The present disclosure relates to high pressure processing apparatus for semiconductor processing. The apparatus described herein include a high pressure process chamber and a containment chamber surrounding the process chamber. A steam delivery module is in fluid communication with the high pressure process chamber and is configured to deliver steam to the process chamber. The steam delivery module includes a boiler and a steam reservoir.

The present disclosure relates to high pressure processing apparatus for semiconductor processing. The apparatus described herein include a high pressure process chamber and a containment chamber surrounding the process chamber. A steam delivery module is in fluid communication with the high pressure process chamber and is configured to deliver steam to the process chamber. The steam delivery module includes a boiler and a steam reservoir.

An improved efficiency method and device for converting thermal energy into mechanical energy, and then, preferably, into electricity and/or refrigerating energy. A partially liquid stream f.sup.c0 of fluid FC is implemented; thermal energy is transferred to the stream f.sup.c0; the heated stream f.sup.c0 is sprayed to generate a fragmented stream f.sup.c1 of fluid FC. Simultaneously a partially liquid stream f.sup.t0 of fluid FT is implemented; thermal energy is transferred to the stream f.sup.t0 to generate a stream f.sup.t that may be in liquid form or a saturated liquid/vapor mixture; stream f.sup.1 is expanded in a chamber which also receives fragmented stream f.sup.c1 to form a two-phase mixed stream f.sup.c1/t whose kinetic energy is converted into mechanical energy which is optionally transformed into electrical energy or into refrigerating energy.

An improved efficiency method and device for converting thermal energy into mechanical energy, and then, preferably, into electricity and/or refrigerating energy. A partially liquid stream f.sup.c0 of fluid FC is implemented; thermal energy is transferred to the stream f.sup.c0; the heated stream f.sup.c0 is sprayed to generate a fragmented stream f.sup.c1 of fluid FC. Simultaneously a partially liquid stream f.sup.t0 of fluid FT is implemented; thermal energy is transferred to the stream f.sup.t0 to generate a stream f.sup.t that may be in liquid form or a saturated liquid/vapor mixture; stream f.sup.1 is expanded in a chamber which also receives fragmented stream f.sup.c1 to form a two-phase mixed stream f.sup.c1/t whose kinetic energy is converted into mechanical energy which is optionally transformed into electrical energy or into refrigerating energy.

The present invention relates to an AACAES system and method in which a heat transfer fluid makes it possible to store heat. The heat transfer fluid, which comprises balls of heat storage material, circulates between two tanks: a hot tank and a cold tank, and passes through at least one heat exchanger.

A geothermal heat recovery device includes a circulation flow path provided with a circulation pump, a heat medium pressurized by the circulation pump circulating through the circulation flow path in a hot liquid state; a heat exchanger installed underground and configured to heat the heat medium flowing through the circulation flow path with underground heat; a binary electricity generation device configured to recover, as electrical energy, thermal energy from the heat medium heated in the heat exchanger; a bypass path connected to the circulation flow path; and an adjustment mechanism configured to adjust a flow division ratio between a flow rate of the heat medium flowing into the heat exchanger and a flow rate of the heat medium bypassing the heat exchanger through the bypass path.

A method for generating electricity and cold and a device for realizing same, consists in a closed absorption cycle in which a working body is a mixture of a low-boiling (refrigerant) component and a high-boiling (absorbent) component. The method involves evaporating a strong solution in a steam generator, thus forming a refrigerant vapor and a weak solution, expanding the refrigerant vapor in a turbine, thus producing work, and, after the turbine, absorbing spent vapor in an absorber, forming a strong solution. A distinguishing feature of the method consists in changing the concentration of a strong solution using two stages, including not only evaporation but also filtration. The proposed method and device allow for significantly increasing the efficiency of systems for generating electricity relative to analogous known methods.

A combined cycle power plant for frequent stops and startups comprises at least one gas turbine, a heat recovery steam generator, at least one steam turbine and a thermal energy storage and retrieval system utilizing latent heat of fusion. Phase change materials receive thermal charge from two sources: (a) renewable energy generation plants, when their production exceeds demand and (b) gas turbine exhaust heat. The thermal energy storage and retrieval system, discharges efficiently thermal energy for steam production, which keeps the at least one steam turbine preheated and ready for fast startups, thus increasing the plant's flexibility and efficiency. A novel two stage latent thermal energy storage system provides at least supercritical steam.

The present invention relates to an aircraft gas turbine comprising a thrust-reverser device that is arranged at the rear area of an engine cowling and that has multiple cascade elements which are distributed at the circumference and which divert a stream, characterized in that the cascade elements are mounted in a displaceable manner, in that on both sides of each cascade element at least one gear rack is formed that can be displaced via a respective cog wheel which is coupled to a driving device, and in that each cascade element is connected to a rear area of the engine cowling via a coupling element for the purpose of displacing the engine cowling in the axial direction.

Filter assemblies and components therefor, are described. In an example arrangement, the crankcase ventilation filter assembly is configured to be serviced from either the top or the bottom. A rotational indexing arrangement is to ensure appropriate orientation of an internally received filter cartridge, and other components of the arrangement are provided. Methods of assembly, servicing and use are described.