A semiconductor structure includes a substrate; a sensing device disposed over the substrate and including a plurality of protruding members protruded from the sensing device; a sensing structure disposed adjacent to the sensing device and including a plurality of sensing electrodes protruded from the sensing structure towards the sensing device; and an actuating structure disposed adjacent to the sensing device and configured to provide an electrostatic force on the sensing device based on a feedback from the sensing structure. Further, a method of manufacturing the semiconductor structure is also disclosed.

A wireless vibrometer employs an antenna array to significantly boost the signal-to-noise ratio of faint received signals twin small objects vibrating at acoustic frequencies. This technique may be used to provide an improved physiological monitor (such as a pulse detector) or for long-range eavesdropping using the emitted power from a cell phone or the like.

A building management system includes building equipment operable to affect a variable state or condition of a building and a controller including a processing circuit. The processing circuit is configured to obtain a vibration data set related to vibrations of the building equipment and analyze the vibration data set by one or more machine learning models to generate a set of probabilities. The set of probabilities is related to a probability that the vibration data set is abnormal. The processing circuit is configured to identify the vibration data set as normal or abnormal based on the set of probabilities and initiate a corrective action responsive to identifying the vibration data set as abnormal.

A building management system includes building equipment operable to affect a variable state or condition of a building and a controller including a processing circuit. The processing circuit is configured to obtain a vibration data set related to vibrations of the building equipment and analyze the vibration data set by one or more machine learning models to generate a set of probabilities. The set of probabilities is related to a probability that the vibration data set is abnormal. The processing circuit is configured to identify the vibration data set as normal or abnormal based on the set of probabilities and initiate a corrective action responsive to identifying the vibration data set as abnormal.

A vibration sensor having a moveable mass being suspended in a suspension member and being adapted to move in response to vibrations or accelerations. The moveable mass and the suspension member are rigidly connected across one or more gaps formed by respective opposing surfaces of the moveable mass and the suspension member. The vibration sensor includes a damping arrangement having a damping substance. The moveable mass is arranged to interact directly or indirectly with the damping substance in order to reduce a mechanical resonance peak of the vibration sensor.

A method for automatic diagnosis of a mechanical system of a group of mechanical systems sharing mechanical characteristics includes obtaining data relating to a vibration. The vibration-related data is acquired by a portable communications device configured to communicate with a remote processor. The processor automatically diagnoses the mechanical system by applying a relationship to the obtained vibration-related data. The relationship is based on sets of vibration-related data previously obtained from the mechanical systems. Each set of vibration-related data relates to vibrations of a mechanical system. The relationship is further based on sets of operation data previously obtained for mechanical systems of the group. Each set of operation data indicates a previous state of operation of a mechanical system. Each of the previous states of operation is associated with at least one of the previously obtained sets of vibration-related data.

Small form-factor MEMS devices and methods of using the devices are disclosed. An exemplary MEMS device includes an accelerometer contact microphone. Certain devices described herein comprise nanometer scale sensing gaps in the out-of-plane direction to increase vibration sensitivity in a vacuum casing. Certain devices described herein provide a differential sensing mechanism. The disclosure also describes accelerometer contact microphones having an operational bandwidth ranging from 0 Hz and 10,000 Hz. The vibration acceleration sensitivity of certain devices described herein is better 100 μg√Hz.

According to an embodiment, a pressure sensor includes a substrate, a support part, a flexible membrane part, and a magnetoresistive element. The support part is adhered on the substrate by using a first adhesive material with a first Young's modulus and a second adhesive material with a second Young's modulus different from the first Young's modulus. The membrane part is supported by the support part. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.

The present invention relates to an opto-mechanical transducer comprising an optical fibre exhibiting a polished pointed distal end placed opposite a reflecting surface and a proximal end being linked up to a coupler combining an illumination optical fibre associated with a light source and a measurement optical fibre associated with a photo-detector. The reflecting element exhibits a movable zone with an axial component, the axial distance between the distal end of the optical fibre and said reflecting surface at rest is determined so that the reflected luminous intensity I.sub.0 is equal to P.Math.I.sub.max where I.sub.max denotes the maximum reflected luminous intensity, and P is a parameter lying between 0.25 and 0.75.

A gyro sensor element includes a base, driving vibrating arms, which extend from the base, have a first surface and a second surface located on an opposite side to the first surface, and make a driving vibration, and detecting vibrating arms, which extend from the base, have a third surface located on a same side as the first surface and a fourth surface located on an opposite side to the third surface, and vibrate in accordance with a physical quantity applied to the driving vibrating arms, wherein the driving vibrating arms have bottomed grooves on at least one of the first surface and the second surface, and driving electrodes disposed on inner surfaces of the bottomed grooves, and the detecting vibrating arms have through holes penetrating the detecting vibrating arms in a direction crossing the third surface and the fourth surface, and detecting electrodes disposed on at least a part of an inner wall surface of the through holes.