According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is greater than an average electrical resistance of the first portion.

A substrate fixing device includes: a base plate; and an electrostatic chuck that is fixed to the base plate to adsorb a substrate by electrostatic force. The electrostatic chuck includes: an adsorption layer that is formed of ceramic and that contacts the substrate to adsorb and hold the substrate; a first heating layer that is formed on the adsorption layer and that includes a first electrode; a second heating layer that is formed on the first heating layer and that includes a second electrode; and a via that is provided between the first electrode and the second electrode to electrically connect the first electrode and the second electrode to each other. The via includes a body portion, and an end portion that is connected to the body portion. A diameter of the end portion is larger than that of the body portion.

An air purification apparatus and methods of air purification and treatment using ionization is disclosed. In some embodiments, an ion generator apparatus comprises a modular electrode and a housing connected to the modular electrode. The modular electrode includes an elongated conduit body comprising a power receiving end and a conduit connecting end opposite the power receiving end; and a plurality of ion generating elements occupying different radial positions around a perimeter of the conduit body, the ion generating elements generating negative ions or positive ions in response to an applied alternating current. A first electrical connector on the power receiving end is connectable to a second electrical connector on the conduit connecting end of another conduit body, such that a plurality of conduit bodies can be connected together in a series. The housing is connected to a power receiving end of one of the conduit bodies of the modular electrode.

An air purification apparatus and methods of air purification and treatment using ionization is disclosed. In some embodiments, an ion generator apparatus comprises a modular electrode and a housing connected to the modular electrode. The modular electrode includes an elongated conduit body comprising a power receiving end and a conduit connecting end opposite the power receiving end; and a plurality of ion generating elements occupying different radial positions around a perimeter of the conduit body, the ion generating elements generating negative ions or positive ions in response to an applied alternating current. A first electrical connector on the power receiving end is connectable to a second electrical connector on the conduit connecting end of another conduit body, such that a plurality of conduit bodies can be connected together in a series. The housing is connected to a power receiving end of one of the conduit bodies of the modular electrode.

A discharge device according to the present disclosure includes a discharge electrode and a voltage applicator that applies a voltage to the discharge electrode and thus causes discharge that is further developed from corona discharge at the discharge electrode. The discharge is discharge in which a discharge path is intermittently formed by dielectric breakdown so as to stretch from the discharge electrode to a surrounding. This discharge can be called leader discharge. This makes it possible to increase an amount of generated active component while keeping an increase of ozone small.

A discharge device according to the present disclosure includes a discharge electrode and a voltage applicator that applies a voltage to the discharge electrode and thus causes discharge that is further developed from corona discharge at the discharge electrode. The discharge is discharge in which a discharge path is intermittently formed by dielectric breakdown so as to stretch from the discharge electrode to a surrounding. This discharge can be called leader discharge. This makes it possible to increase an amount of generated active component while keeping an increase of ozone small.

Automatic emitter point cleaners are disclosed. An automatic emitter point cleaning system includes: a fan configured to direct a stream of air through an air path; a point emitter configured to produce at least one of positive ions or negative ions within or proximate to the air path; a brush; a first gear coupled to the brush and configured to move the brush into contact with the point emitter; a second gear to engage the first gear; and a motor to actuate the second gear such that the second gear actuates the first gear to move the brush past the point emitter.

Automatic emitter point cleaners are disclosed. An automatic emitter point cleaning system includes: a fan configured to direct a stream of air through an air path; a point emitter configured to produce at least one of positive ions or negative ions within or proximate to the air path; a brush; a first gear coupled to the brush and configured to move the brush into contact with the point emitter; a second gear to engage the first gear; and a motor to actuate the second gear such that the second gear actuates the first gear to move the brush past the point emitter.

A self-cleaning assembly for cleaning at least one electrode of an electronic air cleaner includes a mounting bracket removably connectable to the electronic air cleaner and a connecting member having at least one arm. The connecting member is rotatable about an axis. At least one cleaning body is arranged at a portion of the at least one arm.

The present invention provides methods and systems for a modular ion generator device that includes a bottom portion, two opposed side portions, a front end, a back end, and a top portion. A cavity is formed within the two opposed side portions, front end, back end, and top portion. At least one electrode is positioned within the cavity, and an engagement device is engaged to the front end and/or an engagement device engaged to the back end for allowing one or more modular ion generator devices to be selectively secured to one another.