In one example, an electrostatic chuck comprises a chuck body having a top surface configured to support a substrate and a bottom surface opposite the top surface. The chuck body comprises one or more chucking electrodes, and one or more heating elements. The chuck body further comprises first terminals disposed on the bottom surface of the chuck body and coupled with the one or more heating elements, second terminals disposed on the bottom surface of the chuck body and coupled with the one or more chucking electrodes, and third terminals disposed on the bottom first surface of the chuck body and coupled with the one or more chucking electrodes.

Exemplary support assemblies may include an electrostatic chuck body defining a support surface that defines a substrate seat. The assemblies may include a support stem coupled with the chuck body. The assemblies may include a heater embedded within the chuck body. The assemblies may include a first bipolar electrode embedded within the electrostatic chuck body between the heater and support surface. The assemblies may include a second bipolar electrode embedded within the chuck body between the heater and support surface. The assemblies may include at least one inner capacitive sensor embedded within the electrostatic chuck body at a position proximate a center of the substrate seat. The assemblies may include at least one outer capacitive sensor embedded within the electrostatic chuck body at a position proximate a peripheral edge of the substrate seat.

An ionized air delivery system, such as a vehicle ionized air delivery system, includes an outlet body that is situated within a duct of a heating, ventilation, and air conditioning (HVAC) system. The outlet body delivers ions to air flow in the duct of the HVAC system. The outlet body has an outer surface that is generally spherical at a region of the outer surface that confronts the air flow in the duct. Further, the outlet body has an outlet passage with a primary axis that is directed away from an exit of the duct of the HVAC system. Air flow in the duct passes across an exit opening of the outlet body and draws ions out of the outlet passage to mix with the air flow in the duct of the HVAC system.

An ionized air delivery system, such as a vehicle ionized air delivery system, includes an outlet body that is situated within a duct of a heating, ventilation, and air conditioning (HVAC) system. The outlet body delivers ions to air flow in the duct of the HVAC system. The outlet body has an outer surface that is generally spherical at a region of the outer surface that confronts the air flow in the duct. Further, the outlet body has an outlet passage with a primary axis that is directed away from an exit of the duct of the HVAC system. Air flow in the duct passes across an exit opening of the outlet body and draws ions out of the outlet passage to mix with the air flow in the duct of the HVAC system.

An ionizing device is described, comprising a tubular bulb made of electrically insulating or dielectric material extending along a longitudinal reference axis and having the two longitudinal open ends and opposite each other, a tubular cathode engaged in the bulb, a tubular anode fitted to the bulb, a pair of covers, each of which has a respective internal seat into which a respective end of the bulb is inserted so as to hermetically seal it, and a conductive electrode which extends into the bulb and is electrically connected to the cathode.

An electrostatic chuck heater includes a ceramic plate, an electrostatic electrode, first and second zone heater electrodes, and first and second zone gas grooves. The ceramic plate includes, on its surface, a wafer placement surface. The electrostatic electrode is embedded in the ceramic plate. The first and second zone heater electrodes are embedded in the ceramic plate, corresponding to respective multiple heater zones into which the wafer placement surface is divided, and allow electric power to be individually supplied to the heater zones. Zone gas grooves are provided corresponding to respective multiple gas supply zones into which the wafer placement surface is divided independently of the heater zones, and allow a gas to be individually supplied to the gas supply zones.

A Method for cleaning air in a room (1) with a ceiling (3) and a floor (5), comprising moving an ionization unit (13) above the floor (5) along a support structure provided at a distance to the floor (5); and electrically charging particles in the air by the ionization unit (13).

An adaptor for engagement to an air duct. The adaptor includes a back portion with an aperture within the back portion, a bellow adjacent the back portion with an opening positioned in a corresponding relationship with the aperture of the back portion, a top portion adjacent the bellow and spaced-apart from the back portion. A ring member is rotationally engaged to the back portion and disposed within the aperture of the back portion and the opening of the bellow. The ring member receives an ion generation device configured to engaged the ring member and containing a cleaning device for periodically cleaning a pair of electrodes.

An adaptor for engagement to an air duct. The adaptor includes a back portion with an aperture within the back portion, a bellow adjacent the back portion with an opening positioned in a corresponding relationship with the aperture of the back portion, a top portion adjacent the bellow and spaced-apart from the back portion. A ring member is rotationally engaged to the back portion and disposed within the aperture of the back portion and the opening of the bellow. The ring member receives an ion generation device configured to engaged the ring member and containing a cleaning device for periodically cleaning a pair of electrodes.

A system for a practice electrode (e.g. dart) for a conducted electrical weapon (“CEW”). An officer issued a CEW is required to practice with the CEW in order to maximize its safe and effective use in a stressful situation. Preferably, training is performed using equipment as similar as possible to the equipment an officer uses in the field. Training with a CEW against a live target may be improved, at least from the perspective of the target, by using a practice dart that is similar in weight and flight to a conventional electrode, but that does not pierce target clothing or tissue or deliver a high voltage current through the target. A practice dart may be similar to a conventional electrode but include additional structure (e.g. cap) that prevents piercing. The additional structure and/or a non-conductive filament may reduce a likelihood of or preclude delivery a current through the target.