A microscope system for flexibly, efficiently and quickly inspecting patterns and defects on extreme ultraviolet (EUV) lithography photomasks. The system includes a stand-alone plasma-based EUV radiation source with an emission spectrum with a freestanding line emission in the spectral range from 12.5 nm to 14.5 nm has a relative bandwidth of λ/Δλ>1000, means for the broadband spectral filtering λ/Δλ<50 for selecting the dominant freestanding emission line, means for suppressing radiation with wavelengths outside of the EUV spectral region, zone plate optics for magnified imaging of the object with a resolution which corresponds to the width of an outermost zone of the zone plate, a numerical aperture corresponding to more than 1000 zones, and a EUV detector array for capturing the patterned object.

A microscope system for flexibly, efficiently and quickly inspecting patterns and defects on extreme ultraviolet (EUV) lithography photomasks. The system includes a stand-alone plasma-based EUV radiation source with an emission spectrum with a freestanding line emission in the spectral range from 12.5 nm to 14.5 nm has a relative bandwidth of λ/Δλ>1000, means for the broadband spectral filtering λ/Δλ<50 for selecting the dominant freestanding emission line, means for suppressing radiation with wavelengths outside of the EUV spectral region, zone plate optics for magnified imaging of the object with a resolution which corresponds to the width of an outermost zone of the zone plate, a numerical aperture corresponding to more than 1000 zones, and a EUV detector array for capturing the patterned object.

An x-ray source includes an optical communications link to provide a galvanically isolated communication between a system controller and a gun controller. In specific examples, the link is provided through one or more fibers. In addition, the gun controller is preferably remote programmed by the system controller during startup. This addresses the problem of reprogramming a processor in a hard to access location/environment. A watchdog timer is also useful for the gun digital processor of the gun controller.

The electron beam is typically dynamically steered after its generation on the path to the target. The steering is performed by one or more source coils. These coils produce the magnetic field outside the vacuum vessel allowing air/water/oil cooling to remove undesired heat. The magnetic field is then picked up inside the vacuum vessel with pole pieces and guided towards the region where the magnetic field is needed to steer the electron beam.

A mask inspection apparatus includes an image acquisition mechanism that acquires an optical image of the pattern by making an inspection light incident on an EUV mask and detecting a reflection inspection light reflected from the EUV mask, in a state where the relation between the incident direction of the inspection light used for inspecting the pattern formed on the EUV mask, and the arrangement direction of the EUV mask serving as the inspection substrate is matched with the relation between the incident direction of the EUV light on the EUV mask, and the arrangement direction of the EUV mask in the EUV exposure apparatus.

The X-ray analysis apparatus contains an X-ray generation unit. The X-ray generation unit includes a target plate having a target that is irradiated with an electron beam from an electron beam source and generates X-rays, X-ray convergence optics that converges X-rays generated from the target in conjunction with a movement of the target plate, and a driving unit that changes a position of the target plate or the X-ray convergence optics relative to the electron beam source.

A system is disclosed for the examination and inspection of integrated devices such as integrated circuits using 3-D laminography. X-rays are transmitted through the integrated device, and are incident on a photoemissive structure that absorbs x-rays and emits electrons. The electrons emitted by the photoemissive structure are shaped by an electron optical system to form a magnified image of the emitted electrons on a detector. This magnified image is then recorded and processed. In some embodiments, the incidence angle of the x-rays is varied to gather multiple images that allow internal three-dimensional structures of the integrated device to be determined using computed laminography. In some embodiments, the recorded images are compared with reference data to enable inspection for manufacturing quality control.

A method of controlling a needle actuator to interact with a cell is provided, the method comprising: providing an actuator comprising a tower, a stage and a needle, wherein the needle is mounted on the stage; applying an electrostatic potential between the tower and the stage to retract the needle; moving the actuator towards the cell; reducing the potential so as to allow the stage and needle to move towards the cell; applying calibration data to detect when the needle has pierced the cell; and reducing the potential further once it has been detected that the needle has pierced the cell. The cell can be a biological cell. The needle can be a micro-needle and the stage can be a micro-stage.

A particle detector that includes an inspection light source that irradiates a flow cell with inspection light, the flow cell that allows a fluid containing a particle to flow therethrough, the flow cell including a semispherical reflective film that reflects reaction light generated by the particle irradiated with the inspection light, and a semispherical lens portion through which the reaction light reflected by the semispherical reflective film passes, an elliptical mirror that has a first focus at a position of the flow cell, and that reflects the reaction light having passed through the semispherical lens portion of the flow cell, and an optical detector that is disposed at a second focus of the elliptical mirror and that detects the reaction light reflected by the elliptical mirror.

Systems and process are provided to make X-ray radiographs sufficiently quantitative and standardized for bone and other biological material or non-biologic material density evaluations. The X-ray radiograph methodology and system provide a cost effective diagnostic tool that may be used with existing X-ray radiography sources already present in many clinics and hospitals to ultimately produce large volumes of scientifically valid data and useful diagnostic and prognostic information. A calibration bar is added to a conventional X-ray film cartridge and images thereof subsequently incorporated into radiographs for interpretation or a cartridge is designed to integrate a calibration function. The calibration standard affords a standard against which material density is measured. A software program is provided to interpret tissue densities (including bone) to ultimately identify values compared to preselected thresholds.