Exemplary semiconductor processing methods may include forming a p-type silicon-containing material on a substrate including a first n-type silicon-containing material defining one or more features. The p-type silicon-containing material may extend along at least a portion of the one or more features defined in the first n-type silicon-containing material. The methods may include removing a portion of the p-type silicon-containing material. The portion of the p-type silicon-containing material may be removed from a bottom of the one or more features. The methods may include providing a silicon-containing material. The methods may include depositing a second n-type silicon-containing material on the substrate. The second n-type silicon-containing material may fill the one or more features formed in the first n-type silicon-containing material and may separate regions of remaining p-type silicon-containing material.

A semiconductor device including a first oxide semiconductor layer, a first gate electrode opposing the first oxide semiconductor layer, a first gate insulating layer between the first oxide semiconductor layer and the first gate electrode, a first insulating layer covering the first oxide semiconductor layer and having a first opening, a first conductive layer above the first insulating layer and in the first opening, the first conductive layer being electrically connected to the first oxide semiconductor layer, and an oxide layer between an upper surface of the first insulating layer and the first conductive layer, wherein the first insulating layer is exposed from the oxide layer in a region not overlapping the first conductive layer in a plan view.

A semiconductor device includes a gate electrode, a semiconductor film, and a conductive film. The semiconductor film includes an oxide semiconductor material. The semiconductor film includes a channel region, a low-resistance region, and an intermediate region. The channel region is opposed to the gate electrode. The low-resistance region has a lower electric resistance than the channel region. The intermediate region is provided between the low-resistance region and the channel region. The conductive film is provided selectively in contact with the low-resistance region of the semiconductor film.

A semiconductor device includes a substrate, a capacitor disposed on the substrate, and an interconnection structure. The capacitor is disposed on the substrate within a capacitor region and includes a lower electrode, an upper electrode, a stacked dielectric layer, and an intermediate dielectric layer. The upper electrode is disposed over the lower electrode, and the stacked dielectric layer is disposed between the lower electrode and the upper electrode. The intermediate dielectric layer is disposed between the lower electrode and the upper electrode and disposed only within the capacitor region. The relative permittivity of the intermediate dielectric layer is greater than the relative permittivity of the stacked dielectric layer. The interconnection structure including a plug and a stack of metal layers is disposed within an interconnection region abutting the capacitor region and is disposed at at least one side of the intermediate dielectric layer.

An integrated circuit package and a system including the integrated circuit package as well as a process for assembling the integrated circuit package are provided to improve integrated circuit power delivery. The integrated circuit package includes a first die having a plurality of pads formed in the first die and exposed on a top surface of the first die, at least one post on the first die, and a substrate including one or more redistribution layers. Each post in the at least one post spans at least two pads on the first die utilized for power distribution, and the first die is connected to the substrate via the at least one post.

The present invention provides an etchant less causing damage to IGZOs. The etchant of the present invention comprises hydroxyethanediphosphonic acid (A), one or more phosphonic acids (B), hydrogen peroxide (C), nitric acid (D), a fluorine compound (E), an azole (F), and an alkali (G), and is characterized in that the phosphoric acids (B) comprise one or more phosphonic acids selected from the group consisting of diethylenetriaminepentamethylenephosphonic acid, N,N,N′,N′-ethylenediaminetetrakismethylenephosphonic acid, and aminotrimethylenephosphonic acid and that the proportion of the hydroxyethanediphosphonic acid (A) is in the range of 0.01-0.1 mass % and the proportion of the phosphonic acids (B) is in the range of 0.003-0.04 mass %.

A semiconductor device according to an embodiment includes a nitride semiconductor layer; an insulating layer; a first region disposed between the nitride semiconductor layer and the insulating layer and containing at least one element of hydrogen and deuterium; and a second region disposed in the nitride semiconductor layer, adjacent to the first region, and containing fluorine.

A display device includes a pixel connected to a scan line, and a data line crossing the scan line, wherein the pixel includes a light-emitting element, a driving transistor configured to control a driving current supplied to the light-emitting element according to a data voltage applied from the data line, and a first switching transistor configured to apply the data voltage of the data line to the driving transistor according to a scan signal that is applied to the scan line. The driving transistor includes a first active layer including an oxide semiconductor, and a first oxide layer disposed on the first active layer and including an oxide semiconductor. The first switching transistor includes a second active layer including an oxide semiconductor, and the first oxide layer is not disposed on the second active layer.

An array substrate, a display device, a thin film transistor, and a method for manufacturing an array substrate are disclosed. The array substrate includes a base substrate, an active layer, and a cover layer. The active layer is on the base substrate, the cover layer is on a side, away from the base substrate, of the active layer and covers the array substrate, the cover layer includes a metal conductive portion and a transparent insulating metal oxide portion, the metal conductive portion and the transparent insulating metal oxide portion include an identical metal element, and the metal conductive portion is electrically connected to the active layer.

The present application discloses a thin film transistor. The thin film transistor includes a first source electrode and a first drain electrode spaced apart from each other; an active layer on the first source electrode and the first drain electrode, the active layer having a channel part between the first source electrode and the first drain electrode, a source electrode contact part in contact with the first source electrode, and a drain electrode contact part in contact with the first drain electrode; a second source electrode on a side of the source electrode contact part distal to the first source electrode, the second source electrode being electrically connected to the first source electrode; and a second drain electrode on a side of the drain electrode contact part distal to the first drain electrode, the second drain electrode being electrically connected to the first drain electrode.