Patent classifications
H10B61/00
Semiconductor devices including spin-orbit torque line and contact plug
A semiconductor device includes first and second contact plugs in an insulating layer that is on a substrate, the first and second contact plugs spaced apart from each other. A spin-orbit torque (SOT) line on the insulating layer and overlapping the first and second contact plug is provided. A magnetic tunnel junction (MTJ) is on the SOT line. An upper electrode is on the MTJ. Each of the first and second contact plugs includes a recess region adjacent the SOT line. A sidewall of the recess region is substantially coplanar with a side surface of the SOT line and a side surface of the MTJ.
BiSbX (012) layers having increased operating temperatures for SOT and MRAM devices
The present disclosure generally relate to spin-orbit torque (SOT) magnetic tunnel junction (MTJ) devices comprising a topological insulator (TI) modulation layer. The TI modulation layer comprises a plurality of bismuth or bismuth-rich composition modulation layers, a plurality of TI lamellae layers comprising BiSb having a (012) crystal orientation, and a plurality of texturing layers. The TI lamellae layers comprise dopants or clusters of atoms, the clusters of atoms comprising a carbide, a nitride, an oxide, or a composite ceramic material. The clusters of atoms are configured to have a grain boundary glass forming temperature of less than about 400° C. Doping the TI lamellae layers comprising BiSb having a (012) crystal orientation with clusters of atoms comprising a carbide, a nitride, an oxide, or a composite ceramic material enable the SOT MTJ device to operate at higher temperatures while inhibiting migration of Sb from the BiSb of the TI lamellae layers.
Storage element
A storage element is provided. The storage element includes a memory layer; a fixed magnetization layer; an intermediate layer including a non-magnetic material; wherein the intermediate layer is provided between the memory layer and the fixed magnetization layer; wherein the fixed magnetization layer includes at least a first magnetic layer, a second magnetic layer, and a non-magnetic layer, and wherein the first magnetic layer includes a CoFeB composition. A memory apparatus and a magnetic head are also provided.
In-situ annealing and etch back steps to improve exchange stiffness in cobalt iron boride based perpendicular magnetic anisotropy free layers
A method for forming a memory device that includes providing a free layer of an alloy of cobalt (Co), iron (Fe) and boron (B) overlying a reference layer; and forming metal layer comprising a boron (B) sink composition atop the free layer. Boron (B) may be diffused from the free layer to the metal layer comprising the boron sink composition. At least a portion of the metal layer including the boron (B) sink composition is removed. A metal oxide is formed atop the free layer. The free layer may be a crystalline cobalt and iron alloy. An interface between the metal oxide and free layer can provide perpendicular magnetic anisotropy character.
Semiconductor storage device
A semiconductor storage device includes a memory cell including a switching element and a variable resistance element, and a circuit for switching the memory cell ON, performing a first read operation on the memory cell, generating a first voltage based on the first read operation, switching the memory cell ON after first data is written to the memory cell, performing a second read operation while the memory cell is maintained to be ON when the first data is stored in the memory cell during the first read operation, performing the second read operation after the memory cell transitions from ON to OFF at least once when second data is stored in the memory cell during the first read operation, generating a second voltage based on the second read operation, and determining the data stored in the memory cell during the first read operation based on the first and second voltages.
DOPED SIDEWALL SPACER/ETCH STOP LAYER FOR MEMORY
Various embodiments of the present disclosure are directed towards an integrated circuit (IC) chip comprising a memory cell with a sidewall spacer, and/or an etch stop layer, doped to reduce charge accumulation at an interface between the sidewall spacer and the etch stop layer. The memory cell comprises a bottom electrode, a data storage element overlying the bottom electrode, and a top electrode overlying the data storage element. The sidewall spacer overlies the bottom electrode on a common sidewall formed by the data storage element and the top electrode, and the etch stop layer lines the sidewall spacer. The sidewall spacer and the etch stop layer directly contact at the interface and form an electric dipole at the interface. The doping to reduce charge accumulation reduces an electric field produced by the electric dipole, thereby reducing the effect of the electric field on the memory cell.
MAGNETORESISTANCE RANDOM ACCESS MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
A method for fabricating a magnetic random access memory (MRAM) device includes the steps of first forming a first magnetic tunneling junction (MTJ) on a substrate, forming a first top electrode on the first MTJ, and then forming a passivation layer around the first MTJ. Preferably, the passivation layer includes a V-shape and a valley point of the V-shape is higher than a top surface of the first top electrode.
VOLTAGE-CONTROLLED MAGNETIC ANISOTROPY MEMORY DEVICE INCLUDING AN ANISOTROPY-ENHANCING DUST LAYER AND METHODS FOR FORMING THE SAME
A magnetoelectric memory device includes a magnetic tunnel junction located between a first electrode and a second electrode. The magnetic tunnel junction includes a reference layer, a nonmagnetic tunnel barrier layer, a free layer, and a dielectric capping layer. At least one layer that provides voltage-controlled magnetic anisotropy is provided within the magnetic tunnel junction, which may include a pair of nonmagnetic metal dust layers located on, or within, the free layer, or a two-dimensional metal compound layer including a compound of a nonmagnetic metallic element and a nonmetallic element.
VOLTAGE-CONTROLLED MAGNETIC ANISOTROPY MEMORY DEVICE INCLUDING AN ANISOTROPY-ENHANCING DUST LAYER AND METHODS FOR FORMING THE SAME
A magnetoelectric memory device includes a magnetic tunnel junction located between a first electrode and a second electrode. The magnetic tunnel junction includes a reference layer, a nonmagnetic tunnel barrier layer, a free layer, and a dielectric capping layer. At least one layer that provides voltage-controlled magnetic anisotropy is provided within the magnetic tunnel junction, which may include a pair of nonmagnetic metal dust layers located on, or within, the free layer, or a two-dimensional metal compound layer including a compound of a nonmagnetic metallic element and a nonmetallic element.
MAGNETIC TUNNEL JUNCTION DEVICE WITH AIR GAP
A semiconductor device including a magnetic tunnel junction stack, a metallic hard mask aligned above the magnetic tunnel junction stack and an air gap surrounding the metallic hard mask. A method including forming a magnetic tunnel junction stack, forming a metallic hard mask aligned above the magnetic tunnel junction stack, conformally forming a dielectric over the metallic hard mask and the magnetic tunnel junction stack, forming barrier on vertical side surfaces of the dielectric, and removing the dielectric between the metallic hard mask and the barrier. A method including forming a magnetic tunnel junction stack, forming a metallic hard mask aligned above the magnetic tunnel junction stack, conformally forming a dielectric over the metallic hard mask and the magnetic tunnel junction stack, selectively removing a portion of the dielectric surrounding the metallic hard mark.