H01J65/00

Excimer lamp and light irradiation device having the same

An excimer lamp according to an embodiment of the present disclosure is capable of improving start-up characteristics and a light irradiation efficiency of a lamp and being miniaturized. The excimer lamp includes a light emitting tube emitting light, a first electrode disposed at an outer side of the light emitting tube, a second electrode disposed at an outer side of the light emitting tube in correspondence to the first electrode, and an auxiliary light emitting body disposed between the first electrode and the second electrode to emit light toward the light emitting tube when a voltage is applied to the first and second electrodes, and a light irradiation device having the same.

Ozone generation device

An ozone generation device has a casing; a wall body partitioning a space surrounded by the casing into at least a first chamber and a second chamber; a first opening and a second opening provided in a part of the casing to communicate an outer side of the casing and the first chamber; a blower communicating the first chamber and the second chamber; a third opening provided in a part of the casing to communicate the outer side of the casing and the second chamber; a light source body provided between the blower and the third opening in the second chamber and configured to emit ultraviolet light; and an electrical body provided in a position between the first opening and the second opening in the first chamber and configured to supply electric power for driving the light source body.

Ozone generation device

An ozone generation device has a casing; a wall body partitioning a space surrounded by the casing into at least a first chamber and a second chamber; a first opening and a second opening provided in a part of the casing to communicate an outer side of the casing and the first chamber; a blower communicating the first chamber and the second chamber; a third opening provided in a part of the casing to communicate the outer side of the casing and the second chamber; a light source body provided between the blower and the third opening in the second chamber and configured to emit ultraviolet light; and an electrical body provided in a position between the first opening and the second opening in the first chamber and configured to supply electric power for driving the light source body.

HAIR REMOVAL INSTRUMENT

This application relates to a hair removal instrument, including a cooling driver, a housing, a hair removal apparatus, a cold compress part, a heat conduction part, a control board, a sealing cover, and a temperature control apparatus. The cooling driver is provided with a driving port, the cooling driver is fastened in the housing, and the housing is provided with an air outlet, a cooling channel butt-jointed to the driving port and in communication with the air outlet, and a light outlet in communication with the cooling channel. The temperature control apparatus, mounted in the housing and located on one side which is of the heat conduction part and which is away from the cooling driver, and close to the air outlet. When the temperature control apparatus detects that a temperature at the air guide hole is excessively high, the control board controls the hair removal apparatus to stop operating.

HAIR REMOVAL INSTRUMENT

This application relates to a hair removal instrument, including a cooling driver, a housing, a hair removal apparatus, a cold compress part, a heat conduction part, a control board, a sealing cover, and a temperature control apparatus. The cooling driver is provided with a driving port, the cooling driver is fastened in the housing, and the housing is provided with an air outlet, a cooling channel butt-jointed to the driving port and in communication with the air outlet, and a light outlet in communication with the cooling channel. The temperature control apparatus, mounted in the housing and located on one side which is of the heat conduction part and which is away from the cooling driver, and close to the air outlet. When the temperature control apparatus detects that a temperature at the air guide hole is excessively high, the control board controls the hair removal apparatus to stop operating.

ULTRAVIOLET LIGHT IRRADIATION DEVICE

To provide an ultraviolet light irradiation device capable of inactivating bacteria, viruses, and the like with increased efficiency while ensuring safety. An ultraviolet light irradiation device according to the present invention includes a light source to emit ultraviolet light having a wavelength within a range of 190 nm or more and less than 240 nm, a housing to house the light source, a light extraction part to extract the ultraviolet light emitted from the light source out of the housing, and a diffusion transmission member to diffuse and transmit the ultraviolet light.

Radiation source, metrology apparatus, lithographic system and device manufacturing method

A radiation source apparatus comprising: a container for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation, wherein said container is operable substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.

Radiation source, metrology apparatus, lithographic system and device manufacturing method

A radiation source apparatus comprising: a container for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation, wherein said container is operable substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.

OZONE GENERATION DEVICE

An ozone generation device has a casing; a wall body partitioning a space surrounded by the casing into at least a first chamber and a second chamber; a first opening and a second opening provided in a part of the casing to communicate an outer side of the casing and the first chamber; a blower communicating the first chamber and the second chamber; a third opening provided in a part of the casing to communicate the outer side of the casing and the second chamber; a light source body provided between the blower and the third opening in the second chamber and configured to emit ultraviolet light; and an electrical body provided in a position between the first opening and the second opening in the first chamber and configured to supply electric power for driving the light source body.

ULTRAVIOLET RAY GENERATION DEVICE

The startability of an ultraviolet ray generation device including an excimer lamp as an ultraviolet light source is to be improved. An ultraviolet ray generation device includes: an excimer lamp having a discharge container in which a discharge gas is sealed; a first electrode body and a second electrode body that are disposed so as not to be exposed to the discharge gas; and a first conductor electrically connected to one of the first electrode body and the second electrode body. The first conductor faces the other electrode body or a second conductor electrically connected to the other electrode body, through a dielectric member. The first conductor causes an atmospheric discharge around the first conductor.