The embodiments of the present application belong to the technical field of semiconductor manufacturing, and relate to a semiconductor structure manufacturing method and a semiconductor structure. The semiconductor structure manufacturing method includes: the substrate is provided with a plurality of active area structures and a plurality of first hole structures arranged at intervals, first bonding pad structures are formed in the first hole structures, and the first bonding pad structures are electrically connected to the active area structures; and second bonding pad structures are formed on the first bonding pad structures, and the second bonding pad structures are connected to the first bonding pad structures, and connected to a capacitor structure.

The present application provides a memory and a manufacturing method thereof, and relates to the field of semiconductor technologies. The memory includes a substrate, the substrate is provided with a control region, and two sides of the control region are respectively provided with storage regions; each of the storage regions includes multiple rows of first active regions, and all the first contact regions in each row of the first active regions are connected by a bit line; the control region includes multiple second active regions, each of the second active regions is provided with a first gate and a first source/drain region and a second source/drain region that are located on two sides of the first gate, and all the first gates in the control region are connected with each other to form a control line; the first source/drain region and the second source/drain region in a same second active region are respectively connected with a corresponding bit line. The memory in the present application controls, through control lines, whether the bit line connected with the first source/drain region and the bit line connected with the second source/drain region are connected, so as to control the time of each read operation and write operation. In this way, the storage speed of the memory is increased and the performance of the memory is improved.

The present application provides a manufacturing method of a semiconductor structure, and relates to the technical field of semiconductors. The manufacturing method includes: providing a substrate; and forming multiple spaced first isolation sidewall structures on the substrate, where first opening regions are formed between adjacent first isolation sidewall structures, and each of the first opening regions is used to expose at least two columns of active regions.

The present disclosure provides a method for manufacturing a semiconductor device and a semiconductor device. The method for manufacturing a semiconductor device includes: providing a substrate; forming a plurality of first structures extending in a first direction on the substrate; forming a sacrificial layer on sidewalls of the first structures; forming an outer spacer layer on a sidewall of the sacrificial layer; removing part of the outer spacer layer to obtain a patterned outer spacer layer that exposes part of the sacrificial layer; and removing the sacrificial layer to form air gaps between the patterned outer spacer layer and the first structures.

Since power source voltages are different depending on circuits used for devices, a circuit for outputting at least two or more power sources is additionally prepared. An object is to unify outputs of the power source voltages. A transistor using an oxide semiconductor is provided in such a manner that electrical charge is retained in a node where the transistor and a capacitor are electrically connected to each other, a reset signal is applied to a gate of the transistor to switch the states of the transistor from off to on, and the node is reset when the transistor is on. A circuit configuration that generates and utilizes a potential higher than or equal to a potential of a single power source can be achieved.

A semiconductor device with a small variation in characteristics is provided. The semiconductor device includes a first insulator, a transistor over the first insulator, a second insulator over the transistor, a third insulator over the second insulator, a fourth insulator over the third insulator, and an opening region. The opening region includes the second insulator, the third insulator over the second insulator, and the fourth insulator over the third insulator. The third insulator includes an opening reaching the second insulator. The fourth insulator is in contact with a top surface of the second insulator inside the opening.

Techniques for fabricating semiconductor structures and devices with stacked structures having embedded capacitors are disclosed. In one example, a semiconductor structure includes a substrate having a first region and a second region. The semiconductor structure further includes a capacitor structure disposed in the second region of the substrate. The capacitor structure includes a capacitor conductor and a dielectric insulator disposed between the capacitor conductor and the substrate. The semiconductor structure further includes a stacked device disposed on the first region of the substrate. The stacked device includes a first transistor and a second transistor. At least a portion of the second transistor is disposed under at least a portion of the first transistor. The first transistor and the second transistor are each coupled to the capacitor conductor.

Embodiments of the present application relate to the field of semiconductor manufacturing technologies, in particular to a semiconductor structure and a mask plate structure. The semiconductor structure includes a substrate, where the substrate is provided therein with active areas and a plurality of bit line structures arranged at intervals in parallel in the substrate. A plurality of word line structures are arranged at intervals in parallel in the substrate. The word line structures and the bit line structures intersect to define a plurality of grids arranged in an array on the substrate. Capacitor plugs are located in the grids. Projection of each of the capacitor plugs on the substrate covers a part of one of the active areas. Cross sections of the capacitor plugs are arcuate in a cross section parallel to a surface of the substrate.

A semiconductor device and a method of fabricating a semiconductor device, the device including a substrate; a first conductive pattern on the substrate; a second conductive pattern on the substrate and spaced apart from the first conductive pattern; an air spacer between the first conductive pattern and the second conductive pattern; and a quantum dot pattern covering an upper part of the air spacer.

A semiconductor device includes a substrate having at least a trench formed therein. A conductive material fills a lower portion of the trench. A barrier layer is between the conductive material and the substrate. An insulating layer is in the trench and completely covers the conductive material and the barrier layer, wherein a portion of the insulating layer covering the barrier layer has a bird's peak profile.