An actuator has a flexible electrode that has flexibility and a base electrode of which an opposing surface facing the flexible electrode is covered with an insulation layer, and is configured such that, when a voltage is applied between flexible electrode and the base electrode, the flexible electrode deforms so as to approach the opposing surface. The actuator includes a restraining member that restrains the flexible electrode on the base electrode. The flexible electrode has a deforming portion that deforms when a voltage is applied between the electrodes. The deforming portion deforms in a direction of approaching the opposing surface, with the restraining member serving as a support point.

Examples include a device including a nanovoided polymer element having a first surface and a second surface, a first plurality of electrodes disposed on the first surface, a second plurality of electrodes disposed on the second surface, and a control circuit configured to apply an electrical potential between one or more of the first plurality of electrodes and one or more of the second plurality of electrodes to induce a physical deformation of the nanovoided polymer element.

The present invention is directed to providing an electrostatic actuator that can generate a large electrostatic force even if composed of a ribbon-shaped electrode film.

In an electrostatic actuator 10, 20 including a ribbon-shaped first electrode film 11 and a ribbon-shaped second electrode film 12, a plurality of first electrodes 1 formed of the first electrode film 11 and a plurality of second electrodes 2 formed of the second electrode film 12 are folded and laminated between one end 13 and the other end 14 of the electrostatic actuator 10, 20, and the plurality of first electrodes 1 include a pair of end electrodes 1a that are adjacent to each other in a direction in which the first electrode film 11 extends in a ribbon shape and are respectively positioned at the one end 13 and the other end 14 when laminated and at least one intermediate electrode 1b that is positioned between the end electrodes 1a when laminated.

A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one mechanical connection between said segments to provide structural integrity of the moving structure; and wherein the at least one mechanical connection electrically isolates at least two segments

A Static Electrostatic Generator (SEG) is disclosed which produces static charges at high voltage and low current. The SEG is capable of generating positive or negative charges on a metal sphere by reversing the polarity of a DC source. The conversion efficiency of the system is about 47% and its design is simple, lightweight, and easy to manufacture. The SEG is a static device and no mechanical movement is required to produce charges. Also, the design is easily scalable.

A Static Electrostatic Generator (SEG) is disclosed which produces static charges at high voltage and low current. The SEG is capable of generating positive or negative charges on a metal sphere by reversing the polarity of a DC source. The conversion efficiency of the system is about 47% and its design is simple, lightweight, and easy to manufacture. The SEG is a static device and no mechanical movement is required to produce charges. Also, the design is easily scalable.

A temporary MEMS-based locking assembly is configured to temporarily compress electrically conductive flexures and includes: a first locking structure coupled to a first portion of a MEMS conductive assembly; a second locking structure coupled to a second portion of the MEMS conductive assembly, wherein: the electrically conductive flexures are positioned between the first portion of the MEMS conductive assembly and the second portion of the MEMS conductive assembly, and the first and second locking structures are configured to engage each other upon the compression of the electrically conductive flexures to effectuate the locking of the first portion of the MEMS conductive assembly with respect to the second portion of the MEMS conductive assembly.

An actuator is configured to include a first substrate that has a first conductive surface, which may be or include a first conductive electrode layer. The actuator also includes a second substrate that has a second conductive surface, which may be or include a second conductive electrode layer. The first and second conductive surfaces face toward each other across a compression space between the first and second substrates. A group of elastic support nodules span the compression space and separate the first and second conductive surfaces. The compression space is less than fully filled with solid elastic material and is configured to be compressed by relative movement of the first and second conductive surfaces toward each other in response to a voltage difference between the first and second conductive surfaces.

The invention relates to a method of assembling mobile micro-machines comprising a main body and at least one actuating element, wherein the method comprises the steps of defining a 3D-shape of elements of the mobile micro-machines, the elements comprising components such as the main body and/or the at least one actuating element; fabricating said elements, said step of fabrication comprising at least the fabrication of the main body, the main body comprising one or more edges; and assembling said mobile micro-machines by applying an external electric field, wherein said external electric field forms electric field gradients at said one or more edges and wherein said gradients attract said actuating element so that the main body and the at least one actuating element self-assemble into a micro-machine at said one or more edges. The invention further relates to a mobile micro-machine.

An artificial muscle that includes a first end plate opposite a second end plate, a flexible enclosure extending from the first end plate to the second end plate and housing a dielectric fluid, and a reciprocating electrode stack housed within the flexible enclosure and coupled to and extending between the first end plate and the second end plate. The reciprocating electrode stack includes one or more electrode pairs, each electrode pair having a positive electrode and a negative electrode physically coupled to one another along a first edge portion of the positive electrode and the negative electrode. The artificial muscle also includes a plurality of electrode leads electrically coupled to the reciprocating electrode stack. Each individual electrode lead of the plurality of electrode leads extends from an individual electrode of the reciprocating electrode stack to the first end plate or the second end plate.