H01L29/00

Array substrate and manufacturing method thereof
11791351 · 2023-10-17 ·

The present disclosure provides an array substrate and a manufacturing method of the array substrate. In the manufacturing method of the array substrate, during performing a first wet etching and a second wet etching on a second metal layer, the wet etching is stopped when a copper conductive layer is merely etched completely. Because a wet etching speed of a liner layer is slow, an etching time of the wet etching and a CD loss of the copper conductive layer can be greatly reduced, and the CD loss is relatively small. Meanwhile, an entire CD loss of the second metal layer can be reduced, and an aperture ratio can be improved.

Package substrate and method of fabricating the same

A package substrate includes a substrate, an interposer and an insulating protective layer. The substrate has a first surface and a second surface opposing to the first surface. The first surface includes a plurality of first conductive pads. The interposer is disposed on the first surface of the substrate such that the first conductive pads are partially covered by the interposer. The interposer includes a plurality of penetrating conductive vias electrically connected to the substrate. The insulating protective layer is disposed on the first surface of the substrate and surrounding the interposer. The insulating protective layer includes at least one penetrating conductive column, wherein a first width of the respective penetrating conductive column is greater than a second width of each of the penetrating conductive vias of the interposer.

Formation of single crystal semiconductors using planar vapor liquid solid epitaxy

A semiconductor device is provided. The semiconductor device includes a template layer disposed over a substrate and having a trench therein, a buffer structure disposed over a bottom surface of the trench and comprising a metal oxide, a single crystal semiconductor structure disposed within the trench and over the buffer structure and a gate structure disposed over a channel region of the single crystal semiconductor structure.

Process and structure for source/drain contacts

A method includes providing a structure having source/drain electrodes and a first dielectric layer over the source/drain electrodes; forming a first etch mask covering a first area of the first dielectric layer; performing a first etching process to the first dielectric layer, resulting in first trenches over the source/drain electrodes; filling the first trenches with a second dielectric layer that has a different material than the first dielectric layer; removing the first etch mask; performing a second etching process including isotropic etching to the first area of the first dielectric layer, resulting in a second trench above a first one of the source/drain electrodes; depositing a metal layer into at least the second trench; and performing a chemical mechanical planarization (CMP) process to the metal layer.

Semiconductor structure, method of forming stacked unit layers and method of forming stacked two-dimensional material layers

A semiconductor structure includes a semiconductor substrate, a plurality of stacked units, a conductive structure, a plurality of dielectrics, a first electrode strip, a second electrode strip, and a plurality of contact structures. The stacked units are stacked up over the semiconductor substrate, and comprises a first passivation layer, a second passivation layer and a channel layer sandwiched between the first passivation layer and the second passivation layer. The conductive structure is disposed on the semiconductor substrate and wrapping around the stacked units. The dielectrics are surrounding the stacked units and separating the stacked units from the conductive structure. The first electrode strip and the second electrode strip are located on two opposing sides of the conductive structure. The contact structures are connecting the channel layer of each of the stacked units to the first electrode strip and the second electrode strip.

Thin film transistor and manufacturing method thereof and display device

The present disclosure relates to a thin film transistor and a manufacturing method thereof, a flexible display screen and a display device. The thin film transistor is disposed on a substrate. The thin film transistor includes: an active layer, a source-drain conductive layer, and a gate conductive layer. The gate conductive layer includes a gate electrode, and the gate conductive layer is disposed on one side of the active layer away from the substrate and insulated from the active layer. The source-drain conductive layer includes a first electrode and a second electrode. The orthogonal projections of the first electrode, the gate electrode, and the second electrode on the substrate are sequentially nested from inside to outside and separately disposed. The reliability of image display may be improved.

METHOD FOR DETERMINING A TEMPERATURE OF AN IGBT DRIVER

A method for determining a temperature of an Insulated-Gate Bipolar Transistor (“IGBT”) driver, the IGBT driver may include two Metal-Oxide-Semiconductor Field-Effect Transistor (“MOSFET”) elements, two direct voltage terminals for providing a base direct voltage for the two MOSFET elements, two gate terminals for providing two control voltages for the two MOSFET elements, a measurement output for outputting an output voltage, and an alternating voltage source for providing an alternating voltage, the method may include providing the control voltages, the base direct voltage, and the alternating voltage, superimposing the alternating voltage with the base direct voltage, capturing the output voltage at the measurement output of the IGBT driver, and determining the temperature of the respective MOSFET elements from the captured output voltage.

SEMICONDUCTOR DEVICE
20230290811 · 2023-09-14 ·

A semiconductor device includes a capacitor structure. The capacitor structure includes a bottom electrode, a dielectric layer, and a top electrode that are stacked in a first direction. The dielectric layer includes a first dielectric layer, a second dielectric layer stacked on the first dielectric layer in the first direction, and a first impurity provided in the first dielectric layer. The first dielectric layer includes a ferroelectric material, and the second dielectric layer includes an anti-ferroelectric material.

METHOD FOR IMPROVING CONTINUITY OF WORK FUNCTION THIN FILM

The present application provides a method for improving continuity of a work function thin film, forming a tunneling oxide layer on a substrate; forming an isolation layer on the tunneling oxide layer; forming a work function thin film on the isolation layer, the work function thin film serves as a floating gate in a semi-floating gate device to store charges and conduction electrons, performing a heat treatment on the tunneling oxide layer, the isolation layer and the work function layer, the isolation layer reacts with a surface of the tunneling oxide layer to form a dense barrier layer, the isolation layer reacts with O in the tunneling oxide layer to form a new tunneling oxide layer, the heat treatment lasts until the isolation layer is fully consumed, and the work function thin film remaining after the reaction uniformly covers an upper surface of the dense barrier layer.

Gate walls for quantum dot devices

Disclosed herein are quantum dot devices, as well as related computing devices and methods. For example, in some embodiments, a quantum dot device may include: a quantum well stack; a first gate and an adjacent second gate above the quantum well stack; and a gate wall between the first gate and the second gate, wherein the gate wall includes a spacer and a capping material, the spacer has a top and a bottom, the bottom of the spacer is between the top of the spacer and the quantum well stack, and the capping material is proximate to the top of the spacer.