H10B51/00

Semiconductor device with ferroelectricity
11532641 · 2022-12-20 · ·

A semiconductor device includes: a stack structure including conductive patterns and insulating layers, which are alternately stacked; a channel structure penetrating the stack structure; and a memory layer penetrating the stack structure, the memory layer being disposed between the channel structure and the stack structure. The memory layer includes memory parts and dummy parts, which are alternately arranged. Each of the memory parts includes a first part between the insulating layers and a second part between the dummy parts. The first part of the memory parts have ferroelectricity.

Ferroelectric memory device and method of forming the same

A ferroelectric memory device includes a multi-layer stack, a channel layer and a III-V based ferroelectric layer. The multi-layer stack is disposed on a substrate and includes a plurality of conductive layers and a plurality of dielectric layers stacked alternately. The channel layer penetrates through the plurality of conductive layers and the plurality of dielectric layers of the multi-layer stack. The III-V based ferroelectric layer is disposed between the channel layer and the multi-layer stack, and includes at least one element selected from Group III elements, at least one element selected from Group V elements, and at least one element selected from transition metal elements.

THREE-DIMENSIONAL MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

A memory device includes a first stacking structure, a second stacking structure, a plurality of first isolation structures, gate dielectric layers, channel layers and conductive pillars. The first stacking structure includes a plurality of first gate layers, and a second stacking structure includes a plurality of second gate layers, where the first stacking structure and the second stacking structure are located on a substrate and separated from each other through a trench. The first isolation structures are located in the trench, where a plurality of cell regions are respectively confined between two adjacent first isolation structures of the first isolation structures in the trench, where the first isolation structures each includes a first main layer and a first liner surrounding the first main layer, where the first liner separates the first main layer from the first stacking structure and the second stacking structure. The gate dielectric layers are respectively located in one of the cell regions, and cover opposing sidewalls of the first stacking structure and the second stacking structure as well as opposing sidewalls of the first isolation structures. The channel layers respectively cover an inner surface of one of the gate dielectric layers. The conductive pillars stand on the substrate within the cell regions, and are laterally surrounded by the channel layers, where at least two of the conductive pillars are located in each of the cell regions, and the at least two conductive pillars in each of the cell regions are laterally separated from one another.

Ferroelectric semiconductor device and method of manufacturing the same
11515419 · 2022-11-29 · ·

A ferroelectric semiconductor device of the present disclosure includes a substrate having a channel structure, a trench pattern having a bottom surface and a sidewall surface in the channel structure, a dielectric layer disposed on the bottom surface and the sidewall surface of the trench pattern, and a gate electrode layer disposed on the dielectric layer. The dielectric layer includes a ferroelectric layer pattern and a non-ferroelectric layer pattern that are disposed along the sidewall surface of the trench pattern.

Transistors, memory cells and semiconductor constructions

Some embodiments include a semiconductor construction having a gate extending into a semiconductor base. Conductively-doped source and drain regions are within the base adjacent the gate. A gate dielectric has a first segment between the source region and the gate, a second segment between the drain region and the gate, and a third segment between the first and second segments. At least a portion of the gate dielectric comprises ferroelectric material. In some embodiments the ferroelectric material is within each of the first, second and third segments. In some embodiments, the ferroelectric material is within the first segment or the third segment. In some embodiments, a transistor has a gate, a source region and a drain region; and has a channel region between the source and drain regions. The transistor has a gate dielectric which contains ferroelectric material between the source region and the gate.

SEMICONDUCTOR MEMORY DEVICES AND METHODS OF MANUFACTURING THEREOF

A semiconductor device comprises a source and a pair of drains disposed on either side of the source in a first direction and spaced apart therefrom. A channel layer extending in the first direction is disposed on at least one radially outer surface of the source and the pair of drains in a second direction perpendicular to the first direction. A memory layer extending in the first direction is disposed on a radially outer surface of the channel layer in the second direction. At least one gate layer that extends in the first direction, is disposed on a radially outer surface of the memory layer in the second direction. A gate extension structure extends from the each of the drains at least part way towards the source in the first direction, and is located proximate to, and in contact with each of the channel layer and the corresponding drain.

Ferroelectric gate oxide based tunnel feFET memory

A transistor is disclosed. The transistor includes a p-type region, an intrinsic region coupled to the p-type region, an n-type region coupled to the intrinsic region, and a gate electrode above the intrinsic region. The ferroelectric material is on a bottom, a first side and a second side of the gate electrode, and above the intrinsic region.

Semiconductor device of three-dimensional structure including ferroelectric layer
11488979 · 2022-11-01 · ·

A semiconductor device according to an embodiment includes a substrate, and a gate structure disposed over the substrate. The gate structure includes a hole pattern including a central axis extending in a direction perpendicular to a surface of the substrate. The gate structure includes a gate electrode layer and an interlayer insulation layer, which are alternately stacked along the central axis. The semiconductor device includes a ferroelectric layer disposed adjacent to a sidewall surface of the gate electrode layer inside the hole pattern, and a channel layer disposed adjacent to the ferroelectric layer inside the hole pattern. In this case, one of the gate electrode layer and the interlayer insulation layer protrudes toward the central axis of the hole pattern relative to the other one of the gate electrode layer and the interlayer insulation layer.

METHOD FOR FORMING SEMICONDUCTOR MEMORY STRUCTURE
20230083447 · 2023-03-16 ·

A method for forming a semiconductor memory structure includes following operations. A plurality of doped regions are formed in a semiconductor substrate. The doped regions are separated from each other. A stack including a plurality of first insulating layers and a plurality of second insulating layers alternately arranged is formed over the semiconductor substrate. A first trench is formed in the stack. The second insulating layers are replaced with a plurality of conductive layers. A second trench is formed. A charge-trapping layer and a channel layer are formed in the second trench. An isolation structure is formed to fill the second trench. A source structure and a drain structure are formed at two sides of the isolation structure.

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SEMICONDUCTOR DEVICE
20230074522 · 2023-03-09 · ·

A semiconductor device includes: a stack structure including conductive patterns and insulating layers, which are alternately stacked; a channel structure penetrating the stack structure; and a memory layer penetrating the stack structure, the memory layer being disposed between the channel structure and the stack structure. The memory layer includes memory parts and dummy parts, which are alternately arranged. Each of the memory parts includes a first part between the insulating layers and a second part between the dummy parts. The first part of the memory parts have ferroelectricity.