connecting the first electrode block and the power supply part; a second current-carrying member capable of electrically connecting the second electrode block and the power supply part at an electrical potential different from that of the first current-carrying member; and a light irradiation window for extracting ultraviolet light emitted from the first discharge lamp to outside.