H01L28/00

METHOD TO FABRICATE UNIFORM TUNNELING DIELECTRIC OF EMBEDDED FLASH MEMORY CELL

Some embodiments relate to an integrated chip that includes a first source/drain region and a second source/drain region disposed in a substrate. A plane that is substantially perpendicular to an upper surface of the substrate traverses the first source/drain region and the second source/drain region. Agate electrode extends over a channel region in the substrate between the first source/drain region and the second source/drain region. The gate electrode is separated from the channel region by way of a charge trapping dielectric structure. The charge trapping dielectric structure includes a tunnel dielectric layer, a charge trapping dielectric layer over the tunnel dielectric layer, and a blocking dielectric layer over the charge trapping dielectric layer. The channel region has a channel width measured perpendicularly to the plane, and the tunnel dielectric layer has different thicknesses at different respective points along the channel width.

Method of forming a three-gate non-volatile flash memory cell using two polysilicon deposition steps

A simplified method for forming a non-volatile memory cell using two polysilicon depositions. A first polysilicon layer is formed on and insulated from the semiconductor substrate in a first polysilicon deposition process. An insulation block is formed on the first polysilicon layer. Spacers are formed adjacent first and second sides of the insulation block, and with the spacer adjacent the first side is reduced. Exposed portions of the first poly silicon layer are removed while maintaining a polysilicon block of the first polysilicon layer disposed under the insulation block. A second polysilicon layer is formed over the substrate and the insulation block in a second polysilicon deposition process. Portions of the second polysilicon layer are removed while maintaining a first polysilicon block (disposed adjacent the first side of the insulation block), and a second polysilicon block (disposed adjacent the second side of the insulation block).

PACKAGE STRUCTURE INCLUDING IPD AND METHOD OF FORMING THE SAME

A package structure including IPD and method of forming the same are provided. The package structure includes a die, an encapsulant laterally encapsulating the die, a first RDL structure disposed on the encapsulant and the die, an IPD disposed on the first RDL structure and an underfill layer. The IPD includes a substrate, a first connector on a first side of the substrate and electrically connected to the first RDL structure, a guard structure on a second side of the substrate opposite to the first side and laterally surrounding a connector region, and a second connector disposed within the connector region and electrically connected to a conductive via embedded in the substrate. The underfill layer is disposed to at least fill a space between the first side of the IPD and the first RDL structure. The underfill layer is separated from the connector region by the guard structure.

Patterning of thin film capacitors in organic substrate packages

Embodiments herein relate to systems, apparatuses, processing, and techniques related to patterning one or more sides of a thin film capacitor (TFC) sheet, where the TFC sheet has a first side and a second side opposite the first side. The first side and the second side of the TFC sheet are metal and are separated by a dielectric layer, and the patterned TFC sheet is to provide at least one of a capacitor or a routing feature on a first side of a substrate that has the first side and a second side opposite the first side.

Electronic structure, a battery structure, and a method for manufacturing an electronic structure
09847326 · 2017-12-19 · ·

According to various embodiments, an electronic structure may be provided, the electronic structure may include: a semiconductor carrier, and a battery structure monolithically integrated with the semiconductor carrier, the battery structure including a plurality of thin film batteries.

ELECTRONIC DEVICE INCLUDING AN INTEGRATED CIRCUIT DIE AND A SUPPORT STRUCTURE

An electronic device includes a first integrated circuit die, a support structure, and a second integrated circuit die and may include a spacer. The support structure includes a circuit element. The support structure has a thickness of at least 110 microns. The spacer or second integrated circuit die includes a conductor. The spacer or second integrated circuit die is disposed between the first integrated circuit die and the support structure. The conductor is electrically coupled to the integrated circuit die or the circuit element of the support structure. The electronic device provides more flexibility to a designer by allowing a circuit element or circuit that occupies a significant area to be in the support structure.

SEMICONDUCTOR STRUCTURE
20170338231 · 2017-11-23 ·

A semiconductor structure is provided. The semiconductor structure includes a semiconductor substrate, a well region on the semiconductor substrate, a radio frequency circuit, a first guard ring adjacent to the RF circuit, and a first isolation region directly disposed between the RF circuit and the first guard ring. The well region has a first conductive type. The RF circuit includes a FIN field-effect transistor having a plurality of first fins and a plurality of first polys on the well region, wherein the first polys are perpendicular to the first fins. The first guard ring includes a plurality of second fins and a pair of second polys on the well region, wherein the second polys are perpendicular to the second fins. The first fins are arranged parallel to the second fins, and the first fins are separated from the second fins by the first isolation region.

Integrated Structures Comprising Vertical Channel Material and Having Conductively-Doped Semiconductor Material Directly Against Lower Sidewalls of the Channel Material

Some embodiments include an integrated structure having vertically-stacked conductive levels. Upper conductive levels are memory cell levels, and a lower conductive level is a select device level. Conductively-doped semiconductor material is under the select device level. Channel material extends along the memory cell levels and the select device level, and extends into the conductively-doped semiconductor material. A region of the channel material that extends into the conductively-doped semiconductor material is a lower region of the channel material and has a vertical sidewall. Tunneling material, charge-storage material and charge-blocking material extend along the channel material and are between the channel material and the conductive levels. The tunneling material, charge-storage material and charge-blocking material are not along at least a portion of the vertical sidewall of the lower region of the channel material, and the conductively-doped semiconductor material is directly against such portion. Some embodiments include methods of forming integrated structures.

Semiconductor diodes employing back-side semiconductor or metal

Integrated circuit (IC) strata including one or more transistor and one or more semiconductor diode. A transistor may include one or more non-planar semiconductor bodies in which there is a channel region while the diode also includes one or more non-planar semiconductor bodies in which there is a p-type region, an n-type region, or both. One IC stratum may be only hundreds of nanometers in thickness and include both front-side and back-side interconnect levels. The front-side interconnect level is disposed over a front side of one or more of the non-planar semiconductor bodies and is coupled to at least one terminal of the transistor. The back-side interconnect level is disposed over a back side of one or more of the non-planar semiconductor bodies and is coupled to at least one terminal of the semiconductor diode.

HETEROGENEOUS CELL ARRAY

A heterogeneous cell array includes a first column of cells and a second column of cells. The first column of cells includes a first cell having a first area and a second cell having the first area. The first cell includes two fin-type field effect transistors having a first number of fins and the second cell includes two fin-type field effect transistors having the first number of fins. The second column of cells includes a third cell having a second area. The third cell is adjacent to the first cell and to the second cell, and the third cell includes two fin-type field effect transistors having a second number of fins. The second area is greater than the first area, and the second number of fins is greater than the first number of fins.