An aluminum nitride sintered body for use in a semiconductor manufacturing apparatus is provided. The aluminum nitride sintered body exhibits, in a photoluminescence spectrum thereof in a wavelength range of 350 nm to 700 nm obtained with 250 nm excitation light, a highest emission intensity peak within a wavelength range of 580 nm to 620 nm.

A shaft member has the same polarity as discharge electrodes. Each of the discharge electrodes has an electrode body and a tip end which is formed at an end of the electrode body facing an inner peripheral surface of a counter electrode. The discharge electrodes extend such that the tip ends and the electrode bodies are misaligned with each other in an axial direction of the shaft body. A streamer discharge travels from the tip ends of the discharge electrodes toward the inner peripheral surface of the counter electrode.

A shaft member has the same polarity as discharge electrodes. Each of the discharge electrodes has an electrode body and a tip end which is formed at an end of the electrode body facing an inner peripheral surface of a counter electrode. The discharge electrodes extend such that the tip ends and the electrode bodies are misaligned with each other in an axial direction of the shaft body. A streamer discharge travels from the tip ends of the discharge electrodes toward the inner peripheral surface of the counter electrode.

An electrostatic chuck device (1) including: an electrostatic chuck member (2) formed of ceramics; a temperature control base member (3) formed of metal; and a power supply terminal (16) which is inserted in the temperature control base member (3) and applies a voltage to an electrode for electrostatic attraction (13) which is provided on the electrostatic chuck member (2), the electrode for electrostatic attraction (13) and the power supply terminal (16) are connected with each other via a conductive adhesive layer (17), the conductive adhesive layer (17) contains a carbon fiber and a resin, and the carbon fiber has an aspect ratio of 100 or higher.

Methods and assemblies to stabilize and reduce an electric field in an environment are provided that include an elongated member and a head member. The head member is coupled to the elongated member. The head member includes a floating electrode, a ground electrode, and an insulator portion. The ground electrode spaced apart from the floating electrode. The ground electrode is in communication with the elongated member to receive a charge with a polarity of a earth system. The insulator portion is positioned between the floating and ground electrodes to insulate the floating electrode from the ground electrode. The floating electrode induces an electrical charge from the environment surrounding the head member. The floating electrode balances an existing charge on the ground electrode using an electromagnetic induction to collect a plurality of charges in the environment such that the floating and ground electrodes generate a balanced electric field.

Methods and assemblies to stabilize and reduce an electric field in an environment are provided that include an elongated member and a head member. The head member is coupled to the elongated member. The head member includes a floating electrode, a ground electrode, and an insulator portion. The ground electrode spaced apart from the floating electrode. The ground electrode is in communication with the elongated member to receive a charge with a polarity of a earth system. The insulator portion is positioned between the floating and ground electrodes to insulate the floating electrode from the ground electrode. The floating electrode induces an electrical charge from the environment surrounding the head member. The floating electrode balances an existing charge on the ground electrode using an electromagnetic induction to collect a plurality of charges in the environment such that the floating and ground electrodes generate a balanced electric field.

Electrostatic chucks and method for forming the same are described herein. The electrostatic chucks include a backside gas passage having a ceramic porous plug secured therein by a ceramic body of the chuck with a ceramic-to-ceramic body. In one example, ceramic porous plug is sintered with the ceramic body.

Provided is a soft X-ray static electricity removal apparatus that has achieved an increase in the amount of ionized air discharged, with a simple structure. A soft X-ray static electricity removal apparatus (1) includes a soft X-ray generation device (90), a container (10), a soft X-ray shielding sheet (20), and an insulating layer (50). The soft X-ray generation device generates soft X-rays (92). The container (10) has an outlet (12) from which ionized air (100) that has been ionized with the soft X-rays flows out. The soft X-ray shielding sheet (20) is used at the outlet of the container and includes a first outer sheet (30), an interlayer sheet (34), and a second outer sheet (40) which are formed of a material opaque to the soft X-rays. The first outer sheet has supply ports (32) for the ionized air formed therein; the interlayer sheet has an ionized air passage (38) formed therein, which includes ionized air inlet openings (36) that communicate with the supply ports; and the second outer sheet has a discharge port (42) formed therein, which communicates with the ionized air passage. The supply ports, the ionized air passage, and the discharge port communicate with each other to provide an ionized air transmission portion (44). The insulating layer insulates the soft X-ray shielding sheet and the container from each other.

A self-cleaning ion generator device includes a housing having a bottom portion and a top portion selectively secured to each other, the top portion contains a base portion extending to an outer edge and having an internal side and an external side, a first pair of opposed sidewalls and a second pair of opposed sidewalls extend from the outer edge of the base portion forming a cavity therein. Ion terminals extend from the housing, and a cleaning apparatus for cleaning the two ion terminals.

A self-cleaning ion generator device includes a housing having a bottom portion and a top portion selectively secured to each other, the top portion contains a base portion extending to an outer edge and having an internal side and an external side, a first pair of opposed sidewalls and a second pair of opposed sidewalls extend from the outer edge of the base portion forming a cavity therein. Ion terminals extend from the housing, and a cleaning apparatus for cleaning the two ion terminals.