An actuator has a plurality of pairs of a flexible electrode having flexibility, and a base electrode having an opposed face that is opposed to the flexible electrode and is covered with an insulating layer. The flexible electrode is configured to deform to get closer to the opposed face when a voltage is applied to the flexible electrode and the base electrode. Each of the pairs is located on the same axis, and adjacent ones of the pairs are connected to each other. The axis intersects with the opposed face of the base electrode of each of the pairs. The base electrode of each of the pairs is divided into a plurality of electrode portions insulated from each other, and the voltage is individually applied to the electrode portions.

An actuator has a flexible electrode having flexibility, and a base electrode having an opposed face that is opposed to the flexible electrode and is covered with an insulating layer. The flexible electrode deforms to get closer to the opposed face when a voltage is applied to the flexible electrode and the base electrode. The flexible electrode is a rotating body placed on the opposed face. The base electrode is divided into a plurality of electrode portions insulated from each other. The electrode portions are arranged along a predetermined direction. The flexible electrode moves in the predetermined direction relative to the base electrode, while rotating on the opposed face, when the voltage is sequentially applied to the electrode portions in the predetermined direction.

A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.

A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.

A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator.

An optical device includes a support portion a movable unit and a pair of torsion bars disposed on both sides of the movable unit on a first axis. The movable unit includes a main body portion, a ring-shaped portion surrounding the main body portion when viewed from a predetermined direction perpendicular to the first axis, two connection portions connecting the main body portion and the ring-shaped portion to each other, and a rib portion provided to the main body portion. Each of the two connection portions includes two connection regions that are separated from each other by a space and the each of the two connection region connects the main body portion and the ring-shaped portion to each other. The rib portion includes four extending portions radially extending between a center of the main body portion and the four connection regions respectively when viewed from the predetermined direction.

A vibration energy harvester includes: a pair of electrodes provided so as to face opposite each other, with at least one of the pair of electrodes allowed to move; and an ion gel provided between the pair of electrodes, which is formed by using an ionic liquid, wherein: as an external vibration causes the electrode to move along a direction in which a distance between the pair of electrodes changes, power is generated through a change in an area of an electric double layer formed on two sides of an interface of each electrode and the ion gel.

An electrostatic actuator includes a base, a movable electrode including a semiconductor and supported to the base to be displaceable in a first direction, and a fixed electrode including the semiconductor and fixed to the base, in which the fixed electrode faces the movable electrode in a state of being separated therefrom in the first direction. The electrostatic actuator includes a high-resistance region formed in at least a portion of each of respective facing surfaces of the movable electrode and the fixed electrode, and lower in impurity concentration than a surrounding region thereof.

An electrostatic actuator includes a base, a movable electrode including a semiconductor and supported to the base to be displaceable in a first direction, and a fixed electrode including the semiconductor and fixed to the base, in which the fixed electrode faces the movable electrode in a state of being separated therefrom in the first direction. The electrostatic actuator includes a high-resistance region formed in at least a portion of each of respective facing surfaces of the movable electrode and the fixed electrode, and lower in impurity concentration than a surrounding region thereof.

The present disclosure relates to a system and method that produces thrust without a propellant or any physically moving parts. The disclosed method produces thrust by accelerating electrons between a multilayer capacitive stack and taking advantage of a conductive dampener that makes up a single thrust unit. For example, as power is applied to a first conductive layer separated by a second conductive layer by at least one dielectric layer, the electrons accelerating from the first layer produce a thrust whose direction is determined by the presence of a cover layer. Multiple middle conductive layers with corresponding dielectric layers can provide thrust scalability. Stacked thrust units with a minimum of a calculated distance between said units can also scale the thrust observed. Specialty materials with built in dielectrics such as anodized aluminum can further improve the thrust unit.