A semiconductor memory device may be formed by a method of fabricating the same. The method may include forming a buffer insulating layer on a semiconductor substrate including active portions, forming bit line structures on the buffer insulating layer, forming bit line spacers on side surfaces of each of the bit line structures, patterning the buffer insulating layer to form gap regions extending in a first direction, the gap regions formed between the bit line structures and exposing portions of the active portions, forming a protection oxide layer to cover the portions of the active portions exposed through the gap regions, forming a mold layer to fill the gap regions, in which the protection oxide layer is formed, forming mold patterns respectively in each of the gap regions to be spaced apart from each other, forming fence patterns in each of the gap regions and between the mold patterns, removing the mold patterns to form contact regions exposing the protection oxide layer, removing the protection oxide layer, and forming buried contact patterns in the contact regions to contact the portions of the active portions.

A semiconductor device may include a word line stack over a substrate; a plurality of supporters including vertically extending blocking spacers to support the word line stack; and storage nodes of a capacitor disposed laterally between the supporters.

A method for fabricating a semiconductor device includes: forming a stack body by alternately stacking a plurality of semiconductor layers and a plurality of sacrificial semiconductor layers over a lower structure; forming an opening by etching the stack body; forming a plurality of active layers and a plurality of lateral recesses by etching the semiconductor layers and the sacrificial semiconductor layers through the opening; forming sacrificial dielectric layers partially filling the lateral recesses and contacting the active layers; and replacing the sacrificial dielectric layers with word lines.

A semiconductor device includes a substrate, a passing word line in the substrate, and a dielectric structure surrounding the passing word line. The dielectric structure has an enlargement portion at a bottom of the dielectric structure, and a maximum width of the enlargement portion of the dielectric structure is wider than a width of a top of the dielectric structure.

A semiconductor memory structure includes a semiconductor substrate, a bit line disposed on the semiconductor substrate, a dielectric liner disposed on a sidewall of the bit line and a capacitor contact disposed on a side of the bit line. The dielectric liner includes a first nitride liner disposed on a sidewall of the bit line, an oxide liner disposed on a sidewall of the first nitride liner, and a second nitride liner disposed on a sidewall of the oxide liner. The capacitor contact includes a semiconductor plug disposed on the semiconductor substrate, a metal plug disposed on the semiconductor plug, a metal silicide liner including a sidewall portion and a bottom portion extending along the sidewall and the bottom of the metal plug respectively, and a nitride layer disposed on the metal silicide liner. The sidewall portion is disposed directly above the second nitride liner.

A semiconductor memory structure includes a semiconductor substrate, a bit line disposed on the semiconductor substrate, a dielectric liner disposed on a sidewall of the bit line and a capacitor contact disposed on a side of the bit line. The dielectric liner includes a first nitride liner disposed on a sidewall of the bit line, an oxide liner disposed on a sidewall of the first nitride liner, and a second nitride liner disposed on a sidewall of the oxide liner. The capacitor contact includes a semiconductor plug disposed on the semiconductor substrate, a metal plug disposed on the semiconductor plug, a metal silicide liner including a sidewall portion and a bottom portion extending along the sidewall and the bottom of the metal plug respectively, and a nitride layer disposed on the metal silicide liner. The sidewall portion is disposed directly above the second nitride liner.

A manufacturing method of a semiconductor device includes forming an opening in a substrate, implanting a dopant in the substrate from a sidewall of the opening such that a doping region is formed in the substrate at the sidewall of the opening, filling a dielectric material in the opening to form a first dielectric structure after implanting the dopant in the substrate from the sidewall of the opening, and forming a passing word line in the dielectric structure.

A semiconductor device includes a vertical stack of ring-shaped electrodes that are electrically connected together into a top electrode of a capacitor, on a semiconductor substrate. A bottom electrode of the capacitor is also provided, which extends vertically in a direction orthogonal to a surface of the substrate and through centers of the vertical stack of ring-shaped electrodes. An electrically insulating bottom supporting pattern is provided, which extends between a lowermost one of the ring-shaped electrodes and an intermediate one of the ring-shaped electrodes.

Embodiments of the present disclosure relate to a semiconductor structure and a manufacturing method thereof, a data storage device and a data read-write device. The semiconductor structure includes: a substrate, a plurality of active regions separated from each other being formed in the substrate; a trench, located in the active region; a first gate structure, located in the trench, and configured to be applied with a first applied voltage; a second gate structure, located in the trench, and located above the first gate structure, and configured to be applied with a second applied voltage, the second applied voltage being greater than the first applied voltage; and an insulating isolation layer, located in the trench, and located between the first gate structure and the second gate structure.

A semiconductor device includes bottom electrodes on a substrate. A supporting pattern is disposed between the bottom electrodes in a plan view. A top electrode covers the bottom electrodes and the supporting pattern. A dielectric layer is disposed between the bottom electrodes and the top electrode and between the supporting pattern and the top electrode. A capping pattern is interposed between the bottom electrodes and the dielectric layer and between the supporting pattern and the dielectric layer. The capping pattern covers at least a portion of a side surface of the supporting pattern and extends to cover a top surface of the supporting pattern and top surfaces of the bottom electrodes.