Disclosed herein are systems and methods related to a handling system used to move a semiconductor substrate within a process chamber during treatment. The handling system moves the substrate back-and-forth between two locations in an arc-like motion around a pivot point, while simultaneously rotating the substrate around its own center point.

A transport system includes: a mover having a first magnet group arranged in parallel to a first direction and a second magnet group arranged in parallel to a second direction crossing the first direction; and a plurality of coils arranged in parallel to the first direction so as to be able to face the first magnet group and the second magnet group, and the mover is able to move in the first direction along the plurality of coils by electromagnetic force received by the first magnetic group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils.

A transport system includes: a mover having a first magnet group arranged in parallel to a first direction and a second magnet group arranged in parallel to a second direction crossing the first direction; and a plurality of coils arranged in parallel to the first direction so as to be able to face the first magnet group and the second magnet group, and the mover is able to move in the first direction along the plurality of coils by electromagnetic force received by the first magnetic group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils.

Apparatus and associated methods relate to a pick & place system that uses a magnetic core for both magnetic coupling with an assembly component and heating of the assembly component. The magnetic core has a component engagement surface configured to magnetically and thermally engage the component. A controller is configured to provide both AC current and DC current to an inductive coil wound about the magnetic core. DC current provided to the inductive coil induces a magnetic field within the magnetic core, thereby magnetically attracting the component when engaged with the component engagement surface. AC current provided to the magnetic core inductively heats the magnetic core, thereby heating the component when engaged with the component engagement surface.

Apparatus and associated methods relate to a pick & place system that uses a magnetic core for both magnetic coupling with an assembly component and heating of the assembly component. The magnetic core has a component engagement surface configured to magnetically and thermally engage the component. A controller is configured to provide both AC current and DC current to an inductive coil wound about the magnetic core. DC current provided to the inductive coil induces a magnetic field within the magnetic core, thereby magnetically attracting the component when engaged with the component engagement surface. AC current provided to the magnetic core inductively heats the magnetic core, thereby heating the component when engaged with the component engagement surface.

The disclose provides a magnetic levitation gravity compensation device, including: a first magnetic steel, which is cylindrical; a second magnetic steel, which is cylindrical, arranged in the first magnetic steel and radially spaced from the first magnetic steel; and at least one end magnetic steel, which is cylindrical, and is located on at least one of two axial ends of the second magnetic steel and axially spaced from the two axial ends of the second magnetic steel, a center line of the end magnetic steel is configured to coincide with a center line of the second magnetic steel, and a cylinder wall thickness of the end magnetic steel is smaller than that of the second magnetic steel, wherein a magnetization direction of the first magnetic steel is a radial direction, and a magnetization direction of the second magnetic steel and the end magnetic steel is an axial direction.

The disclose provides a magnetic levitation gravity compensation device, including: a first magnetic steel, which is cylindrical; a second magnetic steel, which is cylindrical, arranged in the first magnetic steel and radially spaced from the first magnetic steel; and at least one end magnetic steel, which is cylindrical, and is located on at least one of two axial ends of the second magnetic steel and axially spaced from the two axial ends of the second magnetic steel, a center line of the end magnetic steel is configured to coincide with a center line of the second magnetic steel, and a cylinder wall thickness of the end magnetic steel is smaller than that of the second magnetic steel, wherein a magnetization direction of the first magnetic steel is a radial direction, and a magnetization direction of the second magnetic steel and the end magnetic steel is an axial direction.

Systems and methods of threading a metal substrate on a rolling mill include receiving a coil of the metal substrate. The method also includes uncoiling the metal substrate from the coil while the coil and guiding the metal substrate to a work stand of the rolling mill with a threading system.

A magnetic field propulsion unit includes a magnetic field generating device with multiple conductive lines conduct a current to generate a magnetic field; a contact breaker arrangement individually transitions each of the multiple conductive lines from a conductive state to a non-conductive state; an energy supply unit provides the magnetic field generating device with electrical energy; and a control unit controls the energy supply unit so that energy supply to each individual conductive line is controlled and control the contact breaker arrangement. The multiple conductive lines are arranged along a longitudinal axis. The control unit supplies a first conductive line with electrical energy so that a first magnetic field surrounding the first conductive line is generated, transitions the first conductive line to a non-conductive state, and supplies a second conductive line with electrical energy so that a second magnetic field is generated.

A magnetic field propulsion unit includes a magnetic field generating device with multiple conductive lines conduct a current to generate a magnetic field; a contact breaker arrangement individually transitions each of the multiple conductive lines from a conductive state to a non-conductive state; an energy supply unit provides the magnetic field generating device with electrical energy; and a control unit controls the energy supply unit so that energy supply to each individual conductive line is controlled and control the contact breaker arrangement. The multiple conductive lines are arranged along a longitudinal axis. The control unit supplies a first conductive line with electrical energy so that a first magnetic field surrounding the first conductive line is generated, transitions the first conductive line to a non-conductive state, and supplies a second conductive line with electrical energy so that a second magnetic field is generated.