An optical heart rate earphone includes a front housing, a circuit board assembly, a rear housing assembled to a rear end of the front housing, and a light pipe. The front housing has a sound tube. At least one portion of the sound tube forms at least one light transmission gap. The circuit board assembly includes a circuit board and at least one optical sensor. The at least one optical sensor is corresponding to the at least one light transmission gap. The light pipe has a circular base. At least one portion of a periphery of the base protrudes rearward to form at least one transmittance slice. The light pipe is assembled to the sound tube. The at least one transmittance slice is wedged in the at least one light transmission gap.

A system and method for using a microscope to at least haptically observe a specimen in a fluid is provided. In one embodiment of the present invention, an audio frequency modulation sensing (AFMS) device is used to convert an optical signal from the specimen into an electrical signal. A haptic feedback device is then used to convert the electrical signal in at least vibrations, thereby providing a user with haptic feedback associated with the optical signal from the specimen. In another embodiment, a second electrical signal can be provided to a second haptic feedback (e.g., shaker, piezo electric, electric current inducing, etc.) device in the fluid, thereby allowing for bidirectional haptic feedback between the user and the specimen. In other embodiments, aural data can be extracted from the electrical signal and presented to the user either alone in in synchronization with video data (e.g., from a video camera).

In one aspect, the present invention provides nano-scale heaters, such as nano-scale thermoacoustic loudspeakers comprising suspended metal nanobridges prepared using atomic layer deposition (ALD). The loudspeakers of the invention are capable of producing audible sound when stimulated with an electrical current or other energetic stimulus. In another aspect, the present invention provides methods of preparing and using such nanodevices.

Systems and apparatuses for a MEMS device. The MEMS device includes a diaphragm and a backplate spaced a distance from the diaphragm forming an air gap therebetween. The backplate includes a first surface facing toward the diaphragm and an opposing second surface facing away from the diaphragm. The first surface and the opposing second surface of the backplate cooperatively define a plurality of through-holes that extend through the backplate allowing air from the air gap to flow therethrough. Each of the plurality of through-holes include a first aperture disposed along the first surface, a second aperture disposed along the opposing second surface, and a sidewall extending between the first surface and the opposing second surface. The first aperture and the second aperture have different dimensions.

Systems and apparatuses for a MEMS device. The MEMS device includes a diaphragm and a backplate spaced a distance from the diaphragm forming an air gap therebetween. The backplate includes a first surface facing toward the diaphragm and an opposing second surface facing away from the diaphragm. The first surface and the opposing second surface of the backplate cooperatively define a plurality of through-holes that extend through the backplate allowing air from the air gap to flow therethrough. Each of the plurality of through-holes include a first aperture disposed along the first surface, a second aperture disposed along the opposing second surface, and a sidewall extending between the first surface and the opposing second surface. The first aperture and the second aperture have different dimensions.

A thermoacoustic device includes a substrate, a first electrode and a second electrode, at least two supporting members, and a first carbon nanotube film. The substrate includes a surface. The first electrode and the second electrode are located on the surface of the substrate and spaced from each other. The at least two supporting members are spaced from each other and respectively located on surfaces of the first electrode and the second electrode. The at least two supporting members include a plurality of carbon nanotubes parallel with each other and substantially perpendicular to the surface of the substrate. The first carbon nanotube film is supported by the at least two supporting members and has a portion between the at least two supporting members suspended above the substrate. The supporting members electrically connect the first carbon nanotube film with the first electrode and the second electrode.

This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor, multi-axis gyroscope or accelerometer. The sensor uses a variety of different Field Effect Transistor technologies (horizontal, vertical, Si nanowire, CNT, SiC and III-V semiconductors) in conjunction with MEMS based structures such as cantilevers, membranes and proof masses integrated into silicon substrates. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electronic design.

A MEMS device for use in some embodiments in a microphone or pressure sensor and method of making the same wherein a portion of the package surrounding the acoustic port is deformed either away from, towards, or both away from and towards the interior of the package. By providing this raised area proximate the acoustic port, external debris is less likely to enter the acoustic port and damage the fragile MEMS die. Further, internal attachment material holding the MEMS die to the inside of the package is prevented by flowing into and obscuring the acoustic port. The advantages of this design include longer operation lifetimes for the MEMS device, greater design freedom, and increases in production yield.

According to an embodiment, an optical MEMS transducer includes a diffraction structure including alternating first reflective elements and openings arranged in a first plane, a reflection structure including second reflective elements and configured to deflect with respect to the diffraction structure, and an optical element configured to direct a first optical signal at the diffraction structure and the reflection structure and to receive a second optical signal from the diffraction structure and the reflection structure. The second reflective elements are arranged in the first plane when the reflection structure is at rest. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.

According to an embodiment, an optical MEMS transducer includes a diffraction structure including alternating first reflective elements and openings arranged in a first plane, a reflection structure including second reflective elements and configured to deflect with respect to the diffraction structure, and an optical element configured to direct a first optical signal at the diffraction structure and the reflection structure and to receive a second optical signal from the diffraction structure and the reflection structure. The second reflective elements are arranged in the first plane when the reflection structure is at rest. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.